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    • 10. 发明申请
    • SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
    • 半导体器件制造方法和半导体器件
    • US20160329684A1
    • 2016-11-10
    • US15070669
    • 2016-03-15
    • Mitsubishi Electric Corporation
    • Hitoshi SAKUMA
    • H01S5/227H01S5/02
    • H01S5/2275H01S5/0201H01S5/2222H01S5/323H01S2301/176
    • A method of manufacturing a semiconductor device, includes a step of forming, on a semiconductor substrate, a mesa stripe including an active layer, and a semiconductor layer covering the mesa stripe, a masking step of forming, on the semiconductor layer, a mask pattern through which the semiconductor layer is exposed on opposite sides of the mesa stripe, an isotropic etching step of performing isotropic etching on the semiconductor layer exposed through the mask pattern so that concaves having a circular-arc sectional shape are formed in the semiconductor layer, and an anisotropic etching step of performing anisotropic etching on the semiconductor layer through the mask pattern after the isotropic etching step so that etching progresses to the semiconductor substrate.
    • 一种制造半导体器件的方法包括在半导体衬底上形成包括有源层的台面条和覆盖台面条的半导体层的步骤,在半导体层上形成掩模图案的掩模步骤 半导体层通过其暴露在台面条的相对侧上,各向同性蚀刻步骤对通过掩模图案曝光的半导体层进行各向同性蚀刻,使得在半导体层中形成具有圆弧截面形状的凹部,以及 各向异性蚀刻步骤,在各向同性蚀刻步骤之后通过掩模图案在半导体层上进行各向异性蚀刻,以使蚀刻进行到半导体衬底。