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1. 发明申请

WO2006132775A1 TORSIONAL RATE SENSOR WITH MOMENTUM BALANCE AND MODE DECOUPLING 审中-公开
标题翻译：扭矩传感器具有平衡和模式解耦功能
公开(公告)号：WO2006132775A1
公开(公告)日：2006-12-14
申请号：PCT/US2006/019252
申请日：2006-05-18
申请人： BEI TECHNOLOGIES, INC. , ACAR, Cenk , MAO, Minyao , COSTLOW, Lynn, Edward
发明人： ACAR, Cenk , MAO, Minyao , COSTLOW, Lynn, Edward
IPC分类号： G01C19/00
CPC分类号： G01C19/5719 , G01C19/5712
摘要： Rate sensor comprising a plurality of generally planar masses, a drive axis in the plane of each of the masses, means for driving the masses to oscillate about the drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axis for monitoring rate of rotation about the input axis.
摘要翻译：速率传感器包括多个大体上平坦的质量，每个质量平面中的驱动轴，用于驱动质量围绕驱动轴摆动的装置，垂直于驱动轴的输入轴，垂直于驱动轴的感测轴并且输入轴线意味着响应由质量围绕输入轴的旋转而产生的科里奥利力而围绕感测轴线安装用于扭转运动的质量块，以及响应于围绕感测轴线的扭转运动的装置，用于监测关于输入轴。

2. 发明申请

WO2006132773A3 TORSIONAL RATE SENSOR WITH MOMENTUM BALANCE AND MODE DECOUPLING 审中-公开
公开(公告)号：WO2006132773A3
公开(公告)日：2006-12-14
申请号：PCT/US2006/019241
申请日：2006-05-18
申请人： BEI TECHNOLOGIES, INC. , ACAR, Cenk , MAO, Minyao
发明人： ACAR, Cenk , MAO, Minyao
IPC分类号： G01P9/04
摘要： Rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, sensing frames coupled to the masses for movement in response to the torsional movement of the masses about the sense axes, and means responsive to movement of the sensing frames for monitoring rate of rotation about the input axis.

3. 发明申请

WO2006132774A1 TORSIONAL RATE SENSOR WITH MOMENTUM BALANCE AND MODE DECOUPLING 审中-公开
标题翻译：扭矩传感器具有平衡和模式解耦功能
公开(公告)号：WO2006132774A1
公开(公告)日：2006-12-14
申请号：PCT/US2006/019251
申请日：2006-05-18
申请人： BEI TECHNOLOGIES, INC. , MAO, Minyao , ACAR, Cenk , COSTLOW, Lynn, Edward
发明人： MAO, Minyao , ACAR, Cenk , COSTLOW, Lynn, Edward
IPC分类号： G01C19/00
CPC分类号： G01C19/5719
摘要： Rate sensor having a plurality of generally planar masses, means for driving the masses to oscillate about a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, sense axes perpendicular to the drive axis and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axis for monitoring rate of rotation about the input axis.
摘要翻译：速率传感器具有多个大致平坦的质量，用于驱动质量围绕质量平面中的驱动轴振荡的装置，垂直于驱动轴的输入轴，垂直于驱动轴和输入轴的感测轴，响应于通过围绕输入轴的质量旋转而产生的科里奥利力，围绕感测轴安装用于扭转运动的质量，以及响应于绕感测轴的扭转运动的装置，用于监测围绕输入轴的旋转速率。

4. 发明申请

WO2009091966A1 MICROMACHINED CROSS-DIFFERENTIAL DUAL-AXIS ACCELEROMETER 审中-公开
标题翻译： MICROMACHINED交叉差分双轴加速度计
公开(公告)号：WO2009091966A1
公开(公告)日：2009-07-23
申请号：PCT/US2009/031233
申请日：2009-01-16
申请人： CUSTOM SENSORS & TECHNOLOGIES, INC. , ACAR, Cenk , MAO, Minyao
发明人： ACAR, Cenk , MAO, Minyao
IPC分类号： G01P15/125 , G01P15/18
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/0831
摘要： Micromachined accelerometer having one or more proof masses (16, 36, 37, 71, 72) mounted on one or more decoupling frames (17, 38, 39) or on a shuttle (73) such that the proof mass(es) can move along a first (y) axis in response to acceleration along the first axis while being constrained against movement along a second (x) axis and for torsional movement about a third (z) axis perpendicular to the first and second axes in response to acceleration along the second axis. Electrodes (26, 53, 54, 78, 79) that move with the proof mass(es) are interleaved with stationary electrodes (27, 56, 57, 81, 82) to form capacitors (A - D) that change in capacitance both in response to movement of the proof mass(es) along the first axis and in response to torsional movement of the proof mass(es) about the third axis, and circuitry (31 - 34) connected to the electrodes for providing output signals corresponding to acceleration along the first and second axes. The capacitances of two capacitors on each side of the second axis change in the same direction in response to acceleration along the first axis and in opposite directions in response to acceleration along the second axis. Signals from the capacitors that change capacitance in opposite directions both in response to acceleration along the first axis and in response to acceleration along the second axis are differentially combined to provide first and second difference signals, and the difference signals are additively and differentially combined to provide output signals corresponding to acceleration along the first and second axes.
摘要翻译：具有安装在一个或多个解耦框架（17,38,39）上或穿梭器（73）上的一个或多个检验质量块（16,36,37,71,72）的微机械加速度计，使得证明物质可以移动响应于沿着第一轴线的加速度沿着第一（y）轴线沿着第一轴线（y），同时被限制为沿着第二（x）轴线的运动，并且响应于沿着加速沿着垂直于第一和第二轴线的第三（z）轴线的扭转运动第二轴。与检测质量块移动的电极（26,53,54,78,79）与固定电极（27,56,57,81,82）交错以形成电容器（A-D），其电容变化响应于所述证明物质沿着所述第一轴线的运动并且响应于所述证明物质围绕所述第三轴线的扭转运动，以及连接到所述电极的电路（31-34），用于提供对应于沿着第一轴和第二轴的加速度。响应于沿着第二轴的加速度，响应于沿着第一轴的加速度和相反方向响应于沿着第二轴的加速度，第二轴的每一侧的两个电容器的电容在相同的方向上变化。响应于沿着第一轴的加速度和响应于沿着第二轴的加速度而在相反方向改变电容的电容器的信号被差分地组合以提供第一和第二差分信号，并且差分信号被相加和差分地组合以提供对应于沿着第一和第二轴的加速度的输出信号。

5. 发明申请

WO2007021399A3 MULTI-AXIS MICROMACHINED ACCELEROMETER 审中-公开
公开(公告)号：WO2007021399A3
公开(公告)日：2007-02-22
申请号：PCT/US2006/026732
申请日：2006-07-11
申请人： BEI TECHNOLOGIES, INC. , ACAR, Cenk
发明人： ACAR, Cenk
IPC分类号： G01P15/125
摘要： Multi-axis micromachined accelerometer which, in some disclosed embodiments, has a proof mass suspended above a substrate for movement in response to acceleration along first and second axes, a first detection electrode connected to the proof mass and constrained for movement only along the first axis, and a second detection electrode connected to the proof mass and constrained for movement only along the second axis. In another embodiment, the proof mass is also movable in response to acceleration along a third axis which is perpendicular to the substrate, and a third detection electrode is mounted on the substrate beneath the proof mass for detecting movement of the proof mass in response to acceleration along the third axis. In other embodiments, two proof masses are mounted above a substrate for torsional movement about an axis perpendicular to the substrate in response to acceleration along a first axis and for rotational movement about a second axis parallel to the substrate in response to acceleration along second axis perpendicular to the substrate, a first detector having input electrodes connected to the proof masses and constrained for movement only along the first axis for detecting acceleration along the first axis, and detection electrodes mounted on the substrate beneath the proof masses for detecting rotational movement of the proof masses and acceleration along the second axis.

6. 发明申请

WO2012125503A1 MICROELECTROMECHANICAL SYSTEM DEVICE INCLUDING A METAL PROOF MASS AND A PIEZOELECTRIC COMPONENT 审中-公开
标题翻译：包含金属质量和压电元件的微电子机电系统装置
公开(公告)号：WO2012125503A1
公开(公告)日：2012-09-20
申请号：PCT/US2012/028624
申请日：2012-03-09
申请人： QUALCOMM MEMS TECHNOLOGIES, INC., , BLACK, Justin, Phelps , GANAPATHI, Srinivasan, Kodaganallur , STEPHANOU, Philip, Jason , PETERSEN, Kurt, Edward , ACAR, Cenk , SHENOY, Ravindra, Vaman , BUCHAN, Nicholas, Ian
发明人： BLACK, Justin, Phelps , GANAPATHI, Srinivasan, Kodaganallur , STEPHANOU, Philip, Jason , PETERSEN, Kurt, Edward , ACAR, Cenk , SHENOY, Ravindra, Vaman , BUCHAN, Nicholas, Ian
IPC分类号： H01L41/08 , H01L41/113 , B81B3/00 , G01C19/56
CPC分类号： H01L41/1132 , B81B3/0078 , B81B2201/0242 , G01C19/5769 , H01L41/08 , H01L41/081
摘要： This disclosure provides systems, apparatus, and devices and methods of fabrication for electromechanical devices. In one implementation, an apparatus includes a metal proof mass and a piezoelectric component as part of a MEMS device. Such apparatus can be particularly useful for MEMS gyroscope devices. For instance, the metal proof mass, which may have a density several times larger than that of silicon, is capable of reducing the quadrature and bias error in a MEMS gyroscope device, and capable of increasing the sensitivity of the MEMS gyroscope device.
摘要翻译：本公开提供了用于机电装置的系统，装置，装置和制造方法。在一个实施方案中，装置包括作为MEMS器件的一部分的金属防爆质量体和压电部件。这种装置对于MEMS陀螺仪装置尤其有用。例如，可能具有比硅的密度大几倍的密度的金属质量块能够降低MEMS陀螺仪器件中的正交和偏置误差，并且能够增加MEMS陀螺仪器件的灵敏度。

7. 发明申请

WO2012037538A2 MICROMACHINED MONOLITHIC 6-AXIS INERTIAL SENSOR 审中-公开
标题翻译：微型单声道六轴惯性传感器
公开(公告)号：WO2012037538A2
公开(公告)日：2012-03-22
申请号：PCT/US2011/052061
申请日：2011-09-18
申请人： FAIRCHILD SEMICONDUCTOR CORPORATION , ACAR, Cenk
发明人： ACAR, Cenk
IPC分类号： G01C19/56 , G01P9/04 , B81B3/00 , B81C1/00
CPC分类号： B81B3/0018 , B81C1/00158 , G01C19/5712 , G01C19/5755 , G01P15/125 , G01P15/18 , G01P2015/082 , G01P2015/084
摘要： The device layer of a 6-degrees-of-freedom (6-DOF) inertial measurement system can include a single proof-mass 6-axis inertial sensor formed in an x-y plane, the inertial sensor including a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards the edge of the inertial sensor, a central suspension system configured to suspend the 6-axis inertial sensor from the single, central anchor, and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 6-axis inertial sensor about a z-axis normal to the x-y plane.
摘要翻译： 6度自由度（6自由度）惯性测量系统的装置层可以包括形成在xy平面上的单个检验质量6轴惯性传感器，该惯性传感器包括悬挂在主中心锚，主证明质量部分包括朝向惯性传感器的边缘向外延伸的径向部分，被配置为将六轴惯性传感器从单个中心锚固体悬挂的中心悬架系统，以及驱动电极包括移动部分和固定部分，所述移动部分联接到所述径向部分，其中所述驱动电极和所述中央悬挂系统被配置为围绕垂直于xy平面的z轴摆动所述6轴惯性传感器。

8. 发明申请

WO2013116522A1 MEMS MULTI-AXIS GYROSCOPE Z-AXIS ELECTRODE STRUCTURE 审中-公开
标题翻译： MEMS多轴陀螺仪Z轴电极结构
公开(公告)号：WO2013116522A1
公开(公告)日：2013-08-08
申请号：PCT/US2013/024149
申请日：2013-01-31
申请人： ACAR, Cenk
发明人： ACAR, Cenk
IPC分类号： G01C19/56 , G01C19/5719 , G01C19/5783
CPC分类号： G01C19/5712
摘要： Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.
摘要翻译：各种示例包括用于感测运动的微机电模具，其包括与不对称定子电极相互指向的对称的证明质量电极。这些示例中的一些包括围绕垂直于其中布置电极的平面的轴线弯曲的电极。一个例子提供垂直弯曲，其以允许围绕水平轴线弯曲的方式将内万向架耦合到校验块。

9. 发明申请

WO2012037539A1 MICROMACHINED 3-AXIS ACCELEROMETER WITH A SINGLE PROOF-MASS 审中-公开
标题翻译：微型机器3轴加速度计，单质量
公开(公告)号：WO2012037539A1
公开(公告)日：2012-03-22
申请号：PCT/US2011/052064
申请日：2011-09-18
申请人： FAIRCHILD SEMICONDUCTOR CORPORATION , ACAR, Cenk
发明人： ACAR, Cenk
IPC分类号： G01P15/02 , G01P15/097 , G01C19/56 , B81B7/02 , B81C1/00
CPC分类号： H01L29/84 , B81B7/04 , B81B2201/0235 , B81B2201/0242 , B81B2203/051 , B81B2203/053 , B81B2203/055 , B81B2203/056 , B81B2203/058 , B81B2207/094 , G01C19/5755 , G01P15/125 , G01P15/18 , G01P2015/0848
摘要： This document discusses, among other things, an inertial measurement system including a device layer including a single proof-mass 3 -axis accelerometer, a cap wafer bonded to a first surface of the device layer, and a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 3 -axis accelerometer. The single proof-mass 3 -axis accelerometer can be suspended about a single, central anchor, and can include separate x, y, and z-axis flexure bearings, wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor and the z-axis flexure is not symmetrical about the single, central anchor.
摘要翻译：该文献尤其讨论了一种惯性测量系统，该惯性测量系统包括：包括单个质量块3轴加速度计的器件层，结合到器件层的第一表面的帽晶片和结合到器件层的第二表面的通孔晶片器件层，其中帽晶片和通孔晶片被配置为封装单个质量块3轴加速度计。单个质量块3轴加速度计可以围绕单个中心锚悬挂，并且可以包括单独的x，y和z轴挠曲轴承，其中x和y轴挠曲轴承关于单个中心对称锚和Z轴弯曲关于单个中心锚不对称。

10. 发明申请

WO2012037501A2 FLEXURE BEARING TO REDUCE QUADRATURE FOR RESONATING MICROMACHINED DEVICES 审中-公开
标题翻译：柔性轴承减少用于共振微型设备的平台
公开(公告)号：WO2012037501A2
公开(公告)日：2012-03-22
申请号：PCT/US2011/052006
申请日：2011-09-16
申请人： ACAR, Cenk , BRYZEK, Janusz , BLOOMSBURGH, John Gardner
发明人： ACAR, Cenk , BRYZEK, Janusz , BLOOMSBURGH, John Gardner
IPC分类号： B81B3/00 , B81C1/00 , G01C19/56 , G01P9/04
CPC分类号： B81C1/00523 , G01C19/56 , G01C19/5712
摘要： An example include microelectromechanical die for sensing motion that includes a fixed portion, an anchor coupled to the fixed portion, a first nonlinear suspension member coupled to anchor on a side of the anchor, a second nonlinear suspension member coupled to the anchor on the same side of the anchor, the second nonlinear suspension member having a shape and location mirroring the first nonlinear suspension member about an anchor bisecting plane and a proof-mass that is planar, the proof mass suspended at least in part by the first nonlinear suspension member and the second nonlinear suspension member such that the proof-mass is rotable about the anchor and is slideable in a plane parallel to the fixed portion.
摘要翻译：一个例子包括用于感测运动的微机电模具，其包括固定部分，联接到固定部分的锚固件，联接到锚固件在锚固件侧面上的锚固件的第一非线性悬挂构件，在相同侧面上联接到锚固件的第二非线性悬挂构件所述第二非线性悬挂构件具有形状和位置，所述形状和位置使得所述第一非线性悬挂构件围绕锚平分截面平面化，并且所述校准块是平面的，所述证明块至少部分地由所述第一非线性悬置构件悬挂，第二非线性悬挂构件，使得证明物质可绕锚固件旋转，并且可在平行于固定部分的平面中滑动。

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