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91. 发明申请

WO2008079742A3 PREVENTION OF FILM DEPOSITION ON PECVD PROCESS CHAMBER WALL 审中-公开
标题翻译：防止膜电沉积在PECVD工艺室壁上
公开(公告)号：WO2008079742A3
公开(公告)日：2008-10-30
申请号：PCT/US2007087597
申请日：2007-12-14
申请人： APPLIED MATERIALS INC , WHITE JOHN M , PARK BEOM SOO , TINER ROBIN L , CHOI SOO YOUNG
发明人： WHITE JOHN M , PARK BEOM SOO , TINER ROBIN L , CHOI SOO YOUNG
IPC分类号： H01J37/32 , H01L21/00
CPC分类号： C23C16/4585 , C23C16/4586 , H01J37/32495 , H01J37/32623
摘要： A method and apparatus for processing a substrate are provided. The chamber body comprises a chamber bottom and a sidewall having a slit valve. A substrate support comprising a support body is disposed in the chamber body. A first end of at least one wide RF ground strap is coupled with the support body and a second end of at least one RF ground strap is coupled with the chamber bottom. At least one extension bar is positioned along a peripheral edge of the support body. The method comprises providing a processing chamber having a slit valve and a substrate support, providing RF power to a distribution plate disposed over the substrate support, flowing gas through the distribution plate, plasma processing a substrate disposed on the substrate support, and reducing the generation of plasma adjacent to the slit valve.
摘要翻译：提供了一种用于处理衬底的方法和设备。腔室主体包括腔室底部和具有狭缝阀的侧壁。包括支撑体的基板支撑件设置在室主体中。至少一个宽RF接地带的第一端与支撑体耦合，并且至少一个RF接地带的第二端与腔室底部联接。至少一个延伸杆沿着支撑体的外围边缘定位。该方法包括提供具有狭缝阀和衬底支撑件的处理室，向布置在衬底支撑件上方的分配板提供RF功率，使气体流过分布板，等离子体处理设置在衬底支架上的衬底，并减少发电的等离子体。

92. 发明申请

WO2008014136A3 OCTAGON TRANSFER CHAMBER 审中-公开
标题翻译：十字架转移室
公开(公告)号：WO2008014136A3
公开(公告)日：2008-09-25
申请号：PCT/US2007073521
申请日：2007-07-13
申请人： APPLIED MATERIALS INC , WHITE JOHN M , TAKEHARA TAKAKO
发明人： WHITE JOHN M , TAKEHARA TAKAKO
IPC分类号： H01L21/677
CPC分类号： H01L21/67196 , H01L21/67742
摘要： A method and apparatus for processing substrates in a cluster tool is disclosed. The transfer chambers of the cluster tool have eight locations to which additional chambers (i.e., load lock, buffer, and processing chambers) may attach. The transfer chamber may be formed of three separate portions. The central portion may be a rectangular shaped portion. The two other portions may be trapezoidal shaped portions. The trapezoidal shaped portions each have three slots through which the substrate can move for processing. The central portion of the transfer chamber may have a removable lid that allows a technician to easily access the transfer chamber.
摘要翻译：公开了一种用于在集群工具中处理衬底的方法和装置。集群工具的传送室具有八个位置，附加的室（即，装载锁定，缓冲器和处理室）可附接到该位置。传送室可以由三个分开的部分形成。中心部分可以是矩形部分。另外两个部分可以是梯形形状的部分。梯形形状部分每个具有三个狭缝，基板可以通过三个槽移动以用于处理。传送室的中心部分可以具有可移除的盖，其允许技术人员容易地接近传送室。

93. 发明申请

WO2008079742A2 PREVENTION OF FILM DEPOSITION ON PECVD PROCESS CHAMBER WALL 审中-公开
标题翻译：防止PECVD工艺室壁上的膜沉积
公开(公告)号：WO2008079742A2
公开(公告)日：2008-07-03
申请号：PCT/US2007/087597
申请日：2007-12-14
申请人： APPLIED MATERIALS, INC. , WHITE, John, M. , PARK, Beom Soo , TINER, Robin, L. , CHOI, Soo Young
发明人： WHITE, John, M. , PARK, Beom Soo , TINER, Robin, L. , CHOI, Soo Young
IPC分类号： C23C16/00 , H05H1/24
CPC分类号： C23C16/4585 , C23C16/4586 , H01J37/32495 , H01J37/32623
摘要： A method and apparatus for processing a substrate are provided. The chamber body comprises a chamber bottom and a sidewall having a slit valve. A substrate support comprising a support body is disposed in the chamber body. A first end of at least one wide RF ground strap is coupled with the support body and a second end of at least one RF ground strap is coupled with the chamber bottom. At least one extension bar is positioned along a peripheral edge of the support body. The method comprises providing a processing chamber having a slit valve and a substrate support, providing RF power to a distribution plate disposed over the substrate support, flowing gas through the distribution plate, plasma processing a substrate disposed on the substrate support, and reducing the generation of plasma adjacent to the slit valve.
摘要翻译：提供了一种用于处理衬底的方法和设备。腔室主体包括腔室底部和具有狭缝阀的侧壁。包括支撑体的衬底支撑件设置在腔室主体中。至少一个宽RF接地带的第一端与支撑体耦合，并且至少一个RF接地带的第二端与室底部耦合。至少一个延伸杆沿支撑体的周边边缘定位。该方法包括提供具有狭缝阀和基板支撑件的处理腔室，向设置在基板支撑件上方的分配板提供RF功率，使气体流过分配板，等离子体处理设置在基板支撑件上的基板，并且减少产生与狭缝阀相邻的等离子体。

94. 发明申请

WO2008036849A3 PARTICLE TRAP / FILTER FOR RECIRCULATING A DILUTION GAS IN A PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM 审中-公开
公开(公告)号：WO2008036849A3
公开(公告)日：2008-03-27
申请号：PCT/US2007/079084
申请日：2007-09-20
申请人： APPLIED MATERIALS, INC. , WHITE, John M.
发明人： WHITE, John M.
IPC分类号： B01D46/00
摘要： The present invention comprises a method and an apparatus that include a particle trap/filter for recirculating a processing gas through a system. The processing gas may be evacuated from the chamber and may pass through a particle trap/filter. A portion of the gas may recirculate back to the processing chamber while another portion of the process gas may be evacuated through mechanical backing pumps. As the processing gas flows through the particle trap/filter, contaminant substances may be captured by a filter medium inside the particle trap/filter. The recirculated portion of the processing gas may then join fresh, unrecirculated process gas and enter the processing chamber. The amount of gas recirculated may determine the amount of fresh, unrecirculated process gas that may be delivered to the process chamber.

95. 发明申请

WO2008013902A2 METHODS AND APPARATUS FOR IMPROVED MANUFACTURING OF COLOR FILTERS 审中-公开
标题翻译：改进彩色滤光片制造的方法和装置
公开(公告)号：WO2008013902A2
公开(公告)日：2008-01-31
申请号：PCT/US2007/016831
申请日：2007-07-26
申请人： APPLIED MATERIALS, INC. , WHITE, John, M. , SHANG, Quanyuan
发明人： WHITE, John, M. , SHANG, Quanyuan
IPC分类号： B41J2/145
CPC分类号： B41J2/2128 , B41J25/003 , G02B5/201
摘要： Methods and apparatus are provided in which a substrate is aligned so that a longitudinal dimension of a plurality of sub-pixel wells formed on the substrate are substantially perpendicular to a printing direction. Ink is deposited in a subset of the sub-pixel wells via nozzles of a print head wherein each of a plurality of the nozzles deposits a plurality of ink drops in each of the subset of the sub-pixel wells. Numerous other aspects are disclosed.
摘要翻译：提供了一种方法和装置，其中衬底被对准，使得形成在衬底上的多个子像素阱的纵向尺寸基本上垂直于打印方向。墨水通过打印头的喷嘴沉积在子像素孔的子集中，其中多个喷嘴中的每一个在子像素孔的子集中的每一个中沉积多个墨滴。公开了许多其他方面。

96. 发明申请

WO2007149965A2 STROMAL COLLAGEN IN THE DIAGNOSIS AND CHARACTERIZATION OF BREAST CANCER 审中-公开
标题翻译：结肠粘膜在乳腺癌诊断和鉴别中的应用
公开(公告)号：WO2007149965A2
公开(公告)日：2007-12-27
申请号：PCT/US2007/071754
申请日：2007-06-21
申请人： WISCONSIN ALUMNI RESEARCH FOUNDATION , KEELY, Patricia Jo , PROVENZANO, Paolo P. , WHITE, John Graham , ELICEIRI, Kevin William
发明人： KEELY, Patricia Jo , PROVENZANO, Paolo P. , WHITE, John Graham , ELICEIRI, Kevin William
IPC分类号： A61B6/00
CPC分类号： A61B5/4312 , A61B5/0068 , A61B5/0091 , A61B5/726 , A61B6/502 , G06T7/0012 , G06T2207/10056 , G06T2207/30068 , G06T2207/30096 , G06T2207/30101
摘要： The present invention provides methods and systems for evaluating biological materials for the diagnosis of disease, such as gland abnormalities, and the cancerous and precancerous conditions. Nonlinear optical microscopy techniques, such as MP microscopy and harmonic generation microscopy, are used to generate high resolution, three dimensional images of a test tissue, such as a biopsy tissue sample and tissue in whole organisms, that are analyzed, optionally in combination, to detect, identify and characterize tumor-associated collagen signatures. The presence, abundance and extent of histological features and structural motifs comprising tumor-associated collagen signatures may be directly and accurately correlated with the onset and progression of cancer, such as breast cancer. The present methods are capable of providing an accurate and selective diagnosis of cancer, and provide diagnostic information complementary to conventional diagnostic methods.
摘要翻译：本发明提供了用于评估生物材料用于诊断疾病如胃体异常以及癌和癌前病症的方法和系统。使用非线性光学显微术技术，例如MP显微镜和谐波生成显微镜，以产生测试组织的高分辨率三维图像，例如活检组织样品和整个生物体中的组织，其可选地组合分析至检测，鉴定和表征肿瘤相关胶原蛋白的特征。包括肿瘤相关胶原标记的组织学特征和结构基序的存在，丰度和程度可能与癌症如乳腺癌的发病和进展直接和准确相关。本发明的方法能够提供对癌症的准确和选择性诊断，并提供与常规诊断方法相辅相成的诊断信息。

97. 发明申请

WO2007044248B1 LOW-VOLTAGE INDUCTIVELY COUPLED SOURCE FOR PLASMA PROCESSING 审中-公开
标题翻译：用于等离子体处理的低压电感耦合源
公开(公告)号：WO2007044248B1
公开(公告)日：2007-12-13
申请号：PCT/US2006037972
申请日：2006-09-28
申请人： APPLIED MATERIALS INC , WHITE JOHN M , SORENSEN CARL
发明人： WHITE JOHN M , SORENSEN CARL
IPC分类号： C23C14/34
CPC分类号： H01L21/67207 , H01J37/321 , H01J37/32174 , H01L21/6719 , H01L21/67745
摘要： A chamber for plasma processing a substrate. The chamber includes one or more chamber walls defining a plasma processing region and an RF transmitting device configured to transmit RF energy to the plasma processing region. The RF transmitting device comprises a first coil portion and a second coil portion connected in parallel. Each of the first coil portion and the second coil portion is a half turn coil and the voltage at an input of the first coil portion and the voltage at an input of the second coil portion are about the same.
摘要翻译：用于等离子体处理基板的腔室。腔室包括限定等离子体处理区域的一个或多个腔室壁和配置成将RF能量传输到等离子体处理区域的RF发射装置。该射频发射装置包括并联连接的第一线圈部分和第二线圈部分。第一线圈部分和第二线圈部分中的每一个都是半匝线圈，并且第一线圈部分的输入处的电压和第二线圈部分的输入处的电压大致相同。

98. 发明申请

WO2007138099A1 COMPOSITION SILICONE RETICULABLE POUR LA REALISATION DE REVETEMENTS ANTI-ADHERENTS POUR FILMS POLYMERES 审中-公开
标题翻译：用于生产聚合物薄膜的非粘性涂料的可交联硅组合物
公开(公告)号：WO2007138099A1
公开(公告)日：2007-12-06
申请号：PCT/EP2007/055347
申请日：2007-05-31
申请人： RHODIA RECHERCHES ET TECHNOLOGIES , WHITE, John , DUFFY, Sean , FEDER, Michel , POUCHELON, Alain
发明人： WHITE, John , DUFFY, Sean , FEDER, Michel , POUCHELON, Alain
IPC分类号： C08L83/04 , C09D183/04
CPC分类号： C08J7/047 , C08G77/12 , C08G77/20 , C08G77/70 , C08G77/80 , C08J2483/00 , C08L83/04 , C09D183/04 , Y10T428/31663 , C08L83/00
摘要： L'invent ion concerne des compositions silicones réticulables ou réticulées, susceptibles d'être utilisées, notamment, pour former un revêtement ou film hydrofuge et anti-adhérent pour supports souples de préférence sous forme de films en polymère naturel ou synthétique, par exemple en PET. Ces compositions sont du type de celles comprenant des polyorganosiloxanes réticulants porteurs de motifs SiH et des polyorganosiloxanes insaturés, de préférence vinylés, aptes à réagir avec le réticulant par réaction d'addition, en présence de platine pour former le revêtement réticulé anti-adhérent sur le support souple. Le but visé est de proposer de nouvelles compositions silicones liquides d'enduction, sans solvant, réticulables en revêtement anti-adhérent et/ou hydrofuge pour support souple, de manière quasi instantanée et en conduisant à des revêtements silicones réticulés de très bonne qualité, en particulier en termes d'accrochage/adhérence sur le support "rub-off élevé" et de profil d'anti-adhérence (force de décollement à haute vitesse suffisamment élevée).. Pour atteindre ce but, l'invention propose des compositions silicones dont la composante silicone PolyOrganoSiloxane (POS) alcénylée A contient une fraction F1 et une fraction F2, différente l'une de l'autre, F2 promoteur de l'adhérence comprenant une huile (A 2.1 ) linéaire silicone monoalcénylée à l'une de ses extrémités et/ou une huile (A 2.2 ) linéaire silicone longue α,ω, -alcénylée et/ou une huile (A 2.3 ) linéaire "faiblement" alcénylée. Applicat ions : revêtements silicones anti-adhérents obtenus par réticulation/polyaddition pour des films polymères en PET.
摘要翻译：本发明涉及可交联的硅组合物，其可特别用于形成涂层或防水和不粘膜，优选用于柔性载体，例如合成或天然聚合物膜，例如PET。这些组合物的类型包括含有Si-H单元的交联聚有机硅氧烷和优选含有乙烯基的不饱和聚有机硅氧烷，其能够在铂存在下通过加成反应与交联剂反应，以在柔性载体上形成释放交联的不粘涂层。目的是提出新的液体涂料硅组合物，不含溶剂，可交联和不粘和/或防水涂料，用于柔性载体，准瞬时和生产非常高质量的可交联硅涂层，特别是关于钩/粘性一个“高擦除”的支撑和防粘特性（足够的高速分离力）。为了达到这个目的，本发明提出了硅组合物，其中硅化合物成分含有F1级分和F2级分彼此不同的烯丙基化聚硅氧烷（POS）; F2，粘附增强剂包含在其一个末端的直链单硫酸化硅油（A）和/或长线型α，α， - / - 亚烷基化硅油（A >）和/或“弱烯丙基线性油”。应用：从PET的交联/加聚得到的不粘硅涂层。

99. 发明申请

WO2007103262A2 IMPLANTED CARDIAC DEVICE FOR DEFIBRILLATION 审中-公开
标题翻译：用于定位的植入式心脏装置
公开(公告)号：WO2007103262A2
公开(公告)日：2007-09-13
申请号：PCT/US2007/005515
申请日：2007-03-01
申请人： THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY , KUMAR, Uday, N. , WHITE, John, Warren , KNIGHT, Joseph, Allen , AU-YEUNG, Kit, Yee
发明人： KUMAR, Uday, N. , WHITE, John, Warren , KNIGHT, Joseph, Allen , AU-YEUNG, Kit, Yee
IPC分类号： A61N1/362
CPC分类号： A61N1/37 , A61N1/0587 , A61N1/375 , A61N1/3756 , A61N1/3962 , A61N1/3968
摘要： An implantable medical device for delivering electrical cardiac therapy includes a first implantable housing containing a battery. There is also a second implantable housing separate from the first implantable housing and containing at least one of: electronic circuitry adapted to evaluate and initiate electrical cardiac therapy, a storage capacitor and an electrode structure comprising a sensing electrode, a pacing electrode and a therapy electrode. The electronic circuit, the storage capacitor or the electrode structure are electrically connected to the battery. Alternatively, there is an implantable medical device for delivering electrical cardiac therapy having an implantable structure containing the following electrically connected components: a battery, electronic circuitry adapted to evaluate and initiate electrical cardiac therapy, a storage capacitor and an electrode structure comprising a sensing electrode, a pacing electrode and a therapy electrode. This implantable structure is adapted and configured for implantation within the pericardial space. There is a method of providing electrical cardiac therapy by implanting a first housing containing a battery into a first implantation site within the body. Then, implant a second housing separate from the first housing into a second implantation site within the body. The second housing contains at least one of: electronic circuitry adapted to evaluate and initiate electrical cardiac therapy; a storage capacitor and an electrode structure comprising a sensing electrode, a pacing electrode and a therapy electrode. The electronic circuit, the storage capacitor or the electrode structure is electrically connected to the battery.
摘要翻译：用于递送电心脏治疗的可植入医疗装置包括容纳电池的第一可植入壳体。还存在与第一可植入壳体分离的第二可植入壳体并且包含以下中的至少一个：适于评估和启动电心脏治疗的电子电路，存储电容器和包括感测电极，起搏电极和治疗电极的电极结构。电子电路，存储电容器或电极结构电连接到电池。或者，存在用于递送具有包含以下电连接部件的可植入结构的电心电疗法的可植入医疗装置：电池，适于评估和启动电心脏治疗的电子电路，存储电容器和包括感测电极的电极结构，起搏电极和治疗电极。该可植入结构被适配和配置用于植入在心包空间内。存在通过将包含电池的第一壳体植入体内的第一植入部位来提供电心脏治疗的方法。然后，将与第一壳体分离的第二壳体植入体内的第二植入部位。第二壳体包含以下至少一个：适于评估和启动电心脏治疗的电子电路; 存储电容器和包括感测电极，起搏电极和治疗电极的电极结构。电子电路，存储电容器或电极结构电连接到电池。

100. 发明申请

WO2007102882A2 MULTIPLE ZONE SPUTTERING TARGET CREATED THROUGH CONDUCTIVE AND INSULATION BONDING 审中-公开
标题翻译：通过导电和绝缘接合创建的多区域溅射目标
公开(公告)号：WO2007102882A2
公开(公告)日：2007-09-13
申请号：PCT/US2006060069
申请日：2006-10-19
申请人： APPLIED MATERIALS INC , YE YAN , WHITE JOHN M , HOSOKAWA AKIHIRO , LE HIEN-MINH HUU , NISPEROS ELPIDIO C , STIMSON BRADLEY O
发明人： YE YAN , WHITE JOHN M , HOSOKAWA AKIHIRO , LE HIEN-MINH HUU , NISPEROS ELPIDIO C , STIMSON BRADLEY O
IPC分类号： C23C14/32 , C23C14/00
CPC分类号： C23C14/3407 , H01J37/3408 , H01J37/3423 , H01J37/3435 , H01J37/3438 , H01J37/3441
摘要： The present invention generally provides a sputtering apparatus and method in which a sputtering target has a plurality of target sections bonded to a common backing plate. Each segment can be bonded to the common backing plate using a different bonding material. One target segment can be bonded to the backing plate using electrically conductive bonding material while another section is bonded to the backing plate using electrically insulating bonding material. Additionally, each different target section can be separately biased.
摘要翻译：本发明通常提供一种溅射装置和方法，其中溅射靶具有多个目标部分结合到共同的背板上。可以使用不同的接合材料将每个段结合到公共背板上。可以使用导电接合材料将一个目标段结合到背板上，而使用电绝缘接合材料将另一部分结合到背板上。此外，每个不同的目标部分可以单独偏置。

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