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    • 29. 发明申请
    • TWIN TARGET SPUTTER SYSTEM FOR THIN FILM PASSIVATION AND METHOD OF FORMING FILM USING THE SAME
    • 用于薄膜钝化的双目标溅射系统及其形成膜的方法
    • WO2008130205A1
    • 2008-10-30
    • PCT/KR2008/002337
    • 2008-04-24
    • TOP ENGINEERING CO., LTDLEE, Sang-hyunRYU, Do-hyun
    • LEE, Sang-hyunRYU, Do-hyun
    • H01L21/203
    • C23C14/568C23C14/352H01L51/5253
    • Provided are a twin target sputter system for thin film passivation, which generates high density plasma between the same-shaped targets opposite to each other to thereby form a film at a high speed, and a method of forming the film using the same. The twin target sputter system for thin film passivation includes: a vacuum chamber; a substrate supporter which supports a substrate in the vacuum chamber; a pair of sputter guns each of which faces the substrate, and comprises a yoke plate opened to one side or opposite sides and a plurality of magnets disposed on the yoke plate at regular intervals; targets which are mounted on the pair of yoke plates, respectively; a gun supporter which supports the pair of sputter guns; and a power supply which supplies electric current to the targets, wherein the plurality of magnets each comprises upper and lower parts, the upper and lower parts are formed as a single body and different in magnetic polarity from each other, and the plurality of magnets are aligned in a line, and wherein the gun supporter or the substrate supporter is movable in the chamber. Using the twin target sputter system for thin film passivation and the method of forming a film using the same, an organic light emitting diode (OLED) and an organic thin film transistor (OTFT) can be fabricated by a simple thin film process without an encapsulation process using the existing metal can or glass substrate, thereby simplifying the process and lowering initial investment costs for fabricating the OLED.
    • 提供了一种用于薄膜钝化的双靶溅射系统,其在彼此相对的相同形状的靶之间产生高密度等离子体,从而以高速形成膜,以及使用其形成膜的方法。 用于薄膜钝化的双靶溅射系统包括:真空室; 支撑真空室中的基板的基板支撑件; 一对溅射枪各自面向基板,并且包括以一定面积设置在轭板上的一侧或相对侧的磁轭板和多个磁体; 分别安装在一对轭板上的目标; 支持一对溅射枪的枪支持器; 以及向所述目标供给电流的电源,其中,所述多个磁体各自包括上部和下部,所述上部和下部形成为单个主体并且彼此的磁极性彼此不同,并且所述多个磁体是 排列成一行,并且其中枪支撑件或基板支撑件可在腔室中移动。 使用用于薄膜钝化的双靶溅射系统和使用其形成膜的方法,有机发光二极管(OLED)和有机薄膜晶体管(OTFT)可以通过简单的薄膜工艺制造而无需封装 使用现有的金属罐或玻璃基板的工艺,从而简化了工艺并降低了用于制造OLED的初始投资成本。