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1. 发明授权

US5511930A Precision positioning apparatus 失效
标题翻译：精密定位装置
公开(公告)号：US5511930A
公开(公告)日：1996-04-30
申请号：US24473
申请日：1993-03-01
申请人： Mikio Sato , Katsumi Asada , Shinji Wakui
发明人： Mikio Sato , Katsumi Asada , Shinji Wakui
IPC分类号： G03F9/00 , G03F7/20 , G05B5/01 , G05B19/19 , G05D3/12 , H01L21/027 , H01L21/30 , G01M7/00
CPC分类号： G03F7/709 , G05B19/19 , G05B5/01 , G05B2219/37275 , G05B2219/37313 , G05B2219/41117 , G05B2219/41179 , G05B2219/41181 , G05B2219/41195 , G05B2219/41346 , G05B2219/41367 , G05B2219/41457 , G05B2219/42104 , G05B2219/45026 , G05B2219/49258 , G05B2219/49271 , G05B2219/50046
摘要： A precision positioning apparatus suitable for the positioning control system of a semiconductor exposing apparatus such as a stepper has, as its object, the provision of a non-contact type precision positioning apparatus capable of properly correcting the disturbance of posture or vibration based on low rigidityy which is a feature of a non-contact guide mechanism and accomplishing stable, highly accurate positioning at a high speed. The precision positioning apparatus is provided with a base plate, a movable member positioned on the base plate, a driving device for driving the movable member, a detecting device for detecting movement of the movable member, and a device for supplying the driving device with a signal regarding the movement of the movable member on the basis of a reference value and the output value from the detecting device. The supplying device includes a device for forming a correction signal for substantially negating a disturbance force to the movable member, by the use of the signal supplied to the driving device and the output from the detecting device. The signal supplied to the driving device can be corrected by the correction signal.
摘要翻译：作为适用于步进机等半导体曝光装置的定位控制系统的精密定位装置，目的在于提供一种能够根据低刚性正确地矫正姿势或振动的不接触型的精确定位装置这是非接触引导机构的特征，并且以高速实现稳定，高精度的定位。该精密定位装置设置有基板，位于基板上的可动构件，用于驱动可动构件的驱动装置，检测可动构件的移动的检测装置，以及用于向驱动装置供给基于参考值和来自检测装置的输出值的可移动部件的移动的信号。供给装置包括用于通过使用提供给驱动装置的信号和来自检测装置的输出来形成用于基本上消除对可动构件的干扰力的校正信号的装置。可以通过校正信号校正提供给驱动装置的信号。

2. 发明授权

US08554344B2 Method and apparatus for microscopy 有权
标题翻译：显微术的方法和装置
公开(公告)号：US08554344B2
公开(公告)日：2013-10-08
申请号：US12922211
申请日：2009-03-13
申请人： Yu Sun , Xinyu Liu
发明人： Yu Sun , Xinyu Liu
IPC分类号： G05B19/18
CPC分类号： G05B19/232 , G02B21/26 , G05B19/291 , G05B19/351 , G05B2219/41346 , G05B2219/49368
摘要： The present invention relates to a compact motorized rotational stage for microscopy applications and control methods for automated sample orientation/rotation. The rotational stage includes a motor, a rotational motion transmission mechanism, and a rotating sample holder for accommodating a holding device such as glass slides/Petri dishes of different sizes. Mouse embryos are used as an example to explain the control methods. A pattern recognition utility was developed for identifying mouse embryo structures. The transformation between the holding device rotational coordinate frame and the translational positioning stage coordinate frame is calibrated during image-based visual servo control. The polar body of an embryo is oriented through purely image-based visual servo control or through coordinate transformation and closed-loop position control.
摘要翻译：本发明涉及用于显微镜应用的紧凑型电动旋转台和用于自动取样/旋转的控制方法。旋转台包括电动机，旋转运动传递机构和用于容纳诸如不同尺寸的玻璃板/培养皿的保持装置的旋转样品保持器。以小鼠胚胎为例来说明对照方法。开发了识别小鼠胚胎结构的模式识别实用程序。在基于图像的视觉伺服控制期间校准保持装置旋转坐标系和平移定位台坐标系之间的变换。胚胎的极体通过纯粹的基于图像的视觉伺服控制或通过坐标变换和闭环位置控制来定向。

3. 发明申请

US20100253275A1 PARALLEL KINEMATICS MICRO-POSITIONING SYSTEM 失效
标题翻译：并行动力微定位系统
公开(公告)号：US20100253275A1
公开(公告)日：2010-10-07
申请号：US12754401
申请日：2010-04-05
申请人： Bhargav Ishwarlal Gajjar
发明人： Bhargav Ishwarlal Gajjar
IPC分类号： G05B19/21 , H02K41/02
CPC分类号： G05B19/19 , G05B2219/37177 , G05B2219/41346
摘要： The present invention is a parallel kinematic linkage based micro-positioning system that can provide precise movement at the micron and sub-micron level of a payload that is compatible with an existing automation system. The system has a motor controller, a digital signal processor, a base frame, a first motor, a first cranking arm with a first connecting link and an intermediate stage that mounts a second motor that is attached to a second cranking arm with a second connecting link. There is also an output stage (also called a table) that is precisely moved by the second cranking arm and a first and second optical linear encoder used in combination with the first and second motor and the first and second cranking arm forming a first motor assembly that converts operational data into a plurality of highly precise X-axes and Y-axes payload linear movements.
摘要翻译：本发明是一种基于并联运动学的微型定位系统，其能够在与现有自动化系统兼容的有效载荷的微米级和亚微米级提供精确的运动。该系统具有马达控制器，数字信号处理器，基架，第一马达，具有第一连接链节的第一起动臂和安装第二起动臂的第二马达的中间台，第二起动臂具有第二连接链接。还存在由第二起动臂精确移动的输出级（也称为工作台）和与第一和第二电动机组合使用的第一和第二光学线性编码器以及形成第一电动机组件的第一和第二起动臂其将操作数据转换成多个高精度的X轴和Y轴有效负载线性运动。

4. 发明授权

US08294406B2 Parallel kinematics micro-positioning system 失效
标题翻译：平行运动学微定位系统
公开(公告)号：US08294406B2
公开(公告)日：2012-10-23
申请号：US12754401
申请日：2010-04-05
申请人： Bhargav Ishwarlal Gajjar
发明人： Bhargav Ishwarlal Gajjar
IPC分类号： G05B19/21
CPC分类号： G05B19/19 , G05B2219/37177 , G05B2219/41346
摘要： The present invention is a parallel kinematic linkage based micro-positioning system that can provide precise movement at the micron and sub-micron level of a payload that is compatible with an existing automation system. The system has a motor controller, a digital signal processor, a base frame, a first motor, a first cranking arm with a first connecting link and an intermediate stage that mounts a second motor that is attached to a second cranking arm with a second connecting link. There is also an output stage (also called a table) that is precisely moved by the second cranking arm and a first and second optical linear encoder used in combination with the first and second motor and the first and second cranking arm forming a first motor assembly that converts operational data into a plurality of highly precise X-axes and Y-axes payload linear movements.
摘要翻译：本发明是一种基于并联运动学的微型定位系统，其能够在与现有自动化系统兼容的有效载荷的微米级和亚微米级提供精确的运动。该系统具有马达控制器，数字信号处理器，基架，第一马达，具有第一连接链节的第一起动臂和安装第二起动臂的第二马达的中间台，第二起动臂具有第二连接链接。还存在由第二起动臂精确移动的输出级（也称为工作台）和与第一和第二电动机组合使用的第一和第二光学线性编码器以及形成第一电动机组件的第一和第二起动臂其将操作数据转换成多个高精度的X轴和Y轴有效负载线性运动。

5. 发明申请

US20110009983A1 Method and Apparatus for Microscopy 有权
标题翻译：显微镜的方法和装置
公开(公告)号：US20110009983A1
公开(公告)日：2011-01-13
申请号：US12922211
申请日：2009-03-13
申请人： Yu Sun , Xinyu Liu
发明人： Yu Sun , Xinyu Liu
IPC分类号： G02B21/26 , G05D3/12
CPC分类号： G05B19/232 , G02B21/26 , G05B19/291 , G05B19/351 , G05B2219/41346 , G05B2219/49368
摘要： The present invention relates to a compact motorized rotational stage for microscopy applications and control methods for automated sample orientation/rotation. The rotational stage includes a motor, a rotational motion transmission mechanism, and a rotating sample holder for accommodating a holding device such as glass slides/Petri dishes of different sizes. Mouse embryos are used as an example to explain the control methods. A pattern recognition utility was developed for identifying mouse embryo structures. The transformation between the holding device rotational coordinate frame and the translational positioning stage coordinate frame is calibrated during image-based visual servo control. The polar body of an embryo is oriented through purely image-based visual servo control or through coordinate transformation and closed-loop position control.
摘要翻译：本发明涉及用于显微镜应用的紧凑型电动旋转台和用于自动取样/旋转的控制方法。旋转台包括电动机，旋转运动传递机构和用于容纳诸如不同尺寸的玻璃板/培养皿的保持装置的旋转样品保持器。以小鼠胚胎为例来说明对照方法。开发了识别小鼠胚胎结构的模式识别实用程序。在基于图像的视觉伺服控制期间校准保持装置旋转坐标系和平移定位台坐标系之间的变换。胚胎的极体通过纯粹的基于图像的视觉伺服控制或通过坐标变换和闭环位置控制来定向。

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