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    • 1. 发明授权
    • Charged particle beam extraction and formation apparatus
    • 带电粒子束提取和形成装置
    • US06774550B2
    • 2004-08-10
    • US10413176
    • 2003-04-14
    • Viktor KanarovAlan V. HayesRustam YevtukhovDaniel Yakovlevitch
    • Viktor KanarovAlan V. HayesRustam YevtukhovDaniel Yakovlevitch
    • H01J1900
    • H01J27/024H01J27/022H01J37/08H01J37/3053H01J2237/061H01J2237/3151
    • A charged particle apparatus, with multiple electrically conducting semispheric grid electrodes, the grid electrodes mounted in a dielectric mounting ring, with hidden areas or regions to maintain electrical isolation between the grid electrodes as sputter deposits form on the grid electrodes and mounting ring. The grid electrodes are mounted to the mounting ring with slots and fastening pins that allow sliding thermal expansion and contraction between the grid electrodes and mounting ring while substantially maintaining alignment of grid openings and spacing between the grid electrodes. Asymmetric fastening pins facilitate the sliding thermal expansion while restraining the grid electrodes. Electrical contactors supply and maintain electrical potentials of the grid electrodes with spring loaded sliding contacts, without substantially affecting the thermal characteristics of the grid electrodes.
    • 带有电荷的粒子装置,具有多个导电半球栅格电极,栅格电极安装在介电安装环中,具有隐藏的区域或区域,以在栅电极和安装环之间形成溅射沉积,以维持栅电极之间的电隔离。 栅格电极通过槽和紧固销安装到安装环上,这些插槽和紧固销允许网格电极和安装环之间的滑动热膨胀和收缩,同时基本上保持网格开口的对准和栅格电极之间的间隔。 不对称的紧固销便于滑动热膨胀同时限制栅格电极。 电接触器通过弹簧加载的滑动触点来提供和维持栅格电极的电位,而基本上不影响栅格电极的热特性。
    • 6. 发明授权
    • Diamond field emitter and fabrication method thereof
    • 金刚石场发射体及其制造方法
    • US06379568B1
    • 2002-04-30
    • US09570958
    • 2000-05-15
    • Young-Joon BaikJoo-Yong LeeDong-Ryul Jeon
    • Young-Joon BaikJoo-Yong LeeDong-Ryul Jeon
    • H01J1900
    • H01J9/025H01J2201/30457
    • A diamond field emitter and a fabrication method thereof, in which a pretreatment is performed on a surface of an Si substrate in order that diamond nuclei are uniformly formed on the Si substrate during a diamond deposition, an oxide film such as an SiO2 film is deposited on the pretreated surface of the Si substrate and removed after an etching process so that diamond powder can be selectively remained during the etching process, thus the effect of the surface pretreatment of the Si substrate remains in the selected portion during the etching process, and it is also possible to uniformly deposit the diamond in said portion. According to the present invention, the diamond field emitter having excellent and uniform field emission characteristic can be manufactured because the field emission is easily achieved at a tip shaped field emission section, and, moreover, the diamond placed on an upper end portion of the tip increases electron emission effect.
    • 一种金刚石场发射器及其制造方法,其中在金刚石沉积中在Si衬底的表面上进行预处理以使金刚石核均匀地形成在Si衬底上,沉积诸如SiO 2膜的氧化物膜 在Si衬底的预处理表面上,并且在蚀刻工艺之后去除,使得在蚀刻工艺期间可以选择性地保留金刚石粉末,因此在蚀刻工艺期间,Si衬底的表面预处理的效果保留在所选择的部分中,并且 也可以将金刚石均匀地沉积在所述部分中。 根据本发明,可以制造具有优异均匀的场发射特性的金刚石场发射器,因为在尖端形状的场致发射部分容易实现场致发射,此外,金刚石放置在尖端的上端部 增加电子发射效应。
    • 7. 发明授权
    • Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatus
    • 有机化合物的分解装置,其分解方法,准分子UV灯和准分子发射装置
    • US06194821B1
    • 2001-02-27
    • US09132215
    • 1998-08-11
    • Masaru Nakamura
    • Masaru Nakamura
    • H01J1900
    • C02F1/325B01J19/123B01J2219/0875B01J2219/0877C02F2101/363C02F2201/328H01J65/046
    • There are provided a decomposition apparatus by emission of a UV light which is irradiated from an excimer lamp, a decomposition method thereof and an excimer lamp and an excimer emission apparatus which may suitable be used for a decomposition apparatus and a decomposition method of an organic compound. The decomposition apparatus comprises an excimer lamp emitting UV light for decomposing the organic compound and a decomposition container provided with the excimer lamp for decomposing the organic compound in a liquid or a gas. In the decomposition apparatus, since the UV light irradiated from excimer lamp is emitted to the liquid or the gas, the organic compound in the liquid or the gas can be decomposed easily by the simple decomposition apparatus and method. The decomposition apparatus and method are effective to decompose the organic compound, such as dioxin (polychlorinated dibenzo-para-dioxin), PCB (polychlorinated biphenyl), trichloroethylene or the like, polluting the air or water to purify the environment.
    • 本发明提供一种分解装置,其通过发射由准分子灯照射的UV光,其分解方法和准分子灯以及适合用于分解装置的受精准分子发射装置和有机化合物的分解方法 。 分解装置包括:发射用于分解有机化合物的UV光的准分子灯和设置有用于分解液体或气体中的有机化合物的准分子灯的分解容器。 在分解装置中,由于从准分子灯照射的紫外光被发射到液体或气体中,液体或气体中的有机化合物可以通过简单的分解装置和方法容易地分解。 分解装置和方法有效分解二恶英(多氯二苯并对二恶英),PCB(多氯联苯),三氯乙烯等有机化合物,污染空气或水以净化环境。