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1. 发明授权

US10794374B2 Microfabricated gas flow structure 有权
公开(公告)号：US10794374B2
公开(公告)日：2020-10-06
申请号：US15006034
申请日：2016-01-25
申请人： The Regents of the University of Michigan
发明人： Yogesh Gianchandani , Seungdo An , Yutao Qin
IPC分类号： F04B37/06 , C23C16/455 , F04B19/24 , B81C1/00 , F04B19/00
摘要： A microfabricated gas flow structure includes an array of vertical gas flow channels in a side-by-side parallel flow arrangement. Adjacent gas flow channels are separated by a thin wall having a thickness which can be an order of magnitude or more less than the channel width, offering exceptionally high area efficiency for the array. Channel walls can be formed from a dielectric material to provide the walls with sufficient integrity at nanoscale thicknesses and to provide thermal insulative properties in the lateral direction, thereby controlling power losses when the gas flow structure is employed as a Knudsen pump. The gas flow structure can be microfabricated as a monolithic structure from an SOI wafer, with the gas flow channels formed in the device layer and the heat sink formed from the handle layer.

2. 发明申请

US20160230751A1 MICROFABRICATED GAS FLOW STRUCTURE 审中-公开
标题翻译：微流化气体流动结构
公开(公告)号：US20160230751A1
公开(公告)日：2016-08-11
申请号：US15006034
申请日：2016-01-25
申请人： The Regents of the University of Michigan
发明人： Yogesh Gianchandani , Seungdo An , Yutao Qin
IPC分类号： F04B37/06 , C23C16/455
摘要： A microfabricated gas flow structure includes an array of vertical gas flow channels in a side-by-side parallel flow arrangement. Adjacent gas flow channels are separated by a thin wall having a thickness which can be an order of magnitude or more less than the channel width, offering exceptionally high area efficiency for the array. Channel walls can be formed from a dielectric material to provide the walls with sufficient integrity at nanoscale thicknesses and to provide thermal insulative properties in the lateral direction, thereby controlling power losses when the gas flow structure is employed as a Knudsen pump. The gas flow structure can be microfabricated as a monolithic structure from an SOI wafer, with the gas flow channels formed in the device layer and the heat sink formed from the handle layer.
摘要翻译：微制造气流结构包括并排平行流布置的垂直气流通道阵列。相邻的气体流动通道被薄壁分开，该薄壁的厚度可以比通道宽度小一个数量级或更多，为阵列提供了非常高的面积效率。通道壁可以由介电材料形成，以提供具有纳米级厚度的足够完整性的壁，并且在横向方向上提供热绝缘性能，从而当采用气流结构作为克努森泵时控制功率损失。气体流动结构可以从SOI晶片作为整体结构微制成，其中气体流动通道形成在器件层中，并且散热器由手柄层形成。

3. 发明授权

US11927574B2 Progressive cellular architecture for microfabricated gas chromatograph 有权
公开(公告)号：US11927574B2
公开(公告)日：2024-03-12
申请号：US17120920
申请日：2020-12-14
申请人： THE REGENTS OF THE UNIVERSITY OF MICHIGAN
发明人： Yogesh B. Gianchandani , Yutao Qin , Weilin Liao , Hsueh-Tsung Lu , Declan Winship
IPC分类号： G01N30/60 , G01N30/02 , G01N30/08 , G01N30/46
CPC分类号： G01N30/6095 , G01N30/08 , G01N30/461 , G01N2030/025 , G01N2030/085
摘要： A progressive cellular architectures has been presented for vapor-phase chemical analyzers. The progressive cellular architecture consists of a series of heterogeneous micro-gas chromatography cells. Each individual cell targets vapor species within a specific volatility range by using a unique combination of a preconcentrator and a separation column. The cells are connected progressively in series to cover a broad range of volatile analyte chemical vapors. Valves may inadvertently absorb or adsorb and subsequently release target chemical analyte molecules, thereby interfering with quantitative analysis. Therefore, the inlet to the cells is configured without a valve.

4. 发明授权

US10866220B2 Progressive cellular architecture for microfabricated gas chromatograph 有权
公开(公告)号：US10866220B2
公开(公告)日：2020-12-15
申请号：US15978744
申请日：2018-05-14
申请人： The Regents of The University of Michigan
发明人： Yogesh B. Gianchandani , Yutao Qin
IPC分类号： G01N30/60 , G01N30/78 , G01N30/46 , G01N30/02
CPC分类号： G01N30/6095 , G01N30/461 , G01N30/78 , G01N2030/025
摘要： In order to achieve a system capable of analyzing a wide range of compounds while saving time and energy consumption, a progressive cellular architecture is presented for vapor collection and gas chromatographic separation. Each cell includes a preconcentrator and separation column that are adapted for collecting and separating compounds only within a specific volatility range. A wide volatility range can therefore be covered by the use of multiple cells that are cascaded in the appropriate order. The separation columns within each cell are short enough to reduce the heating and pumping requirements. The gas flow for vapor collection and separation is provided by low-power gas micropumps that use ambient air. The system is also configurable to incorporate capabilities of detecting and reducing vapor overload. The progressive cellular architecture directly address the compromise between low power and broad chemical analyses.

5. 发明授权

US10132783B2 Integrated fluidic system for gas chromatography 有权
公开(公告)号：US10132783B2
公开(公告)日：2018-11-20
申请号：US14890771
申请日：2014-05-16
申请人： THE REGENTS OF THE UNIVERSITY OF MICHIGAN
发明人： Yogesh B. Gianchandani , Yutao Qin
IPC分类号： G01N30/60 , B01L3/00 , G01N30/32 , G01N30/88 , G01N30/02 , G01N30/08
摘要： A method is presented for fabricating a fluidic system for a gas chromatograph. The method includes: microfabricating a portion of a fluidic system of a gas chromatograph on a substrate using a first mask; microfabricating a portion of the fluidic system of the gas chromatograph using a second mask; and microfabricating a portion of the fluidic system of the gas chromatograph using a third mask, such that the first mask, the second mask and the third mask are different from each other and the microfabricating of the fluidic system of the gas chromatograph is completed using only the first, second and third masks. A gas chromatograph wherein a microfabricated Knudsen pump is arranged to operate in a first direction to draw carrier gas into a preconcentrator and in a second direction to draw gas out of the preconcentrator.

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