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1. 发明授权

US06808391B2 Baking apparatus for manufacturing a semiconductor device 有权
公开(公告)号：US06808391B2
公开(公告)日：2004-10-26
申请号：US10655306
申请日：2003-09-05
申请人： Chang-Ju Yun
发明人： Chang-Ju Yun
IPC分类号： F27D306
CPC分类号： H01L21/67103 , F27B17/0025
摘要： A baking apparatus for manufacturing a semiconductor device remarkably enhances the uniformity of the CD (Critical Dimension) of a wafer by creating a uniform temperature distribution. The apparatus includes a processing having an open upper part, a hot plate disposed in the chamber and on which a wafer is to be mounted, a cover covering the upper part of the chamber; and a thin film made of material having a low emissivity extending over the inner surface of the cover. The inventive structure prevents the emission of heat to the outside so that the temperature within the processing chamber can be rapidly stabilized.

2. 发明授权

US06305930B1 Vertical multiple stage oven 有权
标题翻译：立式多级烤箱
公开(公告)号：US06305930B1
公开(公告)日：2001-10-23
申请号：US09594618
申请日：2000-06-14
申请人： Tibor Fedak
发明人： Tibor Fedak
IPC分类号： F27D306
CPC分类号： F27B9/24 , F27B9/00 , F27B9/14
摘要： A vertical multiple stage oven includes a first plurality of ovens in a vertical arrangement, and a second plurality of ovens in a vertical arrangement positioned adjacent the first plurality of ovens. An access port is provided to the first plurality of ovens and an exit port is provided from the second plurality of ovens. A coupling port couples the first plurality of ovens to the second plurality of ovens. A continuous pathway is defined through the first plurality of ovens and through the second plurality of ovens from the access port, through the coupling port to the exit port. Each oven is sealed from adjacent ovens by trays moving along the pathway.
摘要翻译：垂直多级烘箱包括垂直布置的第一多个烤箱，以及邻近第一多个烤箱定位的垂直布置的第二多个烤箱。向第一多个炉提供进入口，并且从第二多个炉提供出口。耦合端口将第一多个烤箱耦合到第二多个烤箱。通过第一多个烤箱和通过第二多个烤箱从进入口，通过联接口到出口限定连续通道。每个烘箱通过沿着路径移动的托盘从相邻的烤箱中密封。

3. 发明授权

US06290494B1 Method and apparatus for coal coking 有权
标题翻译：煤焦化方法和装置
公开(公告)号：US06290494B1
公开(公告)日：2001-09-18
申请号：US09680187
申请日：2000-10-05
申请人： Michael P. Barkdoll
发明人： Michael P. Barkdoll
IPC分类号： F27D306
CPC分类号： C10B45/02 , C10B31/08 , C10B31/10
摘要： The invention provides a coke oven charging machine including a mobile frame and a coke oven feed device on the mobile frame. The coke oven feed device includes a movable, elongate charging plate having a first end and a second end, retractable side-walls adjacent the charging plate, first and second end walls adjacent the first and second ends of the charging plate and a shuttle section adjacent the first end of the charging plate for spanning an area between the first end of the charging plate and an entrance to the oven. The shuttle section has opposed shuttle side walls and a shuttle end wall. A charging plate moving device is provided for moving the charging plate into and out of the oven. The charging machine apparatus provides a means for quickly charging coking ovens with a compacted coal charge so that lower quality coals may be used to make metallurgical coke.
摘要翻译：本发明提供了一种在移动框架上包括移动框架和焦炉进料装置的焦炉装料机。焦炉进料装置包括可移动细长的充电板，其具有第一端和第二端，与充电板相邻的可收回的侧壁，与充电板的第一和第二端相邻的第一和第二端壁以及相邻的穿梭部用于跨越充电板的第一端和烤箱入口之间的区域的充电板的第一端。穿梭部分具有相对的穿梭侧壁和梭子端壁。设置充电板移动装置用于将充电板移入和移出烤箱。充电机装置提供了一种用于将焦化炉快速装入压实煤炭装置的装置，使得较低质量的煤可用于制造冶金焦炭。

4. 发明授权

US06435868B2 Multi-function chamber for a substrate processing system 失效
标题翻译：用于基板处理系统的多功能室
公开(公告)号：US06435868B2
公开(公告)日：2002-08-20
申请号：US09732159
申请日：2000-12-07
申请人： John M. White , Wendell T. Blonigan , Michael W. Richter
发明人： John M. White , Wendell T. Blonigan , Michael W. Richter
IPC分类号： F27D306
CPC分类号： H01L21/67748 , H01L21/67098 , H01L21/67109 , H01L21/67173 , H01L21/67201 , H01L21/67236 , H01L21/67248
摘要： A load lock chamber includes a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber. The load lock chamber is configurable in several configurations, including a base configuration for providing a transition between two different pressures, a heating configuration for heating the substrate and providing a transition between two different pressures, and a cooling configuration for cooling the substrate and providing a transition between two different pressures. Various features of the chamber configurations help increase the throughput of the system by enabling rapid heating and cooling of substrates and simultaneous evacuation and venting of the chamber, and help compensate for thermal losses near the substrate edges, thereby providing a more uniform temperature across the substrate.
摘要翻译：负载锁定室包括具有孔的腔体，以允许衬底被转移到腔室中或从腔室中移出。负载锁定室可配置为多种配置，包括用于提供两种不同压力之间的转换的基本配置，用于加热衬底并提供两种不同压力之间的转换的加热配置，以及用于冷却衬底的冷却配置，两种不同压力之间的转变。腔室结构的各种特征有助于通过使衬底的快速加热和冷却以及腔室的同时排空和排气来增加系统的生产能力，并且有助于补偿衬底边缘附近的热损失，由此在衬底上提供更均匀的温度。

5. 发明授权

US06193507B1 Multi-function chamber for a substrate processing system 有权
标题翻译：用于基板处理系统的多功能室
公开(公告)号：US06193507B1
公开(公告)日：2001-02-27
申请号：US09502117
申请日：2000-02-10
申请人： John M. White , Wendell T. Blonigan , Michael W. Richter
发明人： John M. White , Wendell T. Blonigan , Michael W. Richter
IPC分类号： F27D306
CPC分类号： H01L21/67748 , H01L21/67098 , H01L21/67109 , H01L21/67173 , H01L21/67201 , H01L21/67236 , H01L21/67248
摘要： A load lock chamber includes a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber. The load lock chamber is configurable in several configurations, including a base configuration for providing a transition between two different pressures, a heating configuration for heating the substrate and providing a transition between two different pressures, and a cooling configuration for cooling the substrate and providing a transition between two different pressures. Various features of the chamber configurations help increase the throughput of the system by enabling rapid heating and cooling of substrates and simultaneous evacuation and venting of the chamber, and help compensate for thermal losses near the substrate edges, thereby providing a more uniform temperature across the substrate.
摘要翻译：负载锁定室包括具有孔的腔体，以允许衬底被转移到腔室中或从腔室中移出。负载锁定室可配置为多种配置，包括用于提供两种不同压力之间的转换的基本配置，用于加热衬底并提供两种不同压力之间的转换的加热配置，以及用于冷却衬底的冷却配置，两种不同压力之间的转变。腔室结构的各种特征有助于通过使衬底的快速加热和冷却以及腔室的同时排空和排气来增加系统的生产能力，并且有助于补偿衬底边缘附近的热损失，由此在衬底上提供更均匀的温度。

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