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1. 发明授权

US09669510B2 Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method 有权
公开(公告)号：US09669510B2
公开(公告)日：2017-06-06
申请号：US14533133
申请日：2014-11-05
申请人： TOKYO ELECTRON LIMITED
发明人： Akihiro Kubo , Masahiro Fukuda , Taro Yamamoto , Kenji Yada , Masashi Enomoto , Noboru Nakashima
IPC分类号： B24B27/00 , B24B37/005 , B24B37/34 , B24B47/16 , B24B25/00 , B24D7/18
CPC分类号： B24B37/005 , B24B25/00 , B24B27/0061 , B24B37/34 , B24B47/16 , B24D7/18 , H01L21/0209 , H01L21/30625 , H01L21/67046 , H01L21/67253
摘要： There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.

2. 发明授权

US09272385B2 Multi-carriage dual-spindle symmetrical grinding processing center 有权
标题翻译：多轴双主轴对称研磨加工中心
公开(公告)号：US09272385B2
公开(公告)日：2016-03-01
申请号：US13261937
申请日：2013-06-09
申请人： Xiangtan Sanfeng CNC Machine Tool Co., Ltd.
发明人： Huaizhong Guo , Tianrun Guo
IPC分类号： B24B25/00 , B24B49/12 , B24B53/00
CPC分类号： B24B25/00 , B23Q3/15706 , B23Q3/1572 , B24B7/02 , B24B7/04 , B24B27/0076 , B24B27/0084 , B24B49/12 , B24B53/00 , B24B53/005 , B24B53/047 , B24B55/06
摘要： A multi-carriage dual-spindle symmetrical grinding processing center, wherein: A work table with a rotary table therein is positioned on a first carriage which is attached to a front base; first and second upright posts are positioned in a gantry form on a back base; a horizontal grinding head is connected to a second carriage between the upright posts; a third left carriage and a third right carriage are slidingly connected to the first and second upright posts, respectively, and a left slider and a right slider are connected to the third left carriage and the third right carriage, respectively; a vertical grinding head is installed at the front end of the right slider; an automatic tool changing device is equipped with the vertical grinding head, and a grinding wheel profile dressing device can be installed on the second carriage and on the left slider.
摘要翻译：一种多托架双轴对称研磨加工中心，其特征在于，具有旋转台的工作台位于安装在前基座上的第一滑架上; 第一和第二直立柱以后台的台架形式定位; 水平磨头与立柱之间的第二台架连接; 第三左托架和第三右托架分别滑动地连接到第一和第二直立柱，左滑块和右滑块分别连接到第三左托架和第三右托架; 在右滑块的前端安装有立式磨头; 自动换刀装置配备有立式磨头，砂轮轮廓修整装置可以安装在第二滑架和左滑块上。

3. 发明申请

US20120208441A1 END FACE PROCESSING APPARATUS, END FACE PROCESSING SYSTEM, END FACE PROCESSING METHOD FOR HONEYCOMB MOLDED BODY, AND MANUFACTURING METHOD FOR HONEYCOMB STRUCTURE 审中-公开
标题翻译：端面加工装置，端面处理系统，蜂窝状模体的端面加工方法及蜂窝结构的制造方法
公开(公告)号：US20120208441A1
公开(公告)日：2012-08-16
申请号：US13349552
申请日：2012-01-12
申请人： Tsuyoshi KAWAI , Eiji SUMIYA , Yoshiteru OHIRA
发明人： Tsuyoshi KAWAI , Eiji SUMIYA , Yoshiteru OHIRA
IPC分类号： B24B25/00
CPC分类号： B28B11/18 , B24B9/06
摘要： The end face processing apparatus of the present invention is an end face processing apparatus for processing the cut face of a cut ceramic molded body, which comprises an air blowing outlet and an extraneous material removal member, and is configured to remove burrs remaining on the cut face from the time of cutting as well as powder adhering to the cut face and on the periphery thereof using the extraneous material removal member and air from the air blowing outlet.
摘要翻译：本发明的端面加工装置是一种用于加工切割的陶瓷成型体的切割面的端面处理装置，其包括吹风出口和外部材料去除构件，并且被构造成去除切割上残留的毛刺使用外部材料除去构件和来自吹出风口的空气从切割时刻以及粉末附着到切割面及其周边上的面。

4. 发明申请

US20100120339A1 DUST COLLECTION DEVICE FOR SANDING MACHINE 审中-公开
标题翻译：用于砂光机的粉尘收集装置
公开(公告)号：US20100120339A1
公开(公告)日：2010-05-13
申请号：US12267195
申请日：2008-11-07
申请人： MARK LEVIT
发明人： MARK LEVIT
IPC分类号： B24B7/00 , B24B25/00 , B24B55/08
CPC分类号： B24B55/08
摘要： A dust collection device for a sanding machine includes a casing located at the lower end of the upright sanding belt and the casing includes a bottom hole which communicates with the open top of the dust collection part. The dust collection part communicates with an exterior collection area defined within an outer cover. A fan unit an a separation plate are located within the outer cover, so that dust during operation of the sanding belt can be collected into the exterior collection area and brought out via an escape pipe connected to the outer cover. A sanding wheel is located beside the separation plate and a housing is mounted to the sanding wheel. The housing includes a restriction plate so as to guide dust during operation of the sanding wheel into the escape pipe. The sanding belt, the fan unit and the sanding wheel share a common axle.
摘要翻译：砂光机的集尘装置包括位于直立砂带的下端的壳体，壳体包括与灰尘收集部的开口顶部连通的底孔。灰尘收集部分与限定在外盖内的外部收集区域连通。分隔板的风扇单元位于外盖内，使得打磨带操作期间的灰尘可以被收集到外部收集区域中，并通过连接到外盖的排出管带出。砂轮位于分隔板旁边，壳体安装在砂轮上。壳体包括限制板，以便在砂轮操作期间将灰尘引导到逃逸管中。打磨带，风扇单元和砂轮共享一个公共轴。

5. 发明申请

US20070254568A1 Grinding Wheel 有权
标题翻译：砂轮
公开(公告)号：US20070254568A1
公开(公告)日：2007-11-01
申请号：US11575196
申请日：2005-09-13
申请人： Rin-Soon Park
发明人： Rin-Soon Park
IPC分类号： B24B25/00
CPC分类号： B24D7/066 , B24B41/047
摘要： A grinding wheel has a disc having a connection hole formed at a center thereof, to which a rotation axis of a grinder is connected, and a plurality of abrasive segments detachably connected to a surface of the disc. A plurality of fixing recesses are radially formed on the surface of the disc at an interval and fixing protrusions having a shape corresponding to the fixing recess are formed on bottom surfaces of the abrasive segments, so that the abrasive segments are connected to the disc by inserting the fixing protrusions into the fixing recesses. According to the grinding wheel, when the abrasive segment is worn away or inferior as it is used for a long time, it has only to replace the corresponding abrasive segment only. Accordingly, an economical efficiency is high.
摘要翻译：砂轮具有在其中心连接有研磨机的旋转轴线的中心形成有连接孔的盘，以及可拆卸地连接到盘的表面的多个研磨段。多个固定凹部以一定间隔径向地形成在盘的表面上，并且具有与固定凹部对应的形状的固定突起形成在研磨段的底表面上，使得磨料段通过插入连接到盘固定突起进入固定凹槽。根据砂轮，当研磨段长时间磨损或磨损较差时，只能更换相应的磨料段。因此，经济效率高。

6. 发明授权

US5564968A Anti-chattering honing tool with selectable stones 失效
标题翻译：防珩磨珩磨工具与可选择的石头
公开(公告)号：US5564968A
公开(公告)日：1996-10-15
申请号：US418591
申请日：1995-04-06
申请人： Wilfred M. Werner
发明人： Wilfred M. Werner
IPC分类号： B24B33/08 , B24B25/00 , B24B9/02
CPC分类号： B24B33/083 , B24B33/089
摘要： A honing tool comprises an hexagonally shaped mandrel having a cylindrical bore extending centrally therethrough. Six similar tool holders are each provided with a pair of spaced cylindrical gear racks having rack gear teeth formed thereon and integrally attached to an elongate tool support. A metal tool carrier to which is suitably bonded a tool, such as an abrasive cutting stone or a wiper is removably attached to a respective tool support by a clamp screw. The gear racks of each tool holder are slidably mounted in respective bearings holes in the mandrel. Gear teeth on the racks mesh with gear teeth formed on a splined shaft rotatably mounted in the mandrel bore. Thus, rotation of the shaft counterclockwise relative to the mandrel extend all of the tools outwardly to extended positions.
摘要翻译：珩磨工具包括具有圆柱形孔的六边形心轴，其中心延伸穿过其中。六个类似的工具保持器各自设置有一对间隔开的圆柱齿轮架，其具有形成在其上的齿轮齿，并且整体地附接到细长工具支撑件。适当地接合工具（例如研磨切割石或擦拭器）的金属工具载体通过夹紧螺钉可拆卸地附接到相应的工具支撑件。每个工具架的齿条可滑动地安装在心轴中的相应的轴承孔中。机架上的齿轮与形成在可旋转地安装在心轴孔中的花键轴上的齿轮啮合。因此，轴相对于心轴逆时针旋转将所有工具向外延伸到延伸位置。

7. 发明授权

US4621461A Bowling ball finger hole sizing tool 失效
标题翻译：保龄球手指孔尺寸工具
公开(公告)号：US4621461A
公开(公告)日：1986-11-11
申请号：US673491
申请日：1984-11-20
申请人： James F. Martin
发明人： James F. Martin
IPC分类号： A63B37/00 , A63D5/00 , B24D15/02 , B24B25/00
CPC分类号： A63D5/00 , A63B37/0002 , B24D15/023 , Y10T29/53657
摘要： A simple, unitary tool which facilitates placement of shimming tape in the finger holes of a bowling ball and additionally can be used to enlarge the finger holes of such bowling ball. The tool comprises an elongated member and a pair of arms connected to such member. The arms respectively have a portion parallel to and spaced from the elongated member, the dimensions between such portions being less than the diameter of a bowling ball finger hole. A tape shim is threadable over the elongated member and under the arms to be retained thereby. The elongated member, with a threaded tape shim may be inserted into a bowling ball finger hole, pressed against the wall of such finger hole to transfer such tape shim to such finger hole to shim the finger hole, and then removed, leaving such tape shim properly secured to such finger hole. Additionally, the elongated member may include an abrasive surface portion spaced from the pair of arms. The abrasive surface is adapted to be selectively utilized to enlarge a bowling ball finger hole.
摘要翻译：一种简单的，统一的工具，其有助于将保护带放置在保龄球的指孔中，并且另外可以用于放大这种保龄球的指孔。该工具包括细长构件和连接到这种构件的一对臂。臂分别具有与细长构件平行并间隔开的部分，这些部分之间的尺寸小于保龄球指孔的直径。磁带垫片可以在细长构件上方并且在臂下方被保持以被保持。具有螺纹带垫片的细长构件可以插入保龄球指孔中，压靠在这种指孔的壁上，以将这种带状垫片转移到这样的指孔上以使手指孔松动，然后移除，留下这种带状垫片适当地固定到这种手指孔。另外，细长构件可以包括与该对臂隔开的研磨表面部分。研磨表面适于选择性地用于放大保龄球指孔。

8. 发明授权

US4539776A Methods of and apparatus for polishing an end portion of a terminated lightguide fiber 失效
标题翻译：抛光终端光导纤维端部的方法和设备
公开(公告)号：US4539776A
公开(公告)日：1985-09-10
申请号：US538064
申请日：1983-09-30
申请人： Frederick R. Weaver, Jr.
发明人： Frederick R. Weaver, Jr.
IPC分类号： B24B19/22 , B24B25/00 , B24B1/00
CPC分类号： B24B19/226
摘要： An apparatus (20) is provided for polishing an end of a plug-terminated lightguide fiber so that when it is disposed together with another plug-terminated fiber within a biconical sleeve (38), there is precise end separation of opposing end portions of the fibers. The apparatus includes a holder (40) in which is disposed a plug (30) with an encapsulated end portion (31) of the fiber (23) extending from the plug. A housing (80) receives the holder and causes the plug to be seated in engagement with an insert (96) in a base (81) with the encapsulated end portion extending beyond a reference plane (94) of the base. The base includes non-wearing pads (86-86) spaced about an outer surface thereof. The holder is caused to apply to the plug a force which is equal to that which the plug will experience when mounted in the biconical sleeve. As the base is moved in an oscillatory manner in a bed of polishing slurry, the encapsulated end portion of the fiber is polished so that an end face thereof is a predetermined distance (D.sub.2) from a peripheral boundary (39) of the plug. This insures that the encapsulated end portion of the fiber will be spaced precisely with respect to that of an opposing plug when mounted in a biconical sleeve.
摘要翻译：提供了一种用于抛光插头端接的光导纤维的端部的设备（20），使得当其与另一个插塞端接的纤维一起布置在双锥形套筒（38）内时，存在精确的端部分离纤维。该装置包括保持器（40），其中设置有从插头延伸的纤维（23）的封装端部（31）的插头（30）。壳体（80）容纳保持器，并且使插头与基部（81）中的插入件（96）配合，其中封装的端部延伸超出基座的参考平面（94）。底座包括在其外表面上间隔开的不佩戴垫（86-86）。使保持器施加到塞子上，该力等于当安装在双锥形套筒中时将会遇到的力。当底座在抛光浆料床中以振荡的方式移动时，纤维的封装端部被抛光，使其端面距离插塞的周边边界（39）为预定距离（D2）。这确保当安装在双锥形套筒中时，纤维的封装的端部将相对于相对的插塞的封装端部精确地间隔开。

9. 发明授权

US3601931A Grinding high-temperature alloys 失效
公开(公告)号：US3601931A
公开(公告)日：1971-08-31
申请号：US3601931D
申请日：1969-01-14
申请人： HEALD MACHINE CO
发明人： HAHN ROBERT S
IPC分类号： B24B25/00 , B24B49/16 , B24B1/00
CPC分类号： B24B25/00 , B24B49/16
摘要： This invention relates to the grinding of high-temperature metals and, more particularly, to a method for removing stock from a workpiece by the abrasion process at an unusually rapid rate by operation in a restricted range of force intensities.

10. 发明授权

US3552070A Torque limiter 失效
公开(公告)号：US3552070A
公开(公告)日：1971-01-05
申请号：US3552070D
申请日：1968-12-16
申请人： OZTEC IND INC
发明人： REISS PETER F
IPC分类号： A47L11/16 , B24B7/18 , B24B23/00 , B24B25/00
CPC分类号： B24B7/186 , A47L11/16 , A47L11/4058 , A47L11/4069
摘要： IN A FLOOR GRINDER, A MOTOR DRIVES A HOLLOW VERTICAL SHAFT. A LOWER SHAFT TELESCOPES INTO THE HOLLOW SHAFT, IS SPRING LOADED DOWNWARD, AND HAS A GRINDING PLATE FIXED TO ITS LOWER PROJECTING END. THE HOLLOW SHAFT HAS AT LEAST ONE SPIRAL DRUM CAM CUTOUT FORMED IN IT AND THE LOWER SHAFT HAS A CAM FOLLOWER EXTENDING INTO THE DRUM CAM CUTOUT SO THAT EXCESSIVE TORQUE IMPOSED BY FRICTIONAL RESISTANCE ENCOUNTERED BY THE GRINDING PLATE CAUSES THE DRUM CAM CUTOUT TO RAISE THE CAM FOLLOWER AND THE LOWER SHAFT AND LIFT THE GRINDING PLATE THEREBY LIMITING TORQUE.

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