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1. 发明授权

US11424142B2 Bonding system with cleaning apparatus for cleaning non-bonding surface of substrate 有权
公开(公告)号：US11424142B2
公开(公告)日：2022-08-23
申请号：US16813952
申请日：2020-03-10
申请人： Tokyo Electron Limited
发明人： Yuji Mimura , Hiroshi Maeda , Satoshi Nishimura
IPC分类号： H01L21/67 , H01L21/304 , H01L21/18 , H01L21/66 , G06T7/00 , H01J37/32 , B32B37/00 , H01J9/48 , B24B7/00 , H01J37/36 , B24D3/00
摘要： A bonding system includes a surface modifying apparatus configured to modify a bonding surface of a first substrate and a bonding surface of a second substrate; a surface hydrophilizing apparatus configured to hydrophilize the modified bonding surface of the first substrate and the modified bonding surface of the second substrate; a bonding apparatus configured to perform bonding of the hydrophilized bonding surface of the first substrate and the hydrophilized bonding surface of the second substrate in a state that the bonding surfaces face each other; and a cleaning apparatus configured to clean, before the bonding is performed, a non-bonding surface of, between the first substrate and the second substrate, at least one which is maintained flat when the bonding is performed, the not-bonding surface being opposite to the bonding surface.

2. 发明授权

US6099241A Substrate transfer method and substrate transfer cassette 失效
标题翻译：底物转移方法和底物转移盒
公开(公告)号：US6099241A
公开(公告)日：2000-08-08
申请号：US25812
申请日：1998-02-19
申请人： Isamu Inoue , Koichi Kotera , Osamu Matsunaga , Kiyohiko Kitagawa , Takayuki Taguchi
发明人： Isamu Inoue , Koichi Kotera , Osamu Matsunaga , Kiyohiko Kitagawa , Takayuki Taguchi
IPC分类号： G02F1/1333 , B65G49/07 , H01J9/48 , H01L21/677 , B65G67/00
CPC分类号： H01L21/67775 , Y10S414/14
摘要： To cope with recent LCD or PDP of larger size, an efficient transfer technology is demanded in manufacturing a larger substrate. It calls for a transfer method for such larger substrate with a less required space, and a substrate transfer cassette enabling such method. A technology is disclosed, which comprises a substrate transfer cassette (50) containing a plurality of substrates, a dolly (55) for loading the substrate transfer cassette (50), and a plurality of cassette holders (70) having a rotating arm (71) which can rotate in the vertical direction, wherein a substrate cassette (50) is transferred from a position near another cassette holder to a position near a destination cassette holder with the dolly (55), raised by the rotating arm (71) on the destination cassette holder (70) from the lower section to the upper section of the dolly (55), and moved from the dolly (55) to the cassette holder (70).
摘要翻译：为了应对更大尺寸的LCD或PDP，在制造较大的基板时需要有效的转印技术。它要求具有较少所需空间的较大基板的转印方法，以及能够实现这种方法的基板转印盒。公开了一种技术，其包括：包含多个基板的基板转印盒（50），用于装载基板转印盒（50）的台车（55）和具有旋转臂（71）的多个盒支架），其可以在垂直方向上旋转，其中，基板盒（50）由与所述旋转臂（71）一起升高的所述台车（55）从靠近另一个盒架的位置转移到靠近所述目的地盒架保持器的位置目的地盒式存储器（70）从台架（55）的下部到上部移动，并从台车（55）移动到盒座（70）。

3. 发明授权

US4795392A Method for sealing vacuum tube tips especially cathode tube tips, and machine for applying this method 失效
标题翻译：密封真空管尖特别是阴极管尖的方法，以及应用该方法的机器
公开(公告)号：US4795392A
公开(公告)日：1989-01-03
申请号：US61471
申请日：1987-06-15
申请人： Clemente Ferragni , Enzo Miccinatti
发明人： Clemente Ferragni , Enzo Miccinatti
IPC分类号： H01J9/40 , H01J9/46 , H01J9/48
CPC分类号： H01J9/48 , H01J9/40
摘要： For sure sealing of the evacuation tips of vacuum tubes, the electric power supplied to the heating resistor of the sealing furnace is regulated for each treatment stage, the set value is pre-selected and laid down by a computer for the corresponding power generator.
摘要翻译：为了确保密封真空管的排气口，为每个处理阶段调节供应给密封炉的加热电阻器的电力，设定值由相应发电机的计算机预先选定和放置。

4. 发明授权

US4648346A Pallet for use in production of color cathode ray tube 失效
标题翻译：用于生产彩色阴极射线管的托盘
公开(公告)号：US4648346A
公开(公告)日：1987-03-10
申请号：US845617
申请日：1986-03-28
申请人： Hideo Miyazawa , Shokichi Endo , Hideo Nishimoto
发明人： Hideo Miyazawa , Shokichi Endo , Hideo Nishimoto
IPC分类号： H01J9/22 , H01J9/00 , H01J9/227 , H01J9/48 , B05C13/02
CPC分类号： H01J9/2272 , H01J9/48
摘要： An exposure apparatus for pallet carrying a panel of a color CRT and a shadow mask, with the pallet 9 is used conveniently in attaching and detaching the shadow mask to and from the panel and in conveying the panel 4 and the shadow mask 8 in both of combined and separated configurations along a floor conveyor. The pallet has upper and lower reference plates for precisely locating the pallet vertically and horizontally with respect to the exposure apparatus.
摘要翻译：携带托盘9的彩色CRT和荫罩的面板的托盘的曝光装置被方便地用于将荫罩与面板连接和分离，并且将荫罩与面板4和荫罩8两者沿着地板输送机的组合和分离的构造。托盘具有用于相对于曝光装置垂直和水平地精确定位托盘的上和下基准板。

5. 发明授权

US4099607A Aperture mask conveyor and inspection system 失效
标题翻译：孔径输送机和检查系统
公开(公告)号：US4099607A
公开(公告)日：1978-07-11
申请号：US765772
申请日：1977-02-04
申请人： Leon E. Brennan , Joseph P. Lagermasini , Larry L. Rarig
发明人： Leon E. Brennan , Joseph P. Lagermasini , Larry L. Rarig
IPC分类号： H01J9/48 , B65G43/08 , B65G15/14 , B65G21/10
CPC分类号： H01J9/48
摘要： The aperture mask conveyor and inspection system comprises a pair of belt conveyor assemblies which between them grip and transport an aperture mask from the end of the processing unit to a chute assembly which chute assembly feeds the mask onto a belt conveyor, a densitometer is centrally positioned on the belt conveyor to provide a measure of the amount of light transmitted through the center portion of the mask which is passed beneath the densitometer. After passing under the densitometer the mask is deposited on an adjacent tray.
摘要翻译：光圈掩模传送器和检查系统包括一对带式传送器组件，它们在它们之间夹持并将孔径掩模从处理单元的端部传送到滑槽组件，滑槽组件将掩模馈送到带式输送机上，密度计位于中心定位在带式输送机上提供透过通过密度计下方的掩模的中心部分的光量的量度。在密度计通过之后，掩模沉积在相邻的托盘上。

6. 发明授权

US4030173A Pin handling and insertion mechanism 失效
标题翻译：针处理和插入机构
公开(公告)号：US4030173A
公开(公告)日：1977-06-21
申请号：US708499
申请日：1976-07-26
申请人： Jodie W. Phillips
发明人： Jodie W. Phillips
IPC分类号： H01J9/14 , H01J9/48 , H01J9/24
CPC分类号： H01J9/48
摘要： A mechanism for handling and insertion, in surfaces of face plates or viewing panels for color television picture tubes for support of aperture masks, each of a plurality of relatively elongate support pins having a generally channel-shaped cross-sectional configuration, the mechanism being operable in cooperation with a heating means disposed adjacent said face plate for heating each of said pins prior to and for the purpose of the insertion thereof in said surfaces.
摘要翻译：用于处理和插入用于彩色电视显像管的面板或观察面板的表面的机构，用于支撑孔径掩模，多个相对细长的支撑销中的每一个具有大致通道形状的横截面构造，该机构可操作与设置在所述面板附近的加热装置配合，用于在将其插入所述表面之前加热每个所述销。

7. 发明授权

US3516131A Apparatus for assembling a multielement electron gun member 失效
公开(公告)号：US3516131A
公开(公告)日：1970-06-23
申请号：US3516131D
申请日：1968-03-18
申请人： TOKYO SHIBAURA ELECTRIC CO
发明人： YOSHIDA HIDEHIKO , SAWAGATA SHINICHI
IPC分类号： H01J9/18 , H01J9/06 , H01J9/48
CPC分类号： H01J9/18 , H01J2209/185

8. 发明授权

US11626302B2 Bonding method for cleaning non-bonding surface of substrate 有权
公开(公告)号：US11626302B2
公开(公告)日：2023-04-11
申请号：US17813369
申请日：2022-07-19
申请人： Tokyo Electron Limited
发明人： Yuji Mimura , Hiroshi Maeda , Satoshi Nishimura
IPC分类号： H01J9/48 , H01L21/67 , H01J37/36 , H01L21/304 , H01L21/66 , G06T7/00 , H01L21/18 , H01J37/32 , B32B37/00 , B24B7/00 , B24D3/00
摘要： A bonding system includes a surface modifying apparatus configured to modify a bonding surface of a first substrate and a bonding surface of a second substrate; a surface hydrophilizing apparatus configured to hydrophilize the modified bonding surface of the first substrate and the modified bonding surface of the second substrate; a bonding apparatus configured to perform bonding of the hydrophilized bonding surface of the first substrate and the hydrophilized bonding surface of the second substrate in a state that the bonding surfaces face each other; and a cleaning apparatus configured to clean, before the bonding is performed, a non-bonding surface of, between the first substrate and the second substrate, at least one which is maintained flat when the bonding is performed, the not-bonding surface being opposite to the bonding surface.

9. 发明申请

US20050181698A1 Method and apparatus for manufacturing image displaying apparatus 失效
公开(公告)号：US20050181698A1
公开(公告)日：2005-08-18
申请号：US11101506
申请日：2005-04-08
申请人： Toshihiko Miyazaki , Kohei Nakata , Tetsuya Kaneko
发明人： Toshihiko Miyazaki , Kohei Nakata , Tetsuya Kaneko
IPC分类号： H01J9/39 , H01J9/18 , H01J9/26 , H01J9/38 , H01J9/40 , H01J9/46 , H01J9/48 , H01J9/16 , H01J9/06 , H01J9/10
CPC分类号： H01J9/46 , H01J9/18 , H01J9/38 , H01J9/48 , H01J2329/00
摘要： A method and an apparatus for manufacturing an image displaying apparatus having a display panel. A first substrate of the display panel on which a phosphor exciter is disposed and a second substrate of the display panel on which phosphors emitting light by the phosphor exciter is provided, are prepared under a vacuum atmosphere. Then, the first and the second substrates are carried in a getter processing chamber or bake processing chamber, and getter processing or bake processing is applied thereto under the vacuum atmosphere. After the processing, the first and the second substrates are carried in a seal processing chamber, where the substrates are heat sealed under the vacuum atmosphere. Thus, reduction of vacuum exhaust time and a high vacuum degree in manufacturing an image displaying apparatus is attained and efficiency of manufacturing is improved.

10. 再颁专利

USRE36055E Method of manufacturing electrodes 失效
公开(公告)号：USRE36055E
公开(公告)日：1999-01-19
申请号：US641095
申请日：1996-04-29
申请人： Daniel Preston
发明人： Daniel Preston
IPC分类号： H01J5/50 , H01J9/32 , H01J9/48 , H01J9/26
CPC分类号： H01J9/326 , H01J5/50 , H01J9/48
摘要： An improved design and method and of manufacturing a luminous tube electrode comprises the steps of placing an electrode shell in an outer tube and allowing conductors connected to the electrode shell to emanate from an open end of the outer tube. A tubulation with a flared end is then butted up against the end of the outer tube, thereby sandwiching the conductors between the flared end of the tubulation and the outer tube. The flared end of the tubulation are then fused to one another forming a hermetic seal between each other and the conductors, resulting in the finished electrode. A further provision is made to blow a bubble in the tubulation.

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