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    • 16. 发明申请
    • OPTICAL MEMBRANE ELEMENT
    • 光学膜元件
    • WO2009043885A2
    • 2009-04-09
    • PCT/EP2008063170
    • 2008-10-01
    • ZEISS CARL SMT AGMUELLER ULRICHRATH MARTIN
    • MUELLER ULRICHRATH MARTIN
    • G03F1/64
    • G03F7/7015G02B5/208G03F1/64
    • The present invention relates to an optical membrane element for an optical device in lithography, especially EUV (extreme ultraviolet) lithography, with at least one membrane layer and a frame, which at least partially surrounds the membrane layer and at which at least part of the rim of the membrane layer is mounted, wherein at least one tautening element provided, which facilitates tautening of the membrane layer and wherein the optical membrane element can be used in a projection exposure system, especially for EUV lithography, such that the membrane layer of the membrane element can be adjustably tautened, such that the membrane layer is flat and wherein a method for manufacturing a corresponding optical membrane element is provided, in which a tautening element is generated lithographically together with the membrane layer.
    • 用于光刻设备中的光学器件的光学膜元件技术领域本发明涉及光刻设备中的光学器件的光学膜元件,尤其是EUV(极紫外)光刻技术,其具有至少一个膜层和框架,所述至少一个膜层和框架至少部分地围绕膜层, 其中设置至少一个粘合元件,该粘合元件有利于薄膜层的粘合,并且其中光学膜元件可以用于投影曝光系统中,特别是用于EUV光刻,使得薄膜层的膜层 膜元件可被可调节地拉紧,使得膜层是平坦的,并且其中提供了一种用于制造相应的光学膜元件的方法,其中与膜层一起光刻地产生一种调色元件。
    • 20. 发明申请
    • CLOSING SYSTEM FOR MOTOR VEHICLES
    • 锁紧系统机动车辆
    • WO02051676B1
    • 2003-02-20
    • PCT/EP0113883
    • 2001-11-28
    • HUF HUELSBECK & FUERST GMBHMUELLER ULRICH
    • MUELLER ULRICH
    • B60R25/102B60R25/00B60R25/021B60R25/24G07C9/00H04Q7/32B60R25/04
    • G07C9/00309B60R25/24B60R2325/101B60R2325/205G07C2009/00373
    • The invention relates to a closing system for motor vehicles involving access authorization and driving authorization by means of a control unit provided with means of communication. Said communication means comprise a stationary transmitter-receiver unit in the vehicle and a mobile transmitter-receiver unit in a wireless hand telephone (10). The control unit monitors the data transferred during said communication for access or driving authorization and activates or deactivates the corresponding systems if authorization is valid. The hand telephone (10) contains an SIM card (15) for telephonic network operation. In order to use the closing system in a quick and comfortable manner, the SIM card (15) is also a carrier for the access and driving authorization data. (16). A bi-directional local communication hands-free system operating in the GHz range is also used in the motor vehicle. Said telephonic local communication is also used for transmitting access and/or driving authorization data (16).
    • 在锁定系统用于机动车辆为约接入授权和驱动授权,这是与一个控制器,该控制器通信装置包括在无线电话手机(10),一方面在车辆和一个移动发送一个静止的发送和接收单元和接收单元操作。 在该通信控制器检查,数据发送到其接入或驱动授权和设置,如果成功的相关系统有效或无效。 手持电话(10),包括其电话Netbetrieb SIM卡(15)。 若要快速将关闭和方便的建议将SIM卡(15),以使在同一时间的接入载体和驾驶授权数据(16)。 此外,免提系统在车辆中使用,其由在GHz范围内的双向本地通信的操作的。 这个电话本地通信也用于ïbermittlung接入和/或驱动授权数据(16)。