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    • 2. 发明授权
    • Method of manufacturing monolithic ink-jet printhead
    • 单片喷墨打印头的制造方法
    • US06762012B2
    • 2004-07-13
    • US10287488
    • 2002-11-05
    • Tae-kyun KimSeo-hyun ChoMyung-song JungKyong-il KimSung-joon Park
    • Tae-kyun KimSeo-hyun ChoMyung-song JungKyong-il KimSung-joon Park
    • B41J216
    • B41J2/1603B41J2/1629B41J2/1631B41J2/1639B41J2/1642B41J2/1645B41J2/1646G03F7/038G03F7/2022
    • A method of manufacturing a monolithic ink-jet printhead includes a heating element which generates bubbles by heating ink is formed on a surface of the substrate, and a negative photoresist which is coated to a predetermined thickness on the substrate on which the heating element is formed. Next, a portion, which forms a sidewall of an ink passage forming wall surrounding an ink chamber and a restrictor, of the negative photoresist is flush exposed to light and cured using a first photomask in which patterns of the ink chamber and the restrictor of the ink passage are formed. Subsequently, a second portion which forms an upper wall of the ink passage forming wall of the negative photoresist is exposed to the light using a second photomask in which the pattern of a nozzle is formed, and the second portion is exposed to the light by only a predetermined thickness. Last, an uncured portion of the negative photoresist is dissolved and removed using solvent. An ink-jet printhead whose elements are monolithically formed by a simplified process using a single negative photoresist can be manufactured.
    • 制造单片式喷墨打印头的方法包括:在基板的表面上形成通过加热油墨产生气泡的加热元件,以及在其上形成有加热元件的基板上涂覆预定厚度的负性光致抗蚀剂 。 接下来,将形成负光致抗蚀剂的墨水通道形成壁的侧壁和限制器的部分齐平地暴露于光并且使用第一光掩模进行固化,其中,在第一光掩模中,墨水腔和图像的限制器 形成油墨通道。 随后,使用其中形成喷嘴图案的第二光掩模将形成负光致抗蚀剂的墨通道形成壁的上壁的第二部分暴露于光,并且仅将第二部分暴露于光 预定厚度。 最后,使用溶剂溶解并除去负光致抗蚀剂的未固化部分。 可以制造通过使用单一负性光致抗蚀剂的简化工艺来单元地形成元件的喷墨打印头。
    • 4. 发明授权
    • Low debris fluid jetting system
    • 低碎屑流体喷射系统
    • US06604813B2
    • 2003-08-12
    • US09900659
    • 2001-07-06
    • Ronald L. Green
    • Ronald L. Green
    • B41J216
    • B41J2/16552
    • An improved fluid jet device and method of keeping a fluid jet head clean are provided. The face of the fluid jet head includes one or more orifices, through which fluid is jetted. The orifices are formed through convex ridges at the surface of head. In a preferred embodiment of the invention, the slope from the face to the orifice is either generally constant or decreasing, to provide the convex shape. In an embodiment of the invention, air is blown over the ridge and over the orifice, to keep dust and debris away from the orifice. The flow of air, the shape of the ridge and the proximity of material on which printing occurs can be constructed and arranged to provide laminar flow of air or other gas over the orifice. The downstream side of the ridge from the orifice can have a shallower slope than the upstream side. A vacuum port can be provided on the downstream side.
    • 7. 发明授权
    • Ink jet printer head actuator and manufacturing method thereof
    • 喷墨打印机头致动器及其制造方法
    • US06503407B1
    • 2003-01-07
    • US09625004
    • 2000-07-25
    • Il KimJae Woo JoungYoung Seuck Yoo
    • Il KimJae Woo JoungYoung Seuck Yoo
    • B41J216
    • B41J2/1629B41J2/161B41J2/1625B41J2/1631B41J2/1642B41J2/1646
    • Disclosed is an ink jet printer head actuator and a manufacturing method thereof. The ink jet printer head actuator comprises a vibrating plate, a portion of a plate surface of the vibrating plate being mechanically deformed by an external force; a chamber plate formed with a plurality of chambers, the chamber plate sucking and discharging ink into and out of the plurality of chambers by vibration of the vibrating plate; a protective thin film intervened between the vibrating plate and the chamber plate for preventing the vibrating plate from being etched when the plurality of chambers are formed in the chamber plate and for preventing the vibrating plate from being corroded by keeping ink in the plurality of chambers from being brought into contact with the vibrating plate; a plurality of piezoelectric elements attached to a surface of the vibrating plate for vibrating portions of the vibrating plate which correspond to the plurality of chambers, respectively, while being deformed in a lengthwise direction depending upon electric power supply; and a plurality of electrodes at least laminated on the plurality of piezoelectric elements for supplying electric power thereto, respectively. In the manufacturing method, a protective thin film of gold acts as an etch stop layer while etching the chamber plate of nickel relative to the vibrating plate of nickel.
    • 公开了一种喷墨打印机头致动器及其制造方法。 喷墨打印机头致动器包括振动板,振动板的板表面的一部分被外力机械地变形; 形成有多个室的室板,所述室板通过所述振动板的振动吸入和排出所述多个室的墨水; 介于所述振动板和所述室板之间的保护性薄膜,用于当在所述室板中形成所述多个室时防止所述振动板被蚀刻,并且通过将所述多个室中的墨保持在所述室板中,以防止所述振动板被腐蚀 与振动板接触; 多个压电元件,其安装在所述振动板的表面上,用于分别对应于所述多个室的所述振动板的振动部分,同时根据电力供应沿长度方向变形; 以及多个电极,至少层压在多个用于向其供电的压电元件上。 在制造方法中,金的保护性薄膜作为蚀刻停止层,同时相对于镍的振动板蚀刻镍的室板。
    • 9. 发明授权
    • Method for manufacturing a printhead of ink jet printing apparatus
    • 喷墨打印设备的打印头的制造方法
    • US06406835B1
    • 2002-06-18
    • US09598841
    • 2000-06-21
    • Hung-Chou KangChen-Hua LinJi-Chen Wu
    • Hung-Chou KangChen-Hua LinJi-Chen Wu
    • B41J216
    • B41J2/1628B41J2/1404B41J2/1603B41J2/1623B41J2/1629B41J2/1631B41J2/164B41J2002/14403
    • A method according to the invention comprises the following steps. At first, a first layer of film is coated over a micro-control apparatus having a plurality of ejecting elements. Next, a plurality of ink chambers, a plurality of ink channels, and a plurality of supporting cylinders are simultaneously formed in the first layer of film by photolithography. More specifically, the plurality of supporting cylinders is located within the plurality of ink channels. Thereafter, a layer of liquid medium is coated over the first layer of film. A photosensitive film is provided over the first layer of film, and then a plurality of ink orifices is formed therein at positions respectively corresponding to the plurality of ink chambers by photolithography. Finally, the micro-control apparatus is connected to a signal input means. Accordingly, a precision alignment of application between ink orifices and ink chambers in manufacturing a conventional printhead is not necessary so that the throughput and yield rate can be increased.
    • 根据本发明的方法包括以下步骤。 首先,将第一层膜涂覆在具有多个喷射元件的微控制装置上。 接下来,通过光刻法在第一层膜中同时形成多个墨室,多个墨通道和多个支撑圆筒。 更具体地,多个支撑筒位于多个墨水通道内。 此后,在第一层膜上涂覆一层液体介质。 在第一层膜上提供感光膜,然后通过光刻法分别对应于多个墨室的位置处形成多个墨孔。 最后,微控制装置连接到信号输入装置。 因此,在制造常规打印头时,油墨孔和油墨室之间的应用精确对准是不必要的,从而可以提高生产量和产量。