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    • 2. 发明申请
    • RF POWER DISTRIBUTION DEVICE AND RF POWER DISTRIBUTION METHOD
    • RF功率分配器件和RF功率分配方法
    • WO2012015147A3
    • 2012-03-22
    • PCT/KR2011002951
    • 2011-04-22
    • PLASMART INCKIM JAEHYUNLEE SANG WONLEE YONG GWAN
    • KIM JAEHYUNLEE SANG WONLEE YONG GWAN
    • H05H1/46H03H7/40
    • H05H1/46H01J37/32091H01J37/32183H03H7/40H05H2001/4675H05H2001/4682
    • The present invention provides an RF power distribution device and an RF power distribution method. The device includes an impedance matching network for delivering power from an RF power source, and a power distribution unit for distributing the output power from the impedance matching network to at least one electrode generating a capacitively coupled plasma. The power distribution unit includes: a first reactance device connected in series to a first electrode; a variable capacitor having one end connected in parallel to the first reactance device and the first electrode, and having the other end grounded; and a second reactance device having one end connected to a first node where the one end of the variable capacitor and one end of the first reactance device contact each other, and having the other end connected to a second node where a second electrode and an output terminal of the impedance matching network are connected.
    • 本发明提供一种RF配电装置和RF功率分配方法。 该装置包括用于从RF电源输送功率的阻抗匹配网络和用于将来自阻抗匹配网络的输出功率分配到产生电容耦合等离子体的至少一个电极的配电单元。 配电单元包括:与第一电极串联连接的第一电抗装置; 一个可变电容器,其一端与第一电抗装置和第一电极并联连接,另一端接地; 以及第二电抗装置,其一端连接到第一节点,其中可变电容器的一端和第一电抗装置的一端彼此接触,并且另一端连接到第二节点,其中第二电极和输出 阻抗匹配网络的端子相连。
    • 7. 发明申请
    • SENSOR FOR MEASURING ELECTRICAL CHARACTERISTICS
    • 用于测量电特性的传感器
    • WO2011027984A2
    • 2011-03-10
    • PCT/KR2010005617
    • 2010-08-24
    • PLASMART INCLEE SANG WONKIM JAE HYUN
    • LEE SANG WONKIM JAE HYUN
    • G01R19/00G01R29/00
    • G01R15/181G01R15/142G01R15/165
    • According to the present invention, a sensor for measuring electrical characteristics is provided, comprising a voltage sensor and a current sensor. The voltage sensor comprises: a printed circuit board defining a round through-hole into which a power transmission line is inserted; a ring-shaped electrode fixed against the inner periphery of the through-hole to measure a voltage formed in the power transmission line; and a first terminal portion, one end of which contacts one side of the electrode and the other end of which is exposed through a side of the printed circuit board. The current sensor comprises: a pick up coil wound like a spring and bent along the outer periphery of the through-hole so as to form a doughnut shape when viewed from above, and arranged with at least a portion thereof embedded in the printed circuit board, wherein said pick up coil measures a current flowing in the power line by means of induced current; and a second terminal portion extending from both ends of the pick up coil and exposed through a side of the printed circuit board.
    • 根据本发明,提供了一种用于测量电特性的传感器,其包括电压传感器和电流传感器。 该电压传感器包括:印刷电路板,其限定供电传输线插入其中的圆形通孔; 环形电极,所述环形电极固定在所述通孔的内周上以测量在所述电力传输线中形成的电压; 以及第一端子部分,其一端接触电极的一侧,另一端通过印刷电路板的一侧暴露。 电流传感器包括:拾取线圈,像弹簧那样缠绕并且沿着通孔的外周边弯曲,从而在俯视时形成环形形状,并且布置有至少一部分嵌入在印刷电路板中 其中所述拾取线圈借助于感应电流来测量在所述电力线中流动的电流; 以及第二端子部分,其从拾取线圈的两端延伸并且通过印刷电路板的一侧暴露。