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    • 4. 发明授权
    • Inner lead bonding apparatus
    • 内引线接合装置
    • US5207369A
    • 1993-05-04
    • US795218
    • 1991-11-20
    • Hiroshi HajiKiyoshi Arita
    • Hiroshi HajiKiyoshi Arita
    • H01L21/60
    • H01L24/86H01L2224/16H01L2224/7965H01L2924/01005H01L2924/01006H01L2924/01015H01L2924/01033H01L2924/01039H01L2924/01078H01L2924/01082H01L2924/14
    • A process for manufacturing electronic components known as TAB method comprises a process employing a single apparatus for forming bumps in a chip, a process of inner lead bonding for bonding said bumps to leads of a film carrier, and a process of outer lead bonding for bonding the leads to a circuit board after punching said film carrier. The bumps are formed by plating means or by stud bump means using a capillary tool. In another aspect of the invention there is provided an apparatus by which it is possible to form the bumps and to perform the inner lead bonding in a single apparatus. The capillary tool for forming the inner lead bonding and a pressing tool for the inner lead bonding are replaceably and selectively mounted to be held on a horn. Also, there are provided a pickup head for moving the chip furnished in a chip feeding unit to the chip stage and a moving table for moving the chip stage. The capillary tool is held by the horn, and the bumps are formed in the chip on the chip stage while pulling out a wire from the capillary tool. Next, the pressing tool is manually mounted to be held by the horn in place of the capillary tool, and the leads of the film carrier on the chip stage are bonded to the bumps formed in the chip.
    • 用于制造称为TAB方法的电子部件的方法包括使用单个装置在芯片中形成凸块的工艺,用于将所述凸块接合到薄膜载体的引线的内部引线接合的工艺,以及用于接合的外部引线接合 在冲压所述胶片载体之后导向电路板。 凸块由电镀装置或使用毛细管工具的螺柱凸块形成。 在本发明的另一方面,提供了一种可以在单个装置中形成凸块并执行内引线接合的装置。 用于形成内部引线接合的毛细管工具和用于内部引线接合的按压工具可更换和选择性地安装以保持在喇叭上。 此外,还提供了一种用于将设置在芯片馈送单元中的芯片移动到芯片级的拾取头和用于移动芯片级的移动台。 毛细管工具由喇叭保持,并且在从毛细管工具拉出线材时,在芯片台上的芯片中形成凸块。 接下来,代替毛细管工具手动地安装按压工具以由喇叭保持,并且芯片台上的胶片载体的引线接合到芯片中形成的凸块。