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    • 1. 发明申请
    • Zeolite formed product, zeolite laminate intermediate, zeolite laminate composite and method for their preparation
    • 沸石成型产品,沸石层压板中间体,沸石层压复合材料及其制备方法
    • US20030039609A1
    • 2003-02-27
    • US09980260
    • 2001-11-01
    • Toshihiro TomitaShinji Nakamura
    • C01F007/00C01B033/36C01B039/00
    • C01B39/04B01D53/228B01D71/028B01D2323/12B01J29/035B01J29/06B01J35/065C01B37/02Y10S423/22
    • A porous zeolite shaped body of a zeolite is characterized in that the porous zeolite shaped body is made of a completely crystallized zeolite or a zeolite still under crystallization and composed of tetrapropylammonium ion (TPA) and silica sol in a mixing ratio (TPA/SiO2) of 0.015 to 0.08 by mole: a zeolite shaped body has an average particle diameter of 1.0 nullm or larger, a bending strength of 1.5 MPa or higher, and a difference in pressure between a feed side and a permeation side of 1.0 atmospheric pressure or lower at 10 ml/cm2.min of helium gas permeation flux when a thickness of the porous zeolite shaped body is adjusted to be 1.8 mm: and a zeolite shaped body has 70% or more of the area of the parts (the sound parts) where respective particles are clearly observed by grain boundary fracture among particles composing the shaped body in the entire area of the fractured surface in microstructure observation of the fractured surface of the shaped body itself.
    • 沸石的多孔沸石成形体的特征在于,多孔沸石成形体由混合比(TPA / SiO 2)的完全结晶的沸石或仍在结晶下的由四丙基铵离子(TPA)和二氧化硅溶胶构成的沸石构成, 为0.015〜0.08摩尔:沸石成型体的平均粒径为1.0μm以上,弯曲强度为1.5MPa以上,进料侧和渗透侧的压力差为1.0大气压以下 当多孔沸石成形体的厚度调节为1.8mm时,以10ml / cm2.min的氦气渗透通量测定,沸石成型体的面积(声部)的面积为70%以上, 在成形体本身的断裂面的微观结构观察中,在构成成形体的整体区域的粒子之间,通过晶界断裂清楚地观察到各个粒子。
    • 10. 发明申请
    • Zeolite sol and method for preparing the same, composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device
    • 沸石溶胶及其制备方法,用于形成多孔膜的组合物,多孔膜及其形成方法,层间绝缘膜和半导体器件
    • US20040091419A1
    • 2004-05-13
    • US10703854
    • 2003-11-07
    • Tsutomu OgiharaFujio YagihashiHideo NakagawaMasaru Sasago
    • C01B039/04C01B033/36C01F007/00C01B039/00
    • H01L21/02126C01B39/04H01L21/02203H01L21/02216H01L21/02282H01L21/31695
    • The present invention provides a zeolite sol which can be formed into a porous film that can be thinned to an intended thickness by a method used in the ordinary semiconductor process, that excels in dielectric properties, adhesion, film consistency and mechanical strength, and that can be easily thinned; a composition for film formation; a porous film and a method for forming the same; and a high-performing and highly reliable semiconductor device which contains this porous film inside. More specifically, the zeolite sol is prepared by hydrolyzing and decomposing a silane compound expressed by a general formula: Si(OR1)4 (wherein R1 represents a straight-chain or branched alkyl group having 1 to 4 carbons, and when there is more than one R1, the R1s can be independent and the same as or different from each other) in a conventional coating solution for forming a porous film in the presence of a structure-directing agent and a basic catalyst; and then by heating the silane compound at a temperature of 75null C. or lower. A composition for forming a porous film which contains this zeolite sol is used.
    • 本发明提供一种沸石溶胶,其可以通过通常的半导体工艺中使用的方法来形成多孔膜,该多孔膜可以被薄化到预期的厚度,其具有优异的介电性能,粘附性,膜稠度和机械强度,并且可以 容易变薄; 用于成膜的组合物; 多孔膜及其形成方法; 以及内部含有该多孔膜的高性能,高可靠性的半导体装置。 更具体地说,通过水解和分解由以下通式表示的硅烷化合物制备沸石溶胶:Si(OR 1)4(其中R 1表示具有1至4个碳的直链或支链烷基, 并且当有多于一个R 1时,R 1可以彼此独立地相同或相同)在常规的在结构导向剂存在下形成多孔膜的涂布溶液 和碱性催化剂; 然后在75℃以下的温度下加热硅烷化合物。 使用含有该沸石溶胶的多孔膜形成用组合物。