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    • 1. 发明申请
    • PHYSICAL QUANTITY SENSOR WITH SON STRUCTURE, AND MANUFACTURING METHOD THEREOF
    • 具有SON结构的物理量传感器及其制造方法
    • US20130193531A1
    • 2013-08-01
    • US13712062
    • 2012-12-12
    • FUJI ELECTRIC CO., LTD.
    • Mutsuo NISHIKAWAKazunori SAITO
    • H01L29/84
    • H01L29/84G01L9/0042G01L9/0045G01L9/0048G01P15/123G01P2015/084H01L29/0649Y10S257/925
    • Provided by some aspects of the invention is a relatively low-cost, relatively highly accurate physical quantity sensor, and a manufacturing method thereof, that relaxes thermal stress from an outer peripheral portion of a diaphragm in a silicon-on-nothing (“SON”) structure. By providing a stress relaxation region (trench groove) in an outer peripheral portion of a diaphragm in a SON structure, there can be, in some aspects of the invention, a benefit of relaxing the transmission to the diaphragm of thermal stress generated by the difference in linear expansion coefficient between a package and chip, and it is possible to relax the transmission to an electronic circuit disposed in an outer peripheral portion of mechanical stress generated by a measured pressure. As a result of this, it is possible to provide a highly accurate physical quantity sensor.
    • 通过本发明的某些方面提供了一种相对低成本,相对高度精确的物理量传感器及其制造方法,其在无硅无极(“SON”)中松弛来自隔膜的外周部分的热应力, ) 结构体。 通过在SON结构中的隔膜的外周部设置应力松弛区域(沟槽),在本发明的一些方面,可以有利于放松由隔膜产生的热应力对隔膜的传递 在封装和芯片之间的线膨胀系数,并且可以放松到设置在由测量压力产生的机械应力的外周部分中的电子电路的传输。 作为其结果,可以提供高精度的物理量传感器。
    • 5. 发明授权
    • Semiconductor device
    • 半导体器件
    • US4484212A
    • 1984-11-20
    • US335712
    • 1981-12-29
    • Shigeru KomatsuMichio NakamuraKatsuji Fujita
    • Shigeru KomatsuMichio NakamuraKatsuji Fujita
    • H01L27/04H01L21/768H01L21/822H01L23/522H01L23/58H01L27/08H01L29/84H01L23/48H01L27/02H01L29/44
    • H01L23/585H01L23/522H01L27/0802H01L2924/0002Y10S257/925Y10S73/04
    • A semiconductor device comprising a semiconductor substrate having at least two resistor elements, wherein said resistor elements have a specific resistance ratio relative to each other, an insulation layer formed on a major surface of said semiconductor substrate, a circuit wiring layer formed on said insulation layer covering a portion of said insulation layer which corresponds to at least one of said resistor elements, and a dummy wiring layer made of the same material as that of the circuit wiring layer and formed on the insulation layer covering that portion of said insulation layer which corresponds to the resistor element or elements not covered by said circuit wiring layer, and where the ratio of an overlapping area of one resistor element in said circuit wiring layer and an overlapping area of the other resistor element and said dummy wiring layer is equal to a resistance ratio of said resistor elements.
    • 一种半导体器件,包括具有至少两个电阻元件的半导体衬底,其中所述电阻元件相对于彼此具有比电阻比,形成在所述半导体衬底的主表面上的绝缘层,形成在所述绝缘层上的电路布线层 覆盖对应于所述电阻元件中的至少一个的所述绝缘层的一部分,以及由与所述电路布线层相同的材料制成的虚拟布线层,并形成在所述绝缘层上,覆盖所述绝缘层对应的部分 连接到所述电路布线层未被覆盖的电阻元件或元件,并且其中所述电路布线层中的一个电阻元件的重叠区域与所述另一个电阻元件与所述伪布线层的重叠区域的重叠面积之比等于电阻 所述电阻元件的比例。
    • 8. 发明授权
    • Physical quantity sensor with son structure, and manufacturing method thereof
    • 具有子结构的物理量传感器及其制造方法
    • US08884385B2
    • 2014-11-11
    • US13712062
    • 2012-12-12
    • Fuji Electric Co., Ltd.
    • Mutsuo NishikawaKazunori Saito
    • G01L9/00H01L29/84H01L29/06G01P15/12G01P15/08
    • H01L29/84G01L9/0042G01L9/0045G01L9/0048G01P15/123G01P2015/084H01L29/0649Y10S257/925
    • Provided by some aspects of the invention is a relatively low-cost, relatively highly accurate physical quantity sensor, and a manufacturing method thereof, that relaxes thermal stress from an outer peripheral portion of a diaphragm in a silicon-on-nothing (“SON”) structure. By providing a stress relaxation region (trench groove) in an outer peripheral portion of a diaphragm in a SON structure, there can be, in some aspects of the invention, a benefit of relaxing the transmission to the diaphragm of thermal stress generated by the difference in linear expansion coefficient between a package and chip, and it is possible to relax the transmission to an electronic circuit disposed in an outer peripheral portion of mechanical stress generated by a measured pressure. As a result of this, it is possible to provide a highly accurate physical quantity sensor.
    • 通过本发明的某些方面提供了一种相对低成本,相对高度精确的物理量传感器及其制造方法,其在无硅无极(“SON”)中松弛来自隔膜的外周部分的热应力, ) 结构体。 通过在SON结构中的隔膜的外周部设置应力松弛区域(沟槽),在本发明的一些方面,可以有利于放松由隔膜产生的热应力对隔膜的传递 在封装和芯片之间的线膨胀系数,并且可以放松到设置在由测量压力产生的机械应力的外周部分中的电子电路的传输。 作为其结果,可以提供高精度的物理量传感器。