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    • 1. 发明授权
    • Drive device
    • 驱动装置
    • US06761028B2
    • 2004-07-13
    • US10270041
    • 2002-10-11
    • Yukihisa TakeuchiNobuo TakahashiYuki Bessho
    • Yukihisa TakeuchiNobuo TakahashiYuki Bessho
    • F01B1100
    • F16K99/0001F04B43/046F15B7/00F15C5/00F16K99/0011F16K99/0048F16K99/0057F16K2099/0076F16K2099/0084F16K2099/0092
    • A drive device includes ceramic pumps which alternately pressurize and depressurize fluid within a fluid chamber on opposite sides of a movable body, to thereby move the movable body within the flow chamber. The flow chamber is connected via micro flow passages to an internal-pressure buffering chamber, which accommodates a compressible gas. When the pressure of the fluid is increased and decreased at high speed by the ceramic pumps, the micro flow passages exhibit a high passage resistance, so that the pressure within the channel does not escape to the internal-pressure buffering chamber, and the movable body moves freely. When the pressure of the fluid increases slowly due to the expansion of the fluid, the micro flow passages exhibit a low passage resistance, so that the fluid is led to the internal-pressure buffering chamber, and the pressure increase of the fluid is suppressed.
    • 驱动装置包括陶瓷泵,其在可移动体的相对侧上的流体室内交替地加压和减压流体,从而使可移动体在流动室内移动。 流动室通过微流通道连接到容纳可压缩气体的内部压力缓冲室。 当流体的压力通过陶瓷泵高速下降时,微流道表现出高通道阻力,使得通道内的压力不会逸出到内压缓冲室,而移动体 自由移动 当流体的压力由于流体的膨胀而缓慢增加时,微流体通道表现出低通道阻力,使得流体被引导到内压缓冲室,并且抑制了流体的压力增加。