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1. 发明授权

US10697671B2 Method and apparatus for control of fluid temperature and flow 有权
公开(公告)号：US10697671B2
公开(公告)日：2020-06-30
申请号：US16168523
申请日：2018-10-23
申请人： Forced Physics, LLC
发明人： Scott Davis
IPC分类号： F25B9/00 , B01L3/00 , F04B19/00 , F04B37/06 , F24F7/04 , F15D1/00 , F25B9/04 , B01L7/00
摘要： Materials, components, and methods consistent with the present invention are directed to the fabrication and use of micro-scale channels with a fluid, where the temperature and flow of the fluid is controlled through the geometry of the micro-scale channel and the configuration of at least a portion of the wall of the micro-scale channel and the constituent particles that make up the fluid. Moreover, the wall of the micro-scale channel and the constituent particles are configured such that collisions between the constituent particles and the wall are substantially specular.

2. 发明授权

US10428807B2 Pump power consumption enhancement 有权
公开(公告)号：US10428807B2
公开(公告)日：2019-10-01
申请号：US13692552
申请日：2012-12-03
申请人： APPLIED MATERIALS, INC.
发明人： Mariusch Gregor , Kenneth Le
IPC分类号： F04B7/00 , F04B37/06 , F04B37/14 , F04B49/03 , F04B49/06
摘要： Methods and apparatus for reducing the power consumption of a pump are provided herein. In some embodiments, a pump power consumption reduction system for use in a substrate processing system may include a vacuum chamber having an exhaust port; a valve; a first pump having a pump inlet port coupled to the exhaust port via the valve and a pump exhaust port to couple the first pump to an exhaust handling system; and a second pump coupled to the pump exhaust port to selectively reduce an exhaust pressure of the first pump.

3. 发明授权

US09599101B2 Cryogenic pumps 有权
公开(公告)号：US09599101B2
公开(公告)日：2017-03-21
申请号：US14142800
申请日：2013-12-28
申请人： Westport Power Inc.
发明人： Alexis Lefevre , Pierre Papirer
IPC分类号： F17C9/02 , F04B15/08 , F04B37/06
CPC分类号： F04B15/08 , F04B37/06
摘要： A cryogenic pump has an associated heater for vaporizing cryogenic fluid. The heater has a chamber (bounded by an inner sleeve and an outer sleeve) disposed around at least a portion of the pump housing. The heater has a helical heating coil with a plurality of turns disposed within the chamber and a helical baffle having a plurality of turns interspaced with the turns of the heating coil for guiding heat exchange fluid over the turns of the heat exchange coil. The heater has an inlet for cryogenic fluid to communicate with the heat exchange coil and an outlet for the resulting vaporized fluid. Heat exchange fluid flows through an inlet of the heater chamber to an outlet of the heater chamber and then through a space defined between the inner sleeve and a portion of the pump housing.

4. 发明授权

US5788463A Manual vacuum producing system having pressure indicator 失效
标题翻译：具有压力指示器的手动真空生产系统
公开(公告)号：US5788463A
公开(公告)日：1998-08-04
申请号：US577698
申请日：1995-12-22
申请人： Kwan-Ho Chan
发明人： Kwan-Ho Chan
IPC分类号： F04B37/06 , A61F2/46 , B01F13/00 , F04B33/00 , F04B37/10 , F04B39/00 , F04B21/00 , F04B21/04
CPC分类号： F04B39/0016 , F04B33/00 , F04B37/10 , A61B17/8827 , A61F2002/4685 , B01F13/002 , B01F2215/0029
摘要： A vacuum system comprising a vacuum pump and a vacuum indicator. The vacuum pump comprises a cylinder, a piston disposed in the cylinder, a piston rod fixed to the piston and extending through an end of the cylinder, the rod being movable reciprocally, a sealing ring disposed on and around the piston and in engagement with an inside wall of the cylinder, and stops extending radially outwardly from the piston, the stops including a proximal stop and a distal stop, the sealing ring being axially movable between the proximal and distal stops, the piston having an axially-extending groove therein, the groove extending from proximal of the distal stop to proximal of the proximal stop, whereby upon movement of the piston in a first direction, the sealing ring engages the distal stop and seals an annular space between the piston and the inside wall of the cylinder, and upon movement of the piston in a second direction, the sealing ring engages the proximal stop and leaves unobstructed the axially-extending groove. The vacuum indicator comprises an elongated tubular member for disposal in a vacuum line between the vacuum pump and a housing which is to be evacuated, the tubular member being made of an elastic material, with a wall of the tubular member having a uniform thickness of greater than 1/5 of an inside radius of the tubular member.
摘要翻译：真空系统，包括真空泵和真空指示器。该真空泵包括一个气缸，一个设置在气缸中的活塞，一个活塞杆，固定在活塞上并延伸穿过气缸的一端，该杆可往复运动;一个密封环，设置在活塞上并围绕活塞并与缸体的内壁停止，并且从止动件径向向外延伸，止动件包括近端止动件和远端止动件，密封环可在近端止动件和远端止动件之间轴向移动，活塞在其中具有轴向延伸的槽，从远端止动件的近侧延伸到近端止动件的近侧的凹槽，由此当活塞沿第一方向移动时，密封环与远端止动件接合并密封活塞与气缸的内壁之间的环形空间，以及在活塞沿第二方向移动时，密封环与近端止动件接合并且不阻挡轴向延伸的凹槽。真空指示器包括细长的管状构件，用于在真空泵和待抽真空的壳体之间的真空管线中处理，管状构件由弹性材料制成，管状构件的壁具有较大的均匀厚度超过管状构件的内半径的+ E，fra 1/5 + EE。

5. 发明授权

US4505120A Hydrogen compressor 失效
标题翻译：氢气压缩机
公开(公告)号：US4505120A
公开(公告)日：1985-03-19
申请号：US453109
申请日：1982-12-27
申请人： Peter M. Golben
发明人： Peter M. Golben
IPC分类号： F04B37/02 , F04B19/24 , F04B37/06 , F04B37/18 , F17C11/00
CPC分类号： F04B19/24 , F04B37/18
摘要： A hydrogen compressor (10) having a hydride (26) suspended in a matrix (28). A cooling jacket (12) circumscribes the compressor (10) and a heater (22) is inserted within the compressor (10). A spring filter (30) is inserted within the compressor (10). A plurality of compressors (10A and 10B) are ganged together and are sequentially energized and deenergized by a plurality of timing means (72, 74A and 74B).
摘要翻译：具有悬浮在基体（28）中的氢化物（26）的氢压缩机（10）。冷却套（12）围绕压缩机（10），加热器（22）插入压缩机（10）内。弹簧过滤器（30）插入压缩机（10）内。多个压缩机（10A和10B）组合在一起，并被多个定时装置（72,74A和74B）依次通电和断电。

6. 发明授权

US11517044B2 Vaporizer apparatus 有权
公开(公告)号：US11517044B2
公开(公告)日：2022-12-06
申请号：US16683765
申请日：2019-11-14
申请人： MABEE ENGINEERED SOLUTIONS, INC.
发明人： Brian D. Mabee , Kathryn Mabee , Austin M. Mabee , Marc Longfellow
IPC分类号： A24F13/00 , A24F17/00 , A24F25/00 , A24F40/05 , F04B37/06 , F04B35/04 , F04B37/20
摘要： A vaporizer apparatus includes a pump housing, a main housing containing an evacuation chamber, and an operation unit attached to the main housing. The operation unit selectively seals the evacuation chamber off from communication with an air inlet. One or more pumps in the pump housing is/are operable to generate a vacuum in the evacuation chamber. A mouthpiece is attached to the main housing, and may be selectively placed in communication with the evacuation chamber. When oil is placed in the evacuation chamber and the operation unit is operated, the evacuation chamber is temporarily sealed off from the inlet, creating a vacuum sealed chamber connected with the pump(s). Then, the pump(s) is/are activated to reduce pressure in the evacuation chamber, and the oil is vaporized at an ambient temperature without requiring a heater. When the operation unit is released, the evacuation chamber is emptied via the mouthpiece.

7. 发明授权

US10794374B2 Microfabricated gas flow structure 有权
公开(公告)号：US10794374B2
公开(公告)日：2020-10-06
申请号：US15006034
申请日：2016-01-25
申请人： The Regents of the University of Michigan
发明人： Yogesh Gianchandani , Seungdo An , Yutao Qin
IPC分类号： F04B37/06 , C23C16/455 , F04B19/24 , B81C1/00 , F04B19/00
摘要： A microfabricated gas flow structure includes an array of vertical gas flow channels in a side-by-side parallel flow arrangement. Adjacent gas flow channels are separated by a thin wall having a thickness which can be an order of magnitude or more less than the channel width, offering exceptionally high area efficiency for the array. Channel walls can be formed from a dielectric material to provide the walls with sufficient integrity at nanoscale thicknesses and to provide thermal insulative properties in the lateral direction, thereby controlling power losses when the gas flow structure is employed as a Knudsen pump. The gas flow structure can be microfabricated as a monolithic structure from an SOI wafer, with the gas flow channels formed in the device layer and the heat sink formed from the handle layer.

8. 发明授权

US09528507B2 Distributed thrusters driven gas compressor 有权
标题翻译：分布式推进器驱动气体压缩机
公开(公告)号：US09528507B2
公开(公告)日：2016-12-27
申请号：US14001931
申请日：2012-03-01
申请人： Andrew D. Zonenberg , Jason D. Sanchez , Piotr A. Garbuz
发明人： Andrew D. Zonenberg , Jason D. Sanchez , Piotr A. Garbuz
IPC分类号： F04B37/06 , F03H99/00 , F04B19/00 , F04B41/06 , F04B25/00 , F25B21/02
CPC分类号： F04B37/06 , F03H99/00 , F04B19/006 , F04B25/00 , F04B41/06 , F25B21/02
摘要： A distributed thruster based gas compressor, the compressor including an enclosed housing having an inlet aperture exposed to a source of ambient gas; at least one pressure producing device formed over the inlet aperture and adapted to produce a pressure, the pressure producing device being formed of distributed thrusters, such as Nano Molecular Solid-state Electrodynamics Thrusters (NMSETs); a control unit coupled to the first pressure producing device; and wherein the control unit controls the pressure producing device to produce the pressure to cause the ambient gas to be compressed in the housing.
摘要翻译：基于分布式推进器的气体压缩机，所述压缩机包括具有暴露于环境气体源的入口孔的封闭壳体; 至少一个压力产生装置，其形成在所述入口孔上并适于产生压力，所述压力产生装置由分布式推进器形成，例如纳米分子固态电动推力器（NMSET）; 耦合到所述第一压力产生装置的控制单元; 并且其中所述控制单元控制所述压力产生装置以产生使所述环境气体在所述壳体中被压缩的压力。

9. 发明申请

US20160230751A1 MICROFABRICATED GAS FLOW STRUCTURE 审中-公开
标题翻译：微流化气体流动结构
公开(公告)号：US20160230751A1
公开(公告)日：2016-08-11
申请号：US15006034
申请日：2016-01-25
申请人： The Regents of the University of Michigan
发明人： Yogesh Gianchandani , Seungdo An , Yutao Qin
IPC分类号： F04B37/06 , C23C16/455
摘要： A microfabricated gas flow structure includes an array of vertical gas flow channels in a side-by-side parallel flow arrangement. Adjacent gas flow channels are separated by a thin wall having a thickness which can be an order of magnitude or more less than the channel width, offering exceptionally high area efficiency for the array. Channel walls can be formed from a dielectric material to provide the walls with sufficient integrity at nanoscale thicknesses and to provide thermal insulative properties in the lateral direction, thereby controlling power losses when the gas flow structure is employed as a Knudsen pump. The gas flow structure can be microfabricated as a monolithic structure from an SOI wafer, with the gas flow channels formed in the device layer and the heat sink formed from the handle layer.
摘要翻译：微制造气流结构包括并排平行流布置的垂直气流通道阵列。相邻的气体流动通道被薄壁分开，该薄壁的厚度可以比通道宽度小一个数量级或更多，为阵列提供了非常高的面积效率。通道壁可以由介电材料形成，以提供具有纳米级厚度的足够完整性的壁，并且在横向方向上提供热绝缘性能，从而当采用气流结构作为克努森泵时控制功率损失。气体流动结构可以从SOI晶片作为整体结构微制成，其中气体流动通道形成在器件层中，并且散热器由手柄层形成。

10. 发明授权

US09046091B2 Cryopump 有权
标题翻译：冷冻者
公开(公告)号：US09046091B2
公开(公告)日：2015-06-02
申请号：US12585921
申请日：2009-09-29
申请人： Hidekazu Tanaka
发明人： Hidekazu Tanaka
IPC分类号： B01D8/00 , F04B37/06 , F04B37/08
CPC分类号： F04B37/06 , F04B37/08 , F04B37/085
摘要： A cryopump includes a second-stage cryopanel, a radiation shield that surrounds the second-stage cryopanel and has a shield opening, and a first-stage cryopanel provided in the shield opening. The first-stage cryopanel includes a first panel provided with opening regions thereon in a first distribution, and a second panel arranged closer to the second-stage cryopanel than the first panel and provided with opening regions thereon in a second distribution different from the first distribution when viewed in an arrangement direction of the first and second panels.
摘要翻译：低温泵包括第二级冷冻板，围绕第二级冷冻板并具有屏蔽开口的辐射屏蔽，以及设置在屏蔽开口中的第一级冷冻板。第一级冷冻板包括在第一分布中设置有开口区域的第一面板和布置成比第一面板更靠近第二阶段冷冻板的第二面板，并且在第二分布区域中设置有与第一分布不同的开口区域当从第一和第二面板的排列方向观察时。

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