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    • 4. 发明申请
    • PROCESS FOR TRANSFERRING A LAYER
    • 传输层的过程
    • US20150187638A1
    • 2015-07-02
    • US14409361
    • 2013-06-14
    • Soitec
    • Michel Bruel
    • H01L21/762H01L21/265H01L21/268
    • H01L21/76254H01L51/5024
    • This transfer process comprises the following steps: (a) providing a donor substrate and a support substrate; (b) forming an embrittlement region in the donor substrate; (c) forming what is called a bonding layer between the first part of the donor substrate and the support substrate; and assembling the donor substrate to the support substrate, and is noteworthy in that it comprises the following step: (e) exposing, in succession, portions of the embrittlement region to electromagnetic irradiations for an exposure time at a given power density, the exposure time being chosen depending on the thickness of the bonding layer so that the support substrate is thermally decoupled from the first part of the donor substrate, the exposure time being chosen depending on the power density in order to activate kinetics that weaken the embrittlement region.
    • 该转移方法包括以下步骤:(a)提供施主衬底和支撑衬底; (b)在供体衬底中形成脆化区; (c)在所述施主衬底的第一部分和所述支撑衬底之间形成所谓的结合层; 并且将供体衬底组装到支撑衬底上,并且值得注意的是它包括以下步骤:(e)连续地将脆化区域的部分暴露于电磁辐射以在给定功率密度下的曝光时间,曝光时间 根据接合层的厚度选择,使得支撑衬底与施主衬底的第一部分热分离,根据功率密度选择曝光时间,以激活弱化脆化区域的动力学。
    • 6. 发明申请
    • SEMICONDUCTOR STRUCTURE WITH SMOOTHED SURFACE AND PROCESS FOR OBTAINING SUCH A STRUCTURE
    • 具有平滑表面的半导体结构和获得这种结构的工艺
    • US20120199953A1
    • 2012-08-09
    • US13349263
    • 2012-01-12
    • Michel Bruel
    • Michel Bruel
    • H01L29/30H01L21/26
    • H01L21/302H01L21/268H01L21/3247H01L21/76254
    • The present invention relates to a process for smoothing the surface of a semiconductor wafer by fusion. The process includes defining a reference length which dimensions wafer surface roughness that is to be reduced or removed, and scanning the surface with a fusion beam while adjusting parameters of the fusion beam so as to fuse, during the scanning of the surface, a local surface zone of the wafer whose length is greater than or equal to the reference length, with the scanning continued to smooth the entire surface of the wafer by eliminating surface roughnesses of period lower than the reference length. The present invention also relates to a semiconductor wafer having a surface layer made of a semiconducting material that is smoothed by the process and that does not exhibit any roughness of period lower than the reference length.
    • 本发明涉及通过熔化来平滑半导体晶片的表面的工艺。 该过程包括定义参考长度,其缩小待削减或去除的晶片表面粗糙度,以及在调整熔合束的参数的同时用熔融光束扫描表面,从而在扫描表面期间熔化局部表面 长度大于或等于参考长度的晶片的区域,扫描通过消除低于参考长度的周期的表面粗糙度,继续平滑晶片的整个表面。 本发明还涉及一种半导体晶片,其具有由半导体材料制成的表面层,该表面层通过该工艺平滑,并且不显示比参考长度低的周期的粗糙度。
    • 7. 发明申请
    • METHOD AND DEVICE FOR HEATING A LAYER OF A PLATE BY PRIMING AND LIGHT FLOW
    • 用于通过引导和光流加热板层的方法和装置
    • US20110293254A1
    • 2011-12-01
    • US13127468
    • 2009-10-27
    • Michel Bruel
    • Michel Bruel
    • F27D11/12
    • H01L21/268H01L21/221
    • The invention relates to a method and to a device for at least locally heating a plate including at least one layer (2) to be at least locally heated by at least one main, light flow pulse, and including at least one priming region (4) located deeply relative to the front surface of said layer to be heated, wherein the main flow (7) is capable of heating said layer to be heated (2) while the temperature of the latter is within a high temperature range (PHT), and a priming a secondary heating means (9) capable of heating said priming region from a temperature within a low temperature range (PBT) up to a temperature within said high temperature range (PHT).
    • 本发明涉及一种用于至少局部加热板的方法和装置,该板包括至少一层(2),至少由至少一个主流光脉冲局部加热,并且包括至少一个起泡区域(4) ),其中所述主流(7)能够加热所述待加热层(2),同时所述主流体(7)的温度在高温范围(PHT)内, 以及启动能够将所述起动区域从低温范围(PBT)内的温度加热到所述高温范围(PHT)内的温度的二次加热装置(9)。