会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 11. 发明申请
    • PRODUCING A COVERED THROUGH SUBSTRATE VIA USING A TEMPORARY CAP LAYER
    • 通过使用临时盖层生产覆盖的基板
    • WO2007054867A2
    • 2007-05-18
    • PCT/IB2006/054082
    • 2006-11-03
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.KLOOTWIJK, Johan, H.KEMMEREN, Antonius, L., A., M.DEKKER, RonaldVAN GRUNSVEN, Eric, C., E.ROOZEBOOM, Freddy
    • KLOOTWIJK, Johan, H.KEMMEREN, Antonius, L., A., M.DEKKER, RonaldVAN GRUNSVEN, Eric, C., E.ROOZEBOOM, Freddy
    • H01L21/768
    • H01L21/76898H01L21/764H01L23/481H01L2924/0002H01L2924/00
    • The present invention relates to a method for producing a substrate with at least one covered via that electrically and preferably also thermally connects a first substrate side with an opposite second substrate side. The processing involves forming a trench on a the first substrate side remains and covering the trench with a permanent layer on top of a temporary, sacrificial cap-layer, which is decomposed in a thermal process step. The method of the invention provides alternative ways to remove decomposition products of the sacrificial cap-layer material without remaining traces or contamination even in the presence of the permanent layer. This is, according to a first aspect of the invention, achieved by providing the substrate trench with an overcoat layer that has holes. The holes in the overcoat layer leave room for the removal of the decomposition products of the cap-layer material. According to the second aspect of the invention, opening the covered trench from the second substrate side and allowing the cap-layer material to be removed through that opening provides a solution. Both methods of the present invention are based on the common idea of using a temporary cap-layer even in a situation where the substrate opening is permanently covered before the removal of the temporary cap-layer.
    • 本发明涉及一种制造具有至少一个覆盖通孔的基板的方法,所述至少一个覆盖通孔电连接并优选地将第一基板侧与相对的第二基板侧热连接。 所述处理涉及在第一基板侧上形成沟槽,并在热处理步骤中分解的临时牺牲盖层的顶部上保留并覆盖具有永久层的沟槽。 本发明的方法提供了即使在存在永久层的情况下除去牺牲帽层材料的分解产物而不留下痕迹或污染物的替代方法。 根据本发明的第一方面,这是通过为基底沟槽提供具有孔的外涂层而实现的。 外涂层中的孔留下去除盖层材料的分解产物的空间。 根据本发明的第二方面,从第二基板侧打开被覆盖的沟槽并且允许通过该开口去除盖层材料提供了一种解决方案。 本发明的两种方法都是基于即使在去除临时盖层之前基材开口被永久地覆盖的情况下使用临时盖层的常见思想。
    • 14. 发明申请
    • RADIATION-EMITTING SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SUCH A DEVICE
    • 辐射发射半导体器件及其制造方法
    • WO2004047181A1
    • 2004-06-03
    • PCT/IB2003/004810
    • 2003-10-28
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.KLOOTWIJK, Johan, H.SLOTBOOM, Jan, W.
    • KLOOTWIJK, Johan, H.SLOTBOOM, Jan, W.
    • H01L29/73
    • H01L29/7313H01L33/0004
    • The invention relates to a radiation-emitting semiconductor device (10) with a semiconductor body (1) and a substrate (2), wherein the semiconductor body (1) comprises a vertical bipolar transistor with an emitter region (3), a base region (4) and a collector region (5), which regions are each provided with a connection region (6, 7, 8), and the border between the base region (4) and the collector region (5) forms a pn-junction and, in operation, at a reverse bias of the pn-junction or at a sufficiently large collector current, avalanche multiplication of charge carriers occurs whereby radiation is generated in the collector region (5). According to the invention, the collector region (5) has a thickness through which transmission of the generated radiation occurs, and the collector region (5) borders on a free surface of the semiconductor body (1). In this way, less of the generated radiation is lost by absorption and the radiation generated is more readily available to serve as an optical signal for, for example, another part of the device (10) or for another device (10). A second sub-region (5B) in the collector region (5) may be made for example with the aid of a gate electrode (11) with which a conducting channel can be induced in the semiconductor body (1). Preferably, a radiation conductor (14) is present on the surface of the latter. The invention further comprises a method of manufacturing a device (10) according to the invention.
    • 本发明涉及具有半导体本体(1)和衬底(2)的辐射发射半导体器件(10),其中半导体本体(1)包括具有发射极区(3)的垂直双极晶体管,基极区 (4)和集电极区域(5),这些区域各自设置有连接区域(6,7,8),并且基极区域(4)和集电极区域(5)之间的边界形成pn结 并且在操作中,在pn结的反向偏压或集电极电流充足的情况下,发生电荷载流子的雪崩倍增,从而在集电极区域(5)中产生辐射。 根据本发明,集电区(5)具有产生辐射的透射的厚度,并且集电区(5)与半导体本体(1)的自由表面接合。 以这种方式,所产生的辐射的少量通过吸收而损失,并且所产生的辐射更容易用作用作例如装置(10)的另一部分或另一装置(10)的光信号。 集电极区域(5)中的第二子区域(5B)可以例如借助于在半导体本体(1)中可以被引导导电沟道的栅电极(11)制成。 优选地,辐射导体(14)存在于其上的辐射导体(14)的表面上。 本发明还包括一种制造根据本发明的装置(10)的方法。
    • 20. 发明申请
    • BIPOLAR TRANSISTOR AND METHOD OF MANUFACTURING SAME
    • 双极晶体管及其制造方法
    • WO2003015177A1
    • 2003-02-20
    • PCT/IB2002/002680
    • 2002-06-27
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.
    • HUIZING, Hendrik, G., A.SLOTBOOM, Jan, W.LYUBOSHENKO, IgorKLOOTWIJK, Johan, H.VAN RIJS, FreerkMELAI, Joost
    • H01L29/737
    • H01L29/7378H01L29/0821H01L29/7371
    • The bipolar transistor comprises a collector region (1) of a semiconductor material with a first doping type, an emitter region (2) with a first doping type, and a base region (3) of a semiconductor material with a second doping type, opposite to the first doping type, which base region is arranged between the emitter region (2) and the collector region (1), and a semiconductor area (4) extending between the collector region (1) and the base region (3). The collector region (1) is doped such that the semiconductor area (4) is fully depleted and the magnitude of the intrinsic electric field in the semiconductor area (4) is at least substantially independent of the applied doping types and the doping concentration in the semiconductor area (4). The method of manufacturing the bipolar transistor comprises the step of epitaxially growing a semiconductor layer (6) over a collector region (1) and doping the epitaxial layer (6) in situ, after which the base region (3) is deposited epitaxially. The comparatively thin semiconductor area (4) between the base region (3) and the collector region (1) allows ultrafast bipolar transistors with a high cutoff frequency and an improved breakdown voltage to be manufactured. The product of the cutoff frequency and the collector-emitter breakdown voltage of these bipolar transistors exceeds the Johnson limit.
    • 双极晶体管包括具有第一掺杂类型的半导体材料的集电极区域(1),具有第一掺杂类型的发射极区域(2)和具有第二掺杂类型的半导体材料的基极区域(3) 到第一掺杂类型,该基极区域布置在发射极区域(2)和集电极区域(1)之间,以及在集电极区域(1)和基极区域(3)之间延伸的半导体区域(4)。 掺杂集电极区域(1)使得半导体区域(4)完全耗尽并且半导体区域(4)中的本征电场的大小至少基本上与施加的掺杂类型和掺杂浓度 半导体区域(4)。 制造双极晶体管的方法包括在集电极区域(1)上外延生长半导体层(6)并原位掺杂外延层(6)的步骤,然后外延地沉积基极区域(3)。 在基极区域(3)和集电极区域(1)之间的较薄的半导体区域(4)允许制造具有高截止频率和改善的击穿电压的超快双极型晶体管。 这些双极晶体管的截止频率和集电极 - 发射极击穿电压的乘积超过约翰逊限制。