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1. 发明授权

US06354794B2 Method for automatically transferring wafers between wafer holders in a liquid environment 失效
标题翻译：在液体环境中在晶片保持器之间自动转印晶片的方法
公开(公告)号：US06354794B2
公开(公告)日：2002-03-12
申请号：US09681566
申请日：2001-04-30
申请人： Michito Sato , Hiroaki Fukabori , Yukio Mukaino
发明人： Michito Sato , Hiroaki Fukabori , Yukio Mukaino
IPC分类号： B65G6530
CPC分类号： H01L21/67086 , Y10S134/902 , Y10S414/138 , Y10S414/14
摘要： An apparatus for transferring wafers between wafer holders such as wafer cassettes, etching drums and the like includes a tank for containing a liquid transfer medium in which the wafers can be transferred. The apparatus includes a wafer transfer unit that can transfer a plurality of wafers such as semiconductor wafers between wafer holders, and maintain the wafers in a desired relative orientation during transfer. For example, the wafers can be maintained in a parallel relationship. The apparatus can be used to automatically transfer wafers to etching drums without cross-indexing of the wafers and without manual handling of the wafers.
摘要翻译：用于在诸如晶片盒，蚀刻滚筒等的晶片保持器之间传送晶片的装置包括容纳可以转移晶片的液体转移介质的槽。该装置包括晶片传送单元，其可以在晶片保持器之间传输诸如半导体晶片的多个晶片，并且在传送期间将晶片保持在期望的相对取向。例如，晶片可以保持平行关系。该装置可以用于将晶片自动转移到蚀刻鼓，而不会晶片的交叉分度，而不需要手动处理晶片。

2. 发明授权

US06705487B2 Assistance tray for manual distribution used in medicine sharing and packing device 失效
标题翻译：用于医药共享和包装设备中手动分配的辅助托盘
公开(公告)号：US06705487B2
公开(公告)日：2004-03-16
申请号：US09964350
申请日：2001-09-28
申请人： June Ho Kim
发明人： June Ho Kim
IPC分类号： B65G6530
CPC分类号： G07F11/62 , B65B35/56 , G07F11/44 , G07F17/0092
摘要： An assistance tray for manual distribution used in a medicine sharing and packing device with a disk-type tray for manual distribution of pills mounted in the front side. The assistance tray includes an assistance tray body at the rim portion of which a plurality of auxiliary pill containing portions are formed which correspond in number to a plurality of pill containing portions formed at the rim of the upper surface of a disk-type tray for manual distribution, and on both sides of which handle portions are formed having openings therethrough. An opening/closing plate is mounted on the lower surface of the assistance tray body so as to be rotated, at the rim portion of which holes are formed, a number of the holes corresponding in number to the number of the auxiliary pill containing portions of the assistance tray body. On one side of the opening/closing plate a protruding control handle portion is formed, movement of which opens the bottom of the auxiliary pill containing portions of the assistance tray body and accordingly enables pills distributed to each auxiliary pill containing portion of the assistance tray body to be fed into the pill containing portions of the disk-type tray for manual distribution at the same time.
摘要翻译：用于手动分配的辅助托盘，用于具有用于手动分配安装在前侧的药丸的盘式托盘的药物共享和包装装置中。辅助托盘包括在边缘部分处的辅助托盘体，其中形成有多个辅助药丸容纳部分，其数量对应于形成在用于手动的盘形托盘的上表面的边缘处的多个药丸容纳部分分配，并且在其两侧形成具有开口的手柄部分。开/关板安装在辅助托盘主体的下表面上，以便在形成有孔的边缘部分处旋转数个与辅助药丸容纳部分的数目相对应的孔数辅助托盘体。在打开/关闭板的一侧形成突出的控制手柄部分，其运动使辅助药片容纳部分的辅助盘体的底部打开，因此能够将药丸分配到辅助盘体的每个辅助药丸容纳部分同时进入用于手动分配的盘式托盘的药丸容纳部分。

3. 发明授权

US06457929B2 Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment 有权
标题翻译：在液体环境中在晶片保持器之间自动传送晶片的装置和方法
公开(公告)号：US06457929B2
公开(公告)日：2002-10-01
申请号：US09184652
申请日：1998-11-03
申请人： Michito Sato , Hiroaki Fukabori , Yukio Mukaino
发明人： Michito Sato , Hiroaki Fukabori , Yukio Mukaino
IPC分类号： B65G6530
CPC分类号： H01L21/67086 , Y10S134/902 , Y10S414/138 , Y10S414/14
摘要： An apparatus for transferring wafers between wafer holders such as wafer cassettes, etching drums and the like includes a tank for containing a liquid transfer medium in which the wafers can be transferred. The apparatus includes a wafer transfer unit that can transfer a plurality of wafers such as semiconductor wafers between wafer holders, and maintain the wafers in a desired relative orientation during transfer. For example, the wafers can be maintained in a parallel relationship. The apparatus can be used to automatically transfer wafers to etching drums without cross-indexing of the wafers and without manual handling of the wafers.
摘要翻译：用于在诸如晶片盒，蚀刻鼓等的晶片保持器之间传送晶片的装置包括用于容纳可以转移晶片的液体转印介质的槽。该装置包括晶片传送单元，其可以在晶片保持器之间传输诸如半导体晶片的多个晶片，并且在传送期间将晶片保持在期望的相对取向。例如，晶片可以保持平行关系。该装置可以用于将晶片自动转移到蚀刻鼓，而不会晶片的交叉分度，而不需要手动处理晶片。

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