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1. 发明申请

WO2012068559A2 FACTORY LEVEL PROCESS AND FINAL PRODUCT PERFORMANCE CONTROL SYSTEM 审中-公开
标题翻译：工厂级工艺和最终产品性能控制系统
公开(公告)号：WO2012068559A2
公开(公告)日：2012-05-24
申请号：PCT/US2011/061549
申请日：2011-11-18
申请人： APPLIED MATERIALS, INC. , PARIKH, Suketu, Arun , SCHWARM, Alexander, T. , MITTAL, Sanjiv , GAY, Charles
发明人： PARIKH, Suketu, Arun , SCHWARM, Alexander, T. , MITTAL, Sanjiv , GAY, Charles
IPC分类号： G05B19/418
CPC分类号： G05B19/41875 , G05B2219/32182 , Y02P90/12 , Y02P90/18 , Y02P90/22
摘要： A factory control server stores module configuration data for a plurality of modules. The plurality of modules comprises processes for producing a final product and has corresponding module requirements. The factory control server analyzes in real-time actual product output data that is generated by a final product tester after a factory produces at least one final product to determine whether the actual product output data meets an expected product output. The factory control server analyzes actual module data in real-time to determine a new module requirement to cause new actual product output data for a subsequent final product to meet the expected product output in response to a determination that the actual product output data does not meet the expected product output. The factory control server notifies a module controller in real-time of the new module requirement, wherein the module controller changes parameters in real-time to manufacture the subsequent final product using the new module requirement.
摘要翻译：工厂控制服务器存储多个模块的模块配置数据。多个模块包括用于生产最终产品的过程并且具有相应的模块要求。工厂控制服务器在工厂生产至少一个最终产品之后分析由最终产品测试者生成的实时实际产品输出数据，以确定实际产品输出数据是否满足预期的产品输出。工厂控制服务器实时分析实际的模块数据，以确定新的模块要求，以便随后的最终产品产生新的实际产品输出数据以满足预期的产品输出以响应确定实际的产品输出数据不符合预期产品产量。工厂控制服务器实时通知模块控制器新模块要求，其中模块控制器实时更改参数，以使用新的模块要求制造后续最终产品。

2. 发明申请

WO2012068559A3 FACTORY LEVEL PROCESS AND FINAL PRODUCT PERFORMANCE CONTROL SYSTEM 审中-公开
标题翻译：工厂级过程和最终产品性能控制系统
公开(公告)号：WO2012068559A3
公开(公告)日：2012-09-27
申请号：PCT/US2011061549
申请日：2011-11-18
申请人： APPLIED MATERIALS INC , PARIKH SUKETU ARUN , SCHWARM ALEXANDER T , MITTAL SANJIV , GAY CHARLES
发明人： PARIKH SUKETU ARUN , SCHWARM ALEXANDER T , MITTAL SANJIV , GAY CHARLES
IPC分类号： G05B19/418
CPC分类号： G05B19/41875 , G05B2219/32182 , Y02P90/12 , Y02P90/18 , Y02P90/22
摘要： A factory control server stores module configuration data for a plurality of modules. The plurality of modules comprises processes for producing a final product and has corresponding module requirements. The factory control server analyzes in real-time actual product output data that is generated by a final product tester after a factory produces at least one final product to determine whether the actual product output data meets an expected product output. The factory control server analyzes actual module data in real-time to determine a new module requirement to cause new actual product output data for a subsequent final product to meet the expected product output in response to a determination that the actual product output data does not meet the expected product output. The factory control server notifies a module controller in real-time of the new module requirement, wherein the module controller changes parameters in real-time to manufacture the subsequent final product using the new module requirement.
摘要翻译：工厂控制服务器存储多个模块的模块配置数据。多个模块包括用于生产最终产品的过程并具有相应的模块要求。工厂控制服务器实时分析在工厂生产至少一个最终产品之后由最终产品测试器生成的实际产品输出数据，以确定实际产品输出数据是否满足预期产品输出。工厂控制服务器实时分析实际模块数据以确定新的模块要求，以响应于确定实际产品输出数据不符合而导致后续最终产品的新实际产品输出数据满足预期产品输出预期的产品产量。工厂控制服务器实时通知模块控制器新模块需求，其中模块控制器使用新模块需求实时改变参数以制造随后的最终产品。

3. 发明申请

WO2008141139A1 SELF ALIGNED NARROW STORAGE ELEMENTS FOR ADVANCED MEMORY DEVICE 审中-公开
标题翻译：用于高级存储器件的自对准的NARROW存储元件
公开(公告)号：WO2008141139A1
公开(公告)日：2008-11-20
申请号：PCT/US2008/063186
申请日：2008-05-09
申请人： SPANSION LLC , PARIKH, Suketu, Arun
发明人： PARIKH, Suketu, Arun
IPC分类号： H01L21/8242
CPC分类号： H01L27/115 , H01L21/0337 , H01L21/0338 , H01L21/28282 , H01L21/28291 , H01L21/31144 , H01L27/11568 , H01L29/66833 , H01L29/792 , Y10S438/954
摘要： A method of forming a sub-lithographic charge storage element on a semiconductor substrate is provided. The method can involve providing first and second layers on a semiconductor substrate, a thickness of the first layer being larger than a thickness of the second layer; forming a spacer adjacent a side surface of the first layer and on a portion of an upper surface of the second layer; and removing an exposed portion of the second layer that is not covered by the spacer. By removing the exposed portion of the second layer while leaving a portion of the second layer that is protected by the spacer, the method can make a sub-lithographic charge storage element from the remaining portion of the second layer on the semiconductor substrate.
摘要翻译：提供了在半导体衬底上形成次光刻电荷存储元件的方法。该方法可以包括在半导体衬底上提供第一层和第二层，第一层的厚度大于第二层的厚度; 在所述第一层的侧表面和所述第二层的上表面的一部分上形成间隔物; 以及去除未被间隔物覆盖的第二层的暴露部分。通过在留下被间隔物保护的第二层的一部分的同时移除第二层的暴露部分，该方法可以从半导体衬底上的第二层的剩余部分制造亚光刻电荷存储元件。

4. 发明申请

WO2013162720A1 CONTACT AND INTERCONNECT METALLIZATION FOR SOLAR CELLS 审中-公开
标题翻译：用于太阳能电池的接触和互连金属化
公开(公告)号：WO2013162720A1
公开(公告)日：2013-10-31
申请号：PCT/US2013/030000
申请日：2013-03-08
申请人： APPLIED MATERIALS, INC. , PARIKH, Suketu Arun , SHU, Jen , GEE, James, M.
发明人： PARIKH, Suketu Arun , SHU, Jen , GEE, James, M.
IPC分类号： H01L31/18 , H01L31/042 , H01L31/0216 , H01L31/0236
CPC分类号： H01L31/1864 , H01L21/67155 , H01L31/02167 , H01L31/022425 , H01L31/068 , H01L31/1804 , Y02E10/547 , Y02P70/521 , Y10T29/41
摘要： A fabrication line includes a texturizing module configured to texture a substrate, an emitter module configured to form an emitter region, a passivation layer module configured to form a passivation layer, a barrier contact module configured to form a barrier contact region, a firing module configured to anneal the barrier contact region, a top metal contact module configured to form a top metal contact region, and a soldering module configured to solder the barrier contact region to the top metal contact region. The modules are integrated by one or more automated substrate handlers into a single fabrication line. A method for fabricating a solar cell includes sequentially, in an automated fabrication line: doping a dopant in a substrate; disposing a passivation layer; disposing and annealing a barrier metal paste to form a barrier contact; and disposing and annealing a metal contact paste to form a top metal contact region.
摘要翻译：制造线包括被配置为纹理衬底的纹理化模块，被配置为形成发射极区域的发射器模块，被配置为形成钝化层的钝化层模块，被配置为形成屏障接触区域的阻挡接触模块，被配置为将所述阻挡接触区域退火，配置成形成顶部金属接触区域的顶部金属接触模块以及被配置为将所述阻挡接触区域焊接到所述顶部金属接触区域的焊接模块。这些模块由一个或多个自动衬底处理器集成到单个制造线中。一种制造太阳能电池的方法包括在自动化生产线中依次进行：在衬底中掺杂掺杂剂; 设置钝化层; 处理和退火阻挡金属浆料以形成屏障接触; 并且配置和退火金属接触膏以形成顶部金属接触区域。

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