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1. 发明授权

US09052336B2 Method and apparatus of physical property measurement using a probe-based nano-localized light source 有权
标题翻译：使用基于探针的纳米局部光源进行物理性能测量的方法和装置
公开(公告)号：US09052336B2
公开(公告)日：2015-06-09
申请号：US14532926
申请日：2014-11-04
申请人： Bruker Nano, Inc.
发明人： Markus B. Raschke , Stefan B. Kaemmer , Stephen C. Minne , Chanmin Su
IPC分类号： G01N13/16 , G01Q10/00 , G01Q60/00
CPC分类号： G01Q20/02 , G01Q10/00 , G01Q10/065 , G01Q60/06 , G01Q60/22 , G01Q60/38
摘要： An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
摘要翻译：提供了一种使用采用纳米限制光源的基于探针的计量仪器对样品进行物理性能测量的装置和方法。在一个实施例中，SPM探针尖端被配置为支撑适当的接收元件，以便提供能够在纳米尺度上有效地和局部地激发样品的纳米局部光源。优选地，例如使用AFM TR模式控制方案，在光谱测量期间尖端顶点和样品之间的间隔保持在小于10nm。

2. 发明授权

US08533861B2 Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy 有权
标题翻译：用于温度和频率依赖的原子力显微镜的磁致动和热悬臂
公开(公告)号：US08533861B2
公开(公告)日：2013-09-10
申请号：US13304306
申请日：2011-11-23
申请人： William P. King , Craig Prater , Byeonghee Lee
发明人： William P. King , Craig Prater , Byeonghee Lee
IPC分类号： G01N13/16 , G01B5/28 , G01Q60/00
CPC分类号： G01Q10/045 , G01Q60/363 , G01Q60/58
摘要： Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.
摘要翻译：描述了用于磁力驱动微悬臂梁和磁力驱动和自加热微悬臂梁的方法。还描述了确定材料的粘弹性和热转变温度的方法。

3. 发明授权

US08443461B2 Interatomic force measurements using passively drift compensated non-contact in situ calibrated atomic force microscopy—quantifying chemical bond forces between electronic orbitals by direct force measurements at subatomic lateral resolution 失效
标题翻译：原子力测量使用被动偏移补偿的非接触原位校准原子力显微镜 - 通过在亚原子横向分辨率下的直接力测量在电子轨道之间量化化学键
公开(公告)号：US08443461B2
公开(公告)日：2013-05-14
申请号：US13227733
申请日：2011-09-08
申请人： Frank Michael Ohnesorge
发明人： Frank Michael Ohnesorge
IPC分类号： G01N13/16 , G01N13/00 , G01Q60/24
CPC分类号： G01Q40/00
摘要： Interatomic forces are measured with subatomic lateral resolution by in situ calibrated non-contact and passively thermal drift compensated atomic force microscopy in aqueous or generally liquidous environment; interatomic forces acting between distinct electronic orbitals of front-most tip atom and opposing sample atom can be quantitatively measured with subatomic lateral resolution. Calibration standard is a CaCO3-crystal, which undergoes a well defined pressure induced phase transition from the calcite to the aragonite crystal lattice structure providing an accurate independent force anchor point for the AFM's force versus distance curve. Furthermore, an independent actual tip-sample-distance d calibration is obtained by directly observing oscillatory (steric) solvation forces originating simply from packing effects of the liquid particles at very small tip-sample separations d.Key to achieving this extreme sensitivity is operating the AFM in the simple variable deflection mode in the non-contact regime while specific mechanical instrumental design minimizes thermal drifts.
摘要翻译：原子力通过原位校准的非接触和被动热漂移补偿原子力显微镜在水性或一般液态环境中用亚原子横向分辨率测量; 可以用亚原子横向分辨率定量测量在最前端原子和相对样品原子的不同电子轨道之间作用的原子间力。校准标准是CaCO 3 - 晶体，其经历了从方解石到霰石晶格结构的良好定义的压力诱导相变，为AFM力与距离曲线提供了精确的独立力锚定点。此外，通过直接观察源自液体颗粒的非常小的尖端样品分离d的填充效应的振荡（空间）溶剂化力，获得独立的实际尖端样品距离d校准。实现这种极端灵敏度的关键是在非接触式方式下以简单的可变偏转模式操作AFM，而特定的机械仪器设计可最大限度地减少热漂移。

4. 发明申请

US20100077516A1 PLATINUM SILICIDE TIP APICES FOR PROBE-BASED TECHNOLOGIES 有权
标题翻译：用于基于探针的技术的二氧化钛硅胶贴片APICES
公开(公告)号：US20100077516A1
公开(公告)日：2010-03-25
申请号：US12234816
申请日：2008-09-22
申请人： Harish Bhaskaran , Michel Despont , Ute Drechsler , Abu Sebastian
发明人： Harish Bhaskaran , Michel Despont , Ute Drechsler , Abu Sebastian
IPC分类号： G01N13/16
CPC分类号： G01Q60/40
摘要： Tips including a platinum silicide at an apex of a single crystal silicon tip are provided herein. Also, techniques for creating a tip are provided. The techniques include depositing an amount of platinum (Pt) on a single crystal silicon tip, annealing the platinum and single crystal silicon tip to form a platinum silicide, and selectively etching the platinum with respect to the formed platinum silicide.
摘要翻译：本文提供了包括单晶硅尖端顶点处的铂硅化物的提示。此外，提供了用于创建提示的技术。这些技术包括在单晶硅尖端上沉积一定量的铂（Pt），使铂和单晶硅尖端退火以形成铂硅化物，并相对于形成的铂硅化物选择性地蚀刻铂。

5. 发明申请

US20090293161A1 CANTILEVER DEVICE AND CANTILEVER CONTROLLING METHOD 失效
标题翻译： CANTILEVER设备和CANTILEVER控制方法
公开(公告)号：US20090293161A1
公开(公告)日：2009-11-26
申请号：US12274511
申请日：2008-11-20
申请人： Masaharu Kuroda , Kentaro Nishimura , Takashi Someya , Hiroshi Yabuno
发明人： Masaharu Kuroda , Kentaro Nishimura , Takashi Someya , Hiroshi Yabuno
IPC分类号： G01N13/16 , G12B21/08
CPC分类号： G01Q10/065 , Y10S977/863
摘要： The amplitude control of a cantilever based on the van der Pol model is performed through a feedback using the measurement data on a deflection of the cantilever. A self-oscillating circuit integrates a deflection angle signal of a cantilever detected by a deflection angle measuring mechanism using an integrator, multiplies a resulting integral value by linear feedback gain Klin generated by a gain generator, and an output corresponding to the linear feedback signal is generated. Also, the self-oscillating circuit cubes the deflection angle signal using analog multipliers, integrates the resulting values using integrators, multiplies the resulting integral values by a nonlinear feedback gain Knon generated by a gain generator, and an output corresponding to the nonlinear feedback signal is generated. Furthermore, the self-oscillating circuit 40 adds the outputs together using an adder, and a voltage signal VC for a piezo element is generated.
摘要翻译：基于范德波尔模型的悬臂的幅度控制通过使用悬臂偏转测量数据的反馈进行。自振荡电路使用积分器将由偏转角测量机构检测到的悬臂的偏转角信号进行积分，将由积分器生成的线性反馈增益Klin的积分值乘以与线性反馈信号相对应的输出，生成。此外，自振荡电路使用模拟乘法器对偏转角信号进行立方体，使用积分器对结果值进行积分，将得到的积分值乘以由增益发生器产生的非线性反馈增益Knon，对应于非线性反馈信号的输出为生成。此外，自振荡电路40使用加法器将输出相加，产生用于压电元件的电压信号VC。

6. 发明授权

US07607344B2 Factory-alignable compact cantilever probe 失效
标题翻译：工厂可对齐的紧凑型悬臂式探头
公开(公告)号：US07607344B2
公开(公告)日：2009-10-27
申请号：US11789044
申请日：2007-04-23
申请人： Frederick Sachs
发明人： Frederick Sachs
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q10/04 , G01Q20/02 , G01Q60/38
摘要： A scanner which includes a gradient index lens for passing and focusing beams from a radiation emitter to a cantilevered member reflective surface of a probe and from the reflective surface to a radiation detector. The lens also serves as a mechanical support for attachment of the radiation emitter and the radiation detector and is also attached to a support for the cantilevered member. The resulting fixed positions of the radiation emitter and the radiation detector relative to the reflective cantilevered member surface allows the scanner to be compact and factory focally alignable.
摘要翻译：一种扫描仪，其包括用于将来自辐射发射器的光束传递到聚焦到探针的悬臂构件反射表面并且从反射表面到辐射探测器的梯度折射率透镜。透镜还用作用于附接辐射发射器和辐射探测器的机械支撑件，并且还附接到用于悬臂构件的支撑件。辐射发射器和辐射检测器相对于反射悬臂构件表面的最终固定位置允许扫描仪紧凑并且工厂可以对准。

7. 发明授权

US07596990B2 Method and apparatus for obtaining quantitative measurements using a probe based instrument 有权
标题翻译：用于使用基于探针的仪器获得定量测量的方法和装置
公开(公告)号：US07596990B2
公开(公告)日：2009-10-06
申请号：US11106366
申请日：2005-04-14
申请人： Chanmin Su , Nghi Phan , Craig Prater
发明人： Chanmin Su , Nghi Phan , Craig Prater
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q10/065 , G01Q60/366
摘要： A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.
摘要翻译：控制基于探针的悬臂式仪器是为了抵消由于探针样品相互作用而对探针施加的横向载荷。探针优选地包括主动悬臂，例如所谓的双压电晶片悬臂。优选地通过监测探针操作的横向力相关性质（例如悬臂自由端偏转角）来实现力抵抗，并且在反馈下向悬臂和一个或多个单独的致动器中的至少一个施加电压以保持该特性作为探针样品间距减小。探头可以进一步使用接触弯曲和扭转共振特性中的至少一个来确定接触点和释放点。通过对尖端特征的了解，可以获得探针样品相互作用的定量机械数据。

8. 发明授权

US07547882B2 Scan data collection for better overall data accurancy 有权
标题翻译：扫描数据采集，以获得更好的总体数据准确性
公开(公告)号：US07547882B2
公开(公告)日：2009-06-16
申请号：US11378583
申请日：2006-03-17
申请人： Kenneth Roessler , Dong Chen
发明人： Kenneth Roessler , Dong Chen
IPC分类号： G01N13/16
CPC分类号： G01Q10/06 , G01Q30/04
摘要： A scan data collection operation includes performing a scanning operation using a scan path that includes a directional component that is additional to a data collection directional component. The collected scan data is mapped to another set of locations, thus allowing for detection of surface features using fewer scans.
摘要翻译：扫描数据收集操作包括使用包括对数据收集方向分量附加的方向分量的扫描路径执行扫描操作。收集的扫描数据被映射到另一组位置，从而允许使用更少的扫描来检测表面特征。

9. 发明授权

US07485857B2 Microcoaxial probes made from strained semiconductor bilayers 有权
标题翻译：微应力探针由应变半导体双层制成
公开(公告)号：US07485857B2
公开(公告)日：2009-02-03
申请号：US11519212
申请日：2006-09-11
申请人： Robert H. Blick
发明人： Robert H. Blick
IPC分类号： G12B21/02 , G12B21/04 , G12B21/08 , G01N13/10 , G01N13/12 , G01N13/16
CPC分类号： G01Q70/10 , G01N23/00 , G01Q60/04 , G01Q60/16 , G01Q60/30 , G01Q70/14 , Y10S977/875 , Y10S977/878 , Y10S977/879
摘要： The present invention provides microcoaxial probes fabricated from semiconductor heterostructures that include strained semiconductor bilayers. The microcoaxial probes are well suited for use as scanning probes in scanning probe microscopy, including scanning tunneling microscopy (STM), atomic force microscopy (AFM), scanning microwave microscopy, or a combination thereof.
摘要翻译：本发明提供由包括应变半导体双层的半导体异质结构制造的微轴向探针。微扫描探针非常适合用作扫描探针显微镜中的扫描探针，包括扫描隧道显微镜（STM），原子力显微镜（AFM），扫描微波显微镜或其组合。

10. 发明申请

US20080283755A1 High frequency deflection measurement of IR absorption 有权
标题翻译：红外吸收的高频偏转测量
公开(公告)号：US20080283755A1
公开(公告)日：2008-11-20
申请号：US11803421
申请日：2007-05-15
申请人： A. Dazzi Dazzi , Rui Prazeres , Mike Reading , Kevin Kjoller
发明人： A. Dazzi Dazzi , Rui Prazeres , Mike Reading , Kevin Kjoller
IPC分类号： G01N21/84 , G01N25/16 , G01N13/16
CPC分类号： G01Q60/38 , G01N21/35 , G01N21/3563 , G01Q30/02 , G01Q60/32
摘要： An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.
摘要翻译：已经证明了基于AFM的技术用于在样品表面上进行高度局部化的IR光谱。在商业可行的分析仪器中实施的这种技术将是非常有用的。必须改变实验设置的各个方面，以创建商业版本。本发明解决了许多这些问题，从而产生了一般可用于科学界的驾驶室的分析技术的版本。

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