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    • 1. 发明授权
    • Acceleration sensor
    • 加速度传感器
    • US06786095B2
    • 2004-09-07
    • US09957926
    • 2001-09-21
    • Jun Tabota
    • Jun Tabota
    • G01P15097
    • G01P15/097G01P15/0922
    • An acceleration sensor includes a first resonator and a second resonator which resonate at independent frequencies and each of which includes a piezoelectric body and electrodes arranged on both main surfaces thereof, and a first base plate and a second base plate. A first unimorph type acceleration detection element includes the first resonator bonded to one surface of the first base plate, and a second unimorph type acceleration detection element includes the second resonator bonded to one surface of the second base plate. Each of the first and second unimorph type acceleration detection elements is fixed at one longitudinal end thereof or opposed longitudinal ends thereof such that the first resonator and the second resonator are diametrically opposed to each other or are arranged to face each other to allow the first resonator and the second resonator to independently deflect in response to the application of acceleration. When the two acceleration detection elements are independently deflected in response to the application of acceleration, acceleration is detected by detecting a difference between frequency changes of the first resonator and the second resonator or a difference between impedance changes of the first resonator and the second resonator.
    • 加速度传感器包括第一谐振器和独立频率谐振的第二谐振器,并且每个谐振器和第二谐振器都包括压电体和布置在其两个主表面上的电极以及第一基板和第二基板。 第一单压型加速度检测元件包括结合到第一基板的一个表面的第一谐振器和第二单压电晶体型加速度检测元件,其包括结合到第二基板的一个表面的第二谐振器。 第一和第二单压型加速度检测元件中的每一个固定在其一个纵向端部或其相对的纵向端部处,使得第一谐振器和第二谐振器彼此径向相对或被布置成彼此面对,以允许第一谐振器 并且第二谐振器响应于加速度的应用而独立地偏转。 当两个加速度检测元件响应于加速度的应用被独立地偏转时,通过检测第一谐振器和第二谐振器的频率变化之间的差异或第一谐振器和第二谐振器的阻抗变化之间的差异来检测加速度。