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1. 发明申请

US20150244048A1 LOW POWER THRESHOLD INTEGRATED MICRO-PLASMA LIMITER 有权
标题翻译：低功率阈值集成微型等离子体极限
公开(公告)号：US20150244048A1
公开(公告)日：2015-08-27
申请号：US14708838
申请日：2015-05-11
申请人： NORTHROP GRUMMAN SYSTEMS CORPORATION
发明人： BENJAMIN D. POUST , MICHAEL CONRAD BATTUNG , DINO FERIZOVIC , PATTY P. CHANG-CHIEN
IPC分类号： H01P1/14 , H01T4/08
CPC分类号： H01P1/14 , H01L23/60 , H01L2924/0002 , H01T4/08 , H01T4/16 , H01T19/04 , H03G11/002 , H03G11/004 , H01L2924/00
摘要： A plasma power limiter fabricated using wafer-level fabrication techniques with other circuit elements. The power limiter includes a signal substrate having a first side and a second side, an input signal line formed on the first side, a signal transmission line formed on the second side and an output signal line formed on the first side. The power limiter also includes a ground substrate having a first side and a second side, and being bonded to the signal substrate to form a sealed cavity including an ionizable gas therebetween. The ground substrate includes a ground metal layer formed on the second side. A signal propagating on the input signal line at a power level greater than a threshold power level generates a voltage potential across the cavity that ionizes the gas and generates a plasma discharge, and limits power of the output signal coupled to the output signal line.
摘要翻译：使用晶圆级制造技术与其他电路元件制造的等离子体功率限制器。功率限制器包括具有第一侧和第二侧的信号基板，形成在第一侧的输入信号线，形成在第二侧的信号传输线和形成在第一侧上的输出信号线。功率限制器还包括具有第一侧和第二侧的接地衬底，并且结合到信号衬底以形成包括其间的可电离气体的密封腔。接地衬底包括形成在第二侧上的接地金属层。以大于阈值功率电平的功率电平在输入信号线上传播的信号在空腔两端产生电离气体并产生等离子体放电的电压电位，并限制耦合到输出信号线的输出信号的功率。

2. 发明授权

US07515011B2 Microwave routing element, methods of routing microwaves and systems including same 失效
标题翻译：微波路由元件，路由微波和包括其的系统的方法
公开(公告)号：US07515011B2
公开(公告)日：2009-04-07
申请号：US11196638
申请日：2005-08-03
申请人： Warren M. Farnworth
发明人： Warren M. Farnworth
IPC分类号： H01P1/14 , H01P1/10 , H05H1/46
CPC分类号： H01P1/14
摘要： Microwave routing elements and methods of directing microwaves are disclosed. One routing element comprises an inlet region, a plurality of outlet regions, and junctures positioned between an associated outlet region and the inlet region. Each juncture includes electrodes configured for generating an electrical arc across the juncture to inhibit transmission of microwave energy when the arc is present and permit passage of the microwave energy when the arc is absent. Another routing element includes the inlet region, the outlet regions, and partitions positioned between an associated outlet region and the inlet region. Each partition includes apertures and each aperture includes electrodes configured for generating an electrical arc across the aperture to inhibit transmission of microwave energy when the arc is present and permit passage of microwave energy when the arc is absent. Systems including the routing element, a microwave source, and a plurality of microwave processing chambers are also disclosed.
摘要翻译：公开了微波布线元件和引导微波的方法。一个路由元件包括入口区域，多个出口区域和位于相关联的出口区域和入口区域之间的接合处。每个接合点包括电极，其被配置用于跨过接合点产生电弧，以在电弧存在时抑制微波能量的传播，并且当电弧不存在时允许微波能量通过。另一路由元件包括入口区域，出口区域和位于相关联的出口区域和入口区域之间的分隔件。每个分隔件包括孔，并且每个孔包括被配置用于在所述孔处产生电弧以抑制当存在电弧时微波能量的传播的电极，并且当电弧不存在时允许微波能量通过。还公开了包括路由元件，微波源和多个微波处理室的系统。

3. 发明授权

US5663694A Triggered-plasma microwave switch and method 失效
标题翻译：触发等离子微波开关及方法
公开(公告)号：US5663694A
公开(公告)日：1997-09-02
申请号：US612988
申请日：1996-03-08
申请人： Dan M. Goebel , Joseph Santoru , Robert L. Poeschel , John W. Gerstenberg
发明人： Dan M. Goebel , Joseph Santoru , Robert L. Poeschel , John W. Gerstenberg
IPC分类号： H01J17/64 , H01P1/14 , H01P1/185 , H01P1/28
CPC分类号： H01P1/14
摘要： A microwave switch selectively directs a microwave signal along first and second signal paths. The switch includes a microwave transmission member, a microwave chamber formed by the transmission member for containing an ionizable gas, input and output ports formed by the transmission member to communicate with the microwave chamber and a triggered plasma generator which is configured to generate, in response to a voltage trigger signal, a trigger electron density N.sub.t in the gas. The microwave signal increases the trigger electron density N.sub.t to a reflective electron density N.sub.r. Consequently, the microwave signal is reflected along a first path from the input port when the trigger electron density N.sub.t is present and is directed along a second path to the output port when the trigger electron density N.sub.t is absent. A plurality of these microwave switches is arranged to form a tunable microwave short.
摘要翻译：微波开关选择性地引导微波信号沿着第一和第二信号路径。开关包括微波传输部件，由传输部件形成的用于容纳可电离气体的微波室，由传输部件形成的与微波室连通的输入和输出端口以及触发式等离子体发生器，其被配置为响应于响应到电压触发信号，触发电子密度Nt在气体中。微波信号将触发电子密度Nt增加到反射电子密度Nr。因此，当触发电子密度Nt存在时，微波信号沿着从输入端口的第一路径反射，并且当触发电子密度Nt不存在时，微波信号沿着第二路径被引导到输出端口。多个这些微波开关被布置成形成可调微波短路。

4. 发明授权

US4395684A R.F. Primed plasma limiter for radar receiver protector 失效
标题翻译： R.F. 用于雷达接收器保护器的引导式等离子体限制器
公开(公告)号：US4395684A
公开(公告)日：1983-07-26
申请号：US300762
申请日：1981-09-10
申请人： Harry Goldie , Suman D. Patel
发明人： Harry Goldie , Suman D. Patel
IPC分类号： H01P1/14
CPC分类号： H01P1/14
摘要： The plasma switching stage of a radar receiver protector is simplified and improved by the utilization of a halogen gas filled quartz container and a "keepalive" electron source. The container is configured as a capillary stem filled with low pressure chlorine gas and provides the active switching element in the signal waveguide portion of the receiver protector. An enclosed r.f. energy source in combination with the capillary stem creates a copious and steady free electron supply. The r.f. exciting field used to activate the "keepalive" plasma is enhanced by a coaxial re-entrant cavity located on the top wall of the receiver protector waveguide.
摘要翻译：雷达接收器保护器的等离子切换级通过使用充满卤素气体的石英容器和“保持性”电子源得到简化和改进。容器被配置为填充有低压氯气的毛细管杆，并且在接收器保护器的信号波导部分中提供有源开关元件。封闭的r.f. 能量源与毛细管杆结合产生大量和稳定的自由电子供应。 r.f. 通过位于接收器保护器波导的顶壁上的同轴凹入腔增强用于激活“保持性”等离子体的激励场。

5. 发明授权

US3845427A Insulating cone plasma enhancement configuration for a plasma waveguide switch 失效
标题翻译：绝缘等离子体等离子体增强型等离子体波导开关配置
公开(公告)号：US3845427A
公开(公告)日：1974-10-29
申请号：US41589373
申请日：1973-11-14
申请人： US AIR FORCE
发明人： SCHUBERT D
IPC分类号： H01P1/14
CPC分类号： H01P1/14
摘要： A cone made of insulating material is used for plasma enhancement in a plasma waveguide switch (PWS). The long insulating surface yields an ideal potential distribution for injection of the plasma into the waveguide.
摘要翻译：在等离子体波导开关（PWS）中使用由绝缘材料制成的锥体用于等离子体增强。长的绝缘表面产生用于将等离子体注入到波导中的理想电位分布。

6. 发明授权

US3534298A Rf energy primed t-r switch 失效
标题翻译：射频能源PRIMED T-R开关
公开(公告)号：US3534298A
公开(公告)日：1970-10-13
申请号：US3534298D
申请日：1969-05-15
申请人： WESTINGHOUSE ELECTRIC CORP
发明人： GOLDIE HARRY , KLEIN GERALD I
IPC分类号： G01S7/03 , H03K17/52 , H01P1/14 , H01J19/80
CPC分类号： G01S7/034 , H03K17/52

7. 发明授权

US3354349A Multipactor switch 失效
标题翻译：多功能开关
公开(公告)号：US3354349A
公开(公告)日：1967-11-21
申请号：US41644564
申请日：1964-12-07
申请人： HUGHES AIRCRAFT CO
发明人： HORN KENNETH L
IPC分类号： G01S7/03 , H01J17/04 , H01P1/14
CPC分类号： G01S7/034 , H01J17/04 , H01P1/14

8. 发明授权

US2947956A Fluid cooled energy transmission control device 失效
标题翻译：流体冷却能量传输控制装置
公开(公告)号：US2947956A
公开(公告)日：1960-08-02
申请号：US66972957
申请日：1957-07-03
申请人： BOMAC LAB INC
发明人： ALEXANDER HERBERT C , HAROLD HEINS
IPC分类号： H01P1/14
CPC分类号： H01P1/14

9. 发明授权

US2842745A Waveguide switch 失效
标题翻译：波导开关
公开(公告)号：US2842745A
公开(公告)日：1958-07-08
申请号：US56462556
申请日：1956-01-24
申请人： BURTON GORDON L
发明人： BURTON GORDON L
IPC分类号： H01P1/10 , H01P1/14
CPC分类号： H01P1/10 , H01P1/14

10. 发明授权

US2735092A Guide space 失效
公开(公告)号：US2735092A
公开(公告)日：1956-02-14
申请号：US2735092D
IPC分类号： G01S7/03 , H01J17/04 , H01P1/14 , H01P1/161
CPC分类号： H01P1/14 , G01S7/034 , H01J17/04 , H01P1/161

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