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    • 3. 发明申请
    • Methods of Forming Graphene-Containing Switches
    • 形成含石墨烯的开关的方法
    • US20130157420A1
    • 2013-06-20
    • US13763662
    • 2013-02-09
    • Micron Technology, Inc.
    • Gurtej S. Sandhu
    • H01L21/768
    • H01L21/768H01L23/525H01L23/53276H01L29/0665H01L29/0676H01L29/1606H01L29/66022H01L29/66742H01L29/7788H01L29/78642H01L29/78684H01L2924/0002H01L2924/00
    • Some embodiments include methods of forming graphene-containing switches. A bottom electrode may be formed over a base, and a first electrically conductive structure may be formed to extend upwardly from the bottom electrode. Dielectric material may be formed along a sidewall of the first electrically conductive structure, while leaving a portion of the bottom electrode exposed. A graphene structure may be formed to be electrically coupled with the exposed portion of the bottom electrode. A second electrically conductive structure may be formed on an opposing side of the graphene structure from the first electrically conductive structure. A top electrode may be formed over the graphene structure and electrically coupled with the second electrically conductive structure. The first and second electrically conductive structures may be configured to provide an electric field across the graphene structure.
    • 一些实施方案包括形成含石墨烯的开关的方法。 底部电极可以形成在基底上,并且第一导电结构可以形成为从底部电极向上延伸。 电介质材料可沿着第一导电结构的侧壁形成,同时使底部电极的一部分露出。 石墨烯结构可以形成为与底部电极的暴露部分电耦合。 可以在石墨烯结构的与第一导电结构相对的一侧上形成第二导电结构。 顶部电极可以形成在石墨烯结构之上并与第二导电结构电耦合。 第一和第二导电结构可以被配置为提供跨越石墨烯结构的电场。