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1. 发明申请

US20140065732A1 SEMICONDUCTOR MANUFACTURING PROCESS SYSTEM AND METHOD 有权
标题翻译：半导体制造工艺系统及方法
公开(公告)号：US20140065732A1
公开(公告)日：2014-03-06
申请号：US13795760
申请日：2013-03-12
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Eiichi OKADA
IPC分类号： H01L21/66
CPC分类号： H01L22/20 , B24B37/042 , B24B37/34 , G05B19/41865 , G05B2219/32234 , G05B2219/32235 , G05B2219/32269 , G05B2219/32286 , G05B2219/45031 , Y02P90/14 , Y02P90/20 , Y02P90/22
摘要： According to one embodiment, a wafer processing device includes a processed number counting unit that counts a number of processed wafers, and a maintenance post-processing unit that executes a dummy lot process and a QC lot process after a maintenance process. A wafer preparation device prepares the dummy lot and the QC lot, when a first processed number is counted by the processed number counting unit. When a second processed number is counted by the processed number counting unit, a carrier device carries the dummy lot and the QC lot to the wafer processing device simultaneous with the maintenance process, before the maintenance process is completed.
摘要翻译：根据一个实施例，晶片处理装置包括对经处理的晶片的数量进行计数的处理数量计数单元，以及在维护处理之后执行虚设批处理和QC批处理的维护后处理单元。当处理的数量计数单元对第一个处理的数字进行计数时，晶片准备装置准备了虚拟批次和QC批次。当处理数量计数单元对第二处理数进行计数时，在完成维护处理之前，载体装置在维护处理的同时将该批次和QC批次携带到晶片处理装置。

2. 发明授权

US5548535A Monitor utility for use in manufacturing environment 失效
标题翻译：监控实用程序用于制造环境
公开(公告)号：US5548535A
公开(公告)日：1996-08-20
申请号：US335994
申请日：1994-11-08
申请人： John G. Zvonar
发明人： John G. Zvonar
IPC分类号： G05B19/418 , G07C3/00 , G08B21/00 , G08B23/00
CPC分类号： G05B19/4184 , G05B2219/31323 , G05B2219/31372 , G05B2219/31435 , G05B2219/31452 , G05B2219/31453 , G05B2219/32286 , G05B2219/33209 , Y02P90/12 , Y02P90/14 , Y02P90/20 , Y02P90/24
摘要： Method and apparatus for a utility for monitoring, tracking and scheduling the performance of periodic activities in a manufacturing environment is disclosed. In a preferred embodiment, the monitor utility of present invention is a VAX-based menu-driven program that is used to schedule and track periodic activities. erformed on tools and machines, or "entities." In one aspect of the invention, a user may create a family of entities to be monitored and may schedule various monitor items to be performed in connection with each entity, which items may be "triggered" by the occurrence of a designated event a designated number of times or by the elapse of a designated period of time. In another aspect of the invention, the utility may be used easily to generate and display and/or print reports in various formats showing the status of monitor items for a particular family and/or entity. In another aspect of the invention, the utility is capable of sending one or more VAX mail messages to designated users when certain monitor items are due. In addition, the utility may be configured to send a VAX mail warning message to designated users a predetermined amount of time before a monitor item becomes due so that the recipient(s) can take steps to perform the monitor item by the due date. In yet another aspect of the invention, if a monitor item is not performed by the due date, the utility is capable of logging down the entity with which the overdue monitor item is associated.
摘要翻译：公开了用于在制造环境中监视，跟踪和调度周期性活动的性能的实用程序的方法和装置。在优选实施例中，本发明的监视实用程序是用于调度和跟踪周期性活动的基于VAX的菜单驱动程序。在工具和机器上，或“实体”上发生变化。在本发明的一个方面，用户可以创建要监视的一系列实体，并且可以安排与每个实体相关联地执行的各种监视项目，哪些项可以通过指定事件的发生指定数字“触发” 的时间或经过指定的时间段。在本发明的另一方面，该实用程序可以容易地用于生成和/或打印各种格式的报告，显示特定家庭和/或实体的监视项目的状态。在本发明的另一方面，当某些监视项目到期时，该实用程序能够向指定用户发送一个或多个VAX邮件消息。此外，该实用程序可以被配置为在监视项目到期之前向指定用户发送预定时间量的VAX邮件警告消息，使得接收者可以在到期日期之前执行监视项目的步骤。在本发明的另一方面，如果监视项目在到期日期之前未执行，则该实用程序能够记录与逾期监视项目相关联的实体。

3. 发明授权

US09136190B2 Semiconductor manufacturing process system and method 有权
标题翻译：半导体制造工艺系统及方法
公开(公告)号：US09136190B2
公开(公告)日：2015-09-15
申请号：US13795760
申请日：2013-03-12
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Eiichi Okada
IPC分类号： H01L21/66 , B24B37/04 , G05B19/418 , B24B37/34
CPC分类号： H01L22/20 , B24B37/042 , B24B37/34 , G05B19/41865 , G05B2219/32234 , G05B2219/32235 , G05B2219/32269 , G05B2219/32286 , G05B2219/45031 , Y02P90/14 , Y02P90/20 , Y02P90/22
摘要： According to one embodiment, a wafer processing device includes a processed number counting unit that counts a number of processed wafers, and a maintenance post-processing unit that executes a dummy lot process and a QC lot process after a maintenance process. A wafer preparation device prepares the dummy lot and the QC lot, when a first processed number is counted by the processed number counting unit. When a second processed number is counted by the processed number counting unit, a carrier device carries the dummy lot and the QC lot to the wafer processing device simultaneous with the maintenance process, before the maintenance process is completed.
摘要翻译：根据一个实施例，晶片处理装置包括对经处理的晶片的数量进行计数的处理数量计数单元，以及在维护处理之后执行虚设批处理和QC批处理的维护后处理单元。当处理的数量计数单元对第一个处理的数字进行计数时，晶片准备装置准备了虚拟批次和QC批次。当处理数量计数单元对第二处理数进行计数时，在完成维护处理之前，载体装置在维护处理的同时将该批次和QC批次携带到晶片处理装置。

4. 发明授权

US07272531B2 Aggregation of asset use indices within a process plant 有权
公开(公告)号：US07272531B2
公开(公告)日：2007-09-18
申请号：US11230855
申请日：2005-09-20
申请人： Kadir Kavaklioglu , Steven R. Dillon , Gregory H. Rome , Jon Westbrock
发明人： Kadir Kavaklioglu , Steven R. Dillon , Gregory H. Rome , Jon Westbrock
IPC分类号： G06F15/00
CPC分类号： G06F11/008 , G05B2219/32286 , G06F3/0482
摘要： A method of monitoring an entity within a process plant wherein the entity includes a plurality of lower level entities, includes acquiring a plurality of use indices, acquiring a plurality of weighting values, and creating an aggregate use index from a combination of the lower level use indices and weighting values, wherein the aggregate use index represents status information regarding the entity. Each use index pertains to status information regarding one of the plurality of lower level entities, and each weighting value pertains to the importance of a lower level entity among the plurality of lower level entities.

5. 发明授权

US12007743B2 Monitoring system for matching an operator with a sewing machine on the floor of a sewing factory 有权
公开(公告)号：US12007743B2
公开(公告)日：2024-06-11
申请号：US16701318
申请日：2019-12-03
申请人： JUKI CORPORATION
发明人： Tadashi Atsumi
IPC分类号： G05B19/4063 , G05B19/418
CPC分类号： G05B19/4063 , G05B19/4183 , G05B2219/32286 , G05B2219/45195
摘要： The present embodiment provide a monitoring system for monitoring at least one of fixed equipment installed in a floor and a moving object moving in the floor, the fixed equipment and moving object being monitoring targets, the monitoring system includes a recognition device that recognizes the monitoring target and outputs recognition information, and a management device that collects position information of the monitoring target from the recognition information.

6. 发明申请

US20150142165A1 UTILIZATION RATE CALCULATION METHOD AND SYSTEM THEREOF, EMBEDDED SYSTEM AND COMPUTER READABLE STORAGE MEDIUM 审中-公开
标题翻译：使用率计算方法及其系统，嵌入式系统和计算机可读存储介质
公开(公告)号：US20150142165A1
公开(公告)日：2015-05-21
申请号：US14262860
申请日：2014-04-28
申请人： INSTITUTE FOR INFORMATION INDUSTRY
发明人： CHIH- CHIANG KAO , CHUN-TAI YEN , CHIH-YI WU , CHENG-HUNG PAN
IPC分类号： G05B19/05
CPC分类号： G05B19/054 , G05B19/4063 , G05B2219/32191 , G05B2219/32286 , Y02P90/22
摘要： A utilization rate calculation method is disclosed. The utilization rate calculation method comprises steps as follows: scanning an operation signal of I/O ports via a I/O port capturing module; continuously receiving the operation signal via the I/O port capturing module; determining whether a machine tool is running according to the operation signal and a processing machine operation rule via a utilization rate calculation system; if the machine tool is running, recording a processing time data of the machine tool; generating a utilization rate according to the processing-time data and time data to be processed, wherein the processing-machine operation rule is a record for at least one I/O port stand for running corresponding to the machine tool which is running, and the I/O port stand for running is one of the I/O ports.
摘要翻译：公开了利用率计算方法。利用率计算方法包括以下步骤：通过I / O端口捕获模块扫描I / O端口的操作信号; 通过I / O端口捕获模块连续接收操作信号; 根据操作信号确定机床是否正在运行;以及通过利用率计算系统确定处理机器操作规则; 如果机床正在运行，记录机床的处理时间数据; 根据处理时间数据和要处理的时间数据生成利用率，其中处理机操作规则是用于对应于正在运行的机床的至少一个I / O端口站的记录，并且 I / O端口支持运行是其中一个I / O端口。

7. 发明申请

US20070067142A1 Aggregation of asset use indices within a process plant 有权
标题翻译：过程工厂内资产使用指数的汇总
公开(公告)号：US20070067142A1
公开(公告)日：2007-03-22
申请号：US11230855
申请日：2005-09-20
申请人： Kadir Kavaklioglu , Steven Dillon , Gregory Rome , Jon Westbrock
发明人： Kadir Kavaklioglu , Steven Dillon , Gregory Rome , Jon Westbrock
IPC分类号： G21C17/00
CPC分类号： G06F11/008 , G05B2219/32286 , G06F3/0482
摘要： A method of monitoring an entity within a process plant wherein the entity includes a plurality of lower level entities, includes acquiring a plurality of use indices, acquiring a plurality of weighting values, and creating an aggregate use index from a combination of the lower level use indices and weighting values, wherein the aggregate use index represents status information regarding the entity. Each use index pertains to status information regarding one of the plurality of lower level entities, and each weighting value pertains to the importance of a lower level entity among the plurality of lower level entities.
摘要翻译：一种监视过程工厂内的实体的方法，其中所述实体包括多个较低级实体，包括获取多个使用索引，获取多个加权值，以及从较低级别的使用的组合中创建聚合使用指数索引和加权值，其中聚合使用指数表示关于实体的状态信息。每个使用索引涉及关于多个较低级实体中的一个的状态信息，并且每个权重值与多个较低级实体中较低级实体的重要性有关。

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