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1. 发明申请

US20150244048A1 LOW POWER THRESHOLD INTEGRATED MICRO-PLASMA LIMITER 有权
标题翻译：低功率阈值集成微型等离子体极限
公开(公告)号：US20150244048A1
公开(公告)日：2015-08-27
申请号：US14708838
申请日：2015-05-11
申请人： NORTHROP GRUMMAN SYSTEMS CORPORATION
发明人： BENJAMIN D. POUST , MICHAEL CONRAD BATTUNG , DINO FERIZOVIC , PATTY P. CHANG-CHIEN
IPC分类号： H01P1/14 , H01T4/08
CPC分类号： H01P1/14 , H01L23/60 , H01L2924/0002 , H01T4/08 , H01T4/16 , H01T19/04 , H03G11/002 , H03G11/004 , H01L2924/00
摘要： A plasma power limiter fabricated using wafer-level fabrication techniques with other circuit elements. The power limiter includes a signal substrate having a first side and a second side, an input signal line formed on the first side, a signal transmission line formed on the second side and an output signal line formed on the first side. The power limiter also includes a ground substrate having a first side and a second side, and being bonded to the signal substrate to form a sealed cavity including an ionizable gas therebetween. The ground substrate includes a ground metal layer formed on the second side. A signal propagating on the input signal line at a power level greater than a threshold power level generates a voltage potential across the cavity that ionizes the gas and generates a plasma discharge, and limits power of the output signal coupled to the output signal line.
摘要翻译：使用晶圆级制造技术与其他电路元件制造的等离子体功率限制器。功率限制器包括具有第一侧和第二侧的信号基板，形成在第一侧的输入信号线，形成在第二侧的信号传输线和形成在第一侧上的输出信号线。功率限制器还包括具有第一侧和第二侧的接地衬底，并且结合到信号衬底以形成包括其间的可电离气体的密封腔。接地衬底包括形成在第二侧上的接地金属层。以大于阈值功率电平的功率电平在输入信号线上传播的信号在空腔两端产生电离气体并产生等离子体放电的电压电位，并限制耦合到输出信号线的输出信号的功率。

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