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1. 发明申请

US20170032930A1 METHODS, SYSTEMS AND APPARATUS FOR ACCELERATING LARGE PARTICLE BEAM CURRENTS 审中-公开
标题翻译：用于加速大颗粒束流的方法，系统和装置
公开(公告)号：US20170032930A1
公开(公告)日：2017-02-02
申请号：US14967648
申请日：2015-12-14
申请人： ISO Evolutions, LLC
发明人： Matthew Fox Fritz
IPC分类号： H01J37/317 , H05H5/03
CPC分类号： H01J37/3171 , H01J2237/0473 , H01J2237/08 , H01J2237/31701 , H05H5/03 , H05H5/04 , H05H5/06
摘要： Systems and methods for accelerating large particle beam currents in an electrostatic particle accelerator are provided. A system may include a process ion source that is configured to emit ions, a particle accelerator and a target. The particle accelerator may include multiple conductive electrodes that are serially arranged to define a particle path between the process ion source and the target and multiple accelerator tubes arranged to further define the particle path between the process ion source, ones of the conductive electrodes and the target.
摘要翻译：提供了用于在静电颗粒加速器中加速大粒子束电流的系统和方法。系统可以包括被配置为发射离子，粒子加速器和靶的过程离子源。颗粒加速器可以包括多个导电电极，其被串联地布置以限定处理离子源和靶之间的粒子路径，并且多个加速器管被布置成进一步限定处理离子源，导电电极中的一个和目标物之间的粒子路径。

2. 发明授权

US08723451B2 Accelerator for charged particles 有权
标题翻译：带电粒子的加速器
公开(公告)号：US08723451B2
公开(公告)日：2014-05-13
申请号：US13581263
申请日：2011-02-02
申请人： Oliver Heid
发明人： Oliver Heid
IPC分类号： H05H15/00
CPC分类号： H05H5/04 , H05H5/02 , H05H5/06
摘要： An accelerator for charged particle may include: a capacitor stack which includes a first electrode that can be brought to a first potential, a second electrode that is concentric to the first electrode and can be brought to a second potential differing from the first potential, and at least one intermediate electrode that is concentrically arranged between the first electrode and the second electrode and can be brought to an intermediate potential lying between the first potential and the second potential; a switching device to which the electrodes of the capacitor stack are connected and which is designed such that the concentric electrodes of the capacitor stack can be brought to increasing potential stages during operation of the switching device; a first and a second acceleration channel formed by first and second openings in the electrodes of the capacitor stack such that charged particles can be accelerated along the first and second acceleration channel by means of the electrodes; and a device which can influence the accelerated particle beam within the capacitor stack such that photons emitted by the particle beam are produced.
摘要翻译：用于带电粒子的加速器可以包括：电容器堆叠，其包括可以被带到第一电位的第一电极，与第一电极同心并且可以被带到与第一电位不同的第二电位的第二电极，以及至少一个中间电极，其同心地布置在所述第一电极和所述第二电极之间，并且可以处于位于所述第一电位和所述第二电位之间的中间电位; 连接电容器堆叠的电极的开关装置，其被设计成使得电容器堆叠的同心电极在开关装置的操作期间可以增加电位级; 第一加速通道和第二加速通道，由电容器叠层的电极中的第一和第二开口形成，使得带电粒子可以通过电极沿第一和第二加速通道加速; 以及可以影响电容器堆叠内的加速粒子束的装置，从而产生由粒子束发射的光子。

3. 发明授权

US06653642B2 Methods and apparatus for operating high energy accelerator in low energy mode 有权
标题翻译：在低能量模式下运行高能量加速器的方法和装置
公开(公告)号：US06653642B2
公开(公告)日：2003-11-25
申请号：US09779243
申请日：2001-02-08
申请人： Bjorn O. Pedersen , Peter E. Maciejowski , William G. Goodenough , Paul J. Murphy , Charles M. McKenna
发明人： Bjorn O. Pedersen , Peter E. Maciejowski , William G. Goodenough , Paul J. Murphy , Charles M. McKenna
IPC分类号： H01J37317
CPC分类号： H01J37/3171 , H01J2237/04735 , H05H5/06
摘要： Methods and apparatus are provided for efficiently operating an ion implanter which includes a charged particle accelerator in a high energy mode and in a low energy mode. The charged particle accelerator includes a high voltage power supply, an accelerator column coupled to the high voltage power supply and a switching assembly. The accelerator column includes a plurality of accelerator electrodes. The high voltage power supply is disabled from energizing the accelerator column in the low energy mode. The switching assembly includes switching elements for electrically connecting the accelerator electrodes to a reference potential in the low energy mode and for electrically isolating the accelerator electrodes from the reference potential in the high energy mode. The switching assembly prevents positive potentials on the accelerator electrodes and thus minimizes space charge expansion of the beam when transporting positive ion beams in the low energy mode.
摘要翻译：提供了用于有效地操作离子注入机的方法和装置，其包括高能量模式和低能量模式的带电粒子加速器。带电粒子加速器包括高压电源，耦合到高压电源的加速器柱和开关组件。加速器柱包括多个加速器电极。在低能量模式下，高压电源禁止加速器柱通电。开关组件包括用于将加速器电极电连接到低能量模式中的参考电位并且用于将加速器电极与高能量模式中的参考电位电隔离的开关元件。开关组件防止加速器电极上的正电位，从而当以低能量模式传输正离子束时，使光束的空间电荷膨胀最小化。

4. 发明授权

US6069459A Particle accelerator with vacuum pump connected to the low voltage side 失效
标题翻译：带真空泵的粒子加速器连接低压侧
公开(公告)号：US6069459A
公开(公告)日：2000-05-30
申请号：US937723
申请日：1997-09-25
申请人： Reijer Koudijs
发明人： Reijer Koudijs
IPC分类号： H05H5/02 , H05H5/06 , H01J23/00 , H01J23/34 , H01J25/00 , H05H9/00
CPC分类号： H05H5/02 , H05H5/06
摘要： The disclosure relates to a particle accelerator which comprises two accelerating tubes as well as a charge-exchange channel, whereby the vacuum pump for evacuating from said charge-exchange channel gas particles injected therein is not connected to the high-voltage side but, via a vacuum tube, to the low-voltage side of the particle accelerator. This means a substantial simplification of the maintenance of the vacuum pump. In addition to that a motor and a generator are no longer required. By providing the vacuum pump with equipotential plates, which comprise pump holes arranged eccentrically round the center of the vacuum tube, the gas particles are in this configuration are accelerated while retaining the high breakdown strength.
摘要翻译：本公开涉及一种颗粒加速器，其包括两个加速管以及电荷交换通道，其中用于从其中注入的所述电荷交换通道气体颗粒排出的真空泵不连接到高压侧，而是经由真空管，到低压侧的颗粒加速器。这意味着维护真空泵的实质性简化。除此之外，不再需要电机和发电机。通过为真空泵提供等离子电极板，其中包括偏心地设置在真空管中心的泵孔，在保持高击穿强度的同时，气体粒子被加速。

5. 发明授权

US5729028A Ion accelerator for use in ion implanter 失效
标题翻译：离子加速器用于离子注入机
公开(公告)号：US5729028A
公开(公告)日：1998-03-17
申请号：US789629
申请日：1997-01-27
申请人： Peter H. Rose
发明人： Peter H. Rose
IPC分类号： G21K5/04 , C23C14/48 , H01J37/317 , H01L21/265 , H05H5/03 , H05H5/06 , H01J23/10
CPC分类号： H05H5/06
摘要： An ion accelerator for use in an ion beam implanter. The accelerator forms milliampere beams of heavy ions such as boron and phosphorous in a configuration in which the terminal ion source is replaced by a neutral beam injector. The neutral beam is formed at ground by the conversion of a focused beam of positive ions to neutral ions in a charge exchange canal. The neutral beam so formed is stripped of one or more electrons in a gas or vapor filled canal in the high voltage terminal. A 180.degree. analyzing magnet located in the high voltage terminal analyzes and directs a selected charge state to an acceleration tube parallel to the neutral beam injection tube where the selected positive ions are accelerated to ground potential. To extend the energy range of the accelerator below the injection energy, a high voltage insulator is provided to insulate the ground end of the positive ion acceleration tube permitting the acceleration tube and terminal to be uniformly biased at a negative voltage to decelerate the beam to very low energies at a location close to the point of use. An accelerator assembly includes a 90.degree. analyzing magnet in the high voltage terminal.
摘要翻译：用于离子束注入机的离子加速器。在末端离子源被中性射束注射器代替的结构中，加速器形成毫安的重离子束如硼和磷。通过在电荷交换管中将聚合的正离子束转变成中性离子，中性束在地面形成。如此形成的中性光束在高压端子中的气体或蒸气填充的管中被剥离出一个或多个电子。位于高压端子的180°分析磁体分析并将选定的充电状态引导到平行于中性束注入管的加速管，其中所选择的正离子被加速到地电位。为了将加速器的能量范围扩大到注入能量以下，提供高压绝缘体以使正离子加速管的接地端绝缘，允许加速管和端子被均匀地偏压在负电压以将梁减速到非常在靠近使用点的位置处的低能量。加速器组件包括在高压端子中的90°分析磁体。

6. 发明授权

US09320128B2 Well-logging apparatus with ring-shaped resistors and related methods 有权
标题翻译：环形电阻测井装置及相关方法
公开(公告)号：US09320128B2
公开(公告)日：2016-04-19
申请号：US13830071
申请日：2013-03-14
申请人： Schlumberger Technology Corporation
发明人： Jani Petteri Reijonen , Marc-Andre de Looz
IPC分类号： G01V5/04 , H05H5/04 , G01V5/08 , H05H7/22 , H05H5/06
CPC分类号： H05H5/04 , G01V5/08 , H05H5/06 , H05H7/22 , Y10T29/49117
摘要： A well-logging apparatus may include a charged particle source, a target electrode, and an accelerator column. The accelerator column may include a housing extending between the charged particle source and the target electrode, a series of spaced apart accelerator electrodes carried by the housing, a series of ring-shaped resistors surrounding the housing, and a respective connector coupling adjacent ones of the series of ring-shaped resistors together and to a corresponding one of the series of spaced apart accelerator electrodes.
摘要翻译：测井装置可以包括带电粒子源，目标电极和加速器柱。加速器柱可以包括在带电粒子源和目标电极之间延伸的壳体，由壳体承载的一系列间隔开的加速器电极，围绕壳体的一系列环形电阻器，以及相应的连接器一系列环形电阻器连接到一系列间隔开的加速器电极中的相应一个。

7. 发明授权

US08653761B2 Cascade accelerator 有权
标题翻译：级联加速器
公开(公告)号：US08653761B2
公开(公告)日：2014-02-18
申请号：US13375049
申请日：2010-03-26
申请人： Oliver Heid
发明人： Oliver Heid
IPC分类号： H01J23/00
CPC分类号： H05H5/06
摘要： A cascade accelerator (1), with two sets (2, 4) of capacitors (26, 28) which are each connected in series, interconnected by diodes (24, 30) in the form of a Greinacher cascade (20), is to have in a compact construction a particularly high attainable particle energy. Therefore, the cascade accelerator has an acceleration channel (8) which is formed through openings in the electrodes of the capacitors of a set (2), directed to a particle source (6) arranged in the region of the electrode with the highest voltage (12), wherein the electrodes are insulated to each other apart from the acceleration channel (8) with a solid or liquid insulation material (14).
摘要翻译：具有由Greinacher级联（20）形式的二极管（24,30）互连的两组（2,4）电容器（26,28）的级联加速器（1）分别串联连接，在紧凑的结构中具有特别高的可获得的颗粒能量。因此，级联加速器具有加速通道（8），该加速通道（8）通过设置在具有最高电压的电极区域中的颗粒源（6）的一组（2）的电容器的电极中的开口形成， 12），其中电极通过固体或液体绝缘材料（14）与加速通道（8）隔离。

8. 发明申请

US20130181599A1 DC Voltage-Operated Particle Accelerator 有权
标题翻译：直流电压运算粒子加速器
公开(公告)号：US20130181599A1
公开(公告)日：2013-07-18
申请号：US13824543
申请日：2011-05-20
申请人： Oliver Heid
发明人： Oliver Heid
IPC分类号： H05H5/06
CPC分类号： H05H5/06
摘要： A DC voltage-operated particle accelerator for accelerating a charged particle from a source to a target includes a first electrode arrangement and a separate second electrode arrangement. The first electrode arrangement and the second electrode arrangement are disposed in such a way that the particle successively runs through the first electrode arrangement and the second electrode arrangement. Each of the electrode arrangements is designed as a high-voltage cascade.
摘要翻译：用于将带电粒子从源极加速到靶的直流电压操作粒子加速器包括第一电极装置和单独的第二电极装置。第一电极布置和第二电极布置以使得颗粒连续地穿过第一电极布置和第二电极布置的方式设置。每个电极布置被设计为高压级联。

9. 发明申请

US20010040220A1 Methods and apparatus for operating high energy accelerator in low energy mode 有权
标题翻译：在低能量模式下运行高能量加速器的方法和装置
公开(公告)号：US20010040220A1
公开(公告)日：2001-11-15
申请号：US09779243
申请日：2001-02-08
申请人： Varian Semiconductor Equipment Associates, Inc.
发明人： Bjorn O. Pedersen , Peter E. Maciejowski , William G. Goodenough , Paul J. Murphy , Charles M. McKenna
IPC分类号： G21K001/08 , H01J003/14 , H01J003/26 , H01J049/42
CPC分类号： H01J37/3171 , H01J2237/04735 , H05H5/06
摘要： Methods and apparatus are provided for efficiently operating an ion implanter which includes a charged particle accelerator in a high energy mode and in a low energy mode. The charged particle accelerator includes a high voltage power supply, an accelerator column coupled to the high voltage power supply and a switching assembly. The accelerator column includes a plurality of accelerator electrodes. The high voltage power supply is disabled from energizing the accelerator column in the low energy mode. The switching assembly includes switching elements for electrically connecting the accelerator electrodes to a reference potential in the low energy mode and for electrically isolating the accelerator electrodes from the reference potential in the high energy mode. The switching assembly prevents positive potentials on the accelerator electrodes and thus minimizes space charge expansion of the beam when transporting positive ion beams in the low energy mode.
摘要翻译：提供了用于有效地操作离子注入机的方法和装置，其包括高能量模式和低能量模式的带电粒子加速器。带电粒子加速器包括高压电源，耦合到高压电源的加速器柱和开关组件。加速器柱包括多个加速器电极。在低能量模式下，高压电源禁止加速器柱通电。开关组件包括用于将加速器电极电连接到低能量模式中的参考电位并且用于将加速器电极与高能量模式中的参考电位电隔离的开关元件。开关组件防止加速器电极上的正电位，从而当以低能量模式传输正离子束时，使光束的空间电荷膨胀最小化。

10. 发明授权

US5300891A Ion accelerator 失效
标题翻译：离子加速器
公开(公告)号：US5300891A
公开(公告)日：1994-04-05
申请号：US877452
申请日：1992-05-01
申请人： Nobuhiro Tokoro
发明人： Nobuhiro Tokoro
IPC分类号： C23C14/48 , G21K1/14 , H01J37/08 , H01J37/317 , H01L21/265 , H05H3/04 , H05H5/06
CPC分类号： H05H5/06 , G21K1/14 , H05H3/04
摘要： Ion accelerator characterized in that it is able to use not only a negative ion beam, but also a positive ion beam and a neutral beam, increases the efficiency of the use of the beam, and increases beam current, by using a positive ion source and a charge exchange cell, producing a negative ion beam, and providing, in a tandem type accelerator which uses this, a pre-analyzing magnet having changeable polarity and a pre-focusing lens, a beam neutralizer, and an accelerator terminal, shorting rod.
摘要翻译：离子加速器的特征在于，不仅可以使用负离子束，而且可以使用正离子束和中性光束，从而提高使用光束的效率，并且通过使用正离子源和电荷交换单元，产生负离子束，并且在使用它的串联式加速器中提供具有可变极性的预分析磁体和预聚焦透镜，光束中和器和加速器端子短路杆。

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