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    • 20. 发明申请
    • A CHEMICAL SENSOR
    • 化学传感器
    • WO2017207963A1
    • 2017-12-07
    • PCT/GB2017/051467
    • 2017-05-25
    • AMS SENSORS UK LIMITED
    • HOPPER, Richard HenryDE LUCA, AndreaLEDINS, KasparsALI, Syed ZeeshanCHOWDHURY, Mohamed Foysol
    • G01N21/3504G01N33/00G01N21/03G01J5/08
    • We disclose a chemical sensing device for detecting a fluid. The sensing device comprises: at least one substrate region (1) comprising at least one etched portion; a dielectric region (3) formed on the at least one substrate region, the dielectric region comprising at least one dielectric membrane region (3) adjacent to the at least one etched portion; an optical source (2) for emitting an infra-red (IR) signal; an optical detector (4) for detecting the IR signal emitted from the optical source; one or more further substrates (6) formed on or under the dielectric region, said one or more further substrates defining an optical path for the IR signal to propagate from the optical source to the optical detector. At least one of the optical source and optical detector is formed in or on the dielectric membrane region.
    • 我们公开了一种用于检测流体的化学传感装置。 感测装置包括:至少一个衬底区域(1),其包括至少一个蚀刻部分; 介电区域(3),其形成在所述至少一个衬底区域上,所述介电区域包括与所述至少一个蚀刻部分相邻的至少一个介电膜区域(3) 用于发射红外(IR)信号的光源(2) 光检测器(4),用于检测从光源发射的IR信号; 在电介质区域上或电介质区域下方形成的一个或多个另外的衬底(6),所述一个或多个另外的衬底限定用于IR信号从光源传播到光学检测器的光路。 光源和光检测器中的至少一个形成在电介质膜区域中或电介质膜区域上。