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    • 6. 发明申请
    • SYSTEMS AND METHODS FOR PERFORMING BACKSCATTER THREE DIMENSIONAL IMAGING FROM ONE SIDE OF A STRUCTURE
    • 从结构一侧执行背板三维成像的系统和方法
    • US20170052125A1
    • 2017-02-23
    • US14827653
    • 2015-08-17
    • THE BOEING COMPANY
    • Gary E. GeorgesonMorteza Safai
    • G01N23/203G01N23/20G21K1/02
    • G01N23/203G01N23/20008G01N23/20025G01N2223/053G01N2223/1016G01N2223/301G01N2223/40G21K1/043
    • An imaging system for generating three dimensional image data using X-ray backscattering from one side of a structure is provided. The imaging system includes at least one X-ray source, at least one rotating collimator coupled to the at least one X-ray source, an X-ray detector, and a controller coupled to the at least one X-ray source, the at least one rotating collimator and the X-ray detector. The controller is configured to emit X-rays from the at least one X-ray source through the at least one rotating collimator towards the one side of the structure. Additionally, the controller is configured to detect backscattered X-rays from the one side of the structure, using the X-ray detector, at a plurality of depths within the structure. Additionally, the controller is configured to generate three dimensional image data of the structure based on the detected backscattered X-rays.
    • 提供一种用于使用从结构的一侧的X射线反向散射来生成三维图像数据的成像系统。 所述成像系统包括至少一个X射线源,耦合到所述至少一个X射线源的至少一个旋转准直器,X射线检测器和耦合到所述至少一个X射线源的控制器,所述at 至少一个旋转准直仪和X射线检测器。 控制器被配置为从至少一个X射线源通过至少一个旋转准直器向结构的一侧发射X射线。 此外,控制器被配置为在结构内的多个深度处使用X射线检测器从结构的一侧检测反向散射的X射线。 另外,控制器被配置为基于检测的反向散射X射线生成结构的三维图像数据。
    • 7. 发明授权
    • Methods for characterizing relative film density using spectroscopic analysis at the device level
    • 在器件级使用光谱分析表征相对膜密度的方法
    • US09052269B1
    • 2015-06-09
    • US13460501
    • 2012-04-30
    • Lifan ChenHaifeng WangLi ZengDehua Han
    • Lifan ChenHaifeng WangLi ZengDehua Han
    • G06F19/00G01N31/00G01N23/083
    • G01N23/083G01N9/24G01N23/20091G01N2223/40
    • Methods for characterizing relative film density using spectroscopic analysis at the device level are provided. One such method includes obtaining a composition of materials at preselected areas of a workpiece using energy dispersive X-ray spectroscopy, obtaining an electron energy loss spectrum-imaging data at each of the preselected areas using electron energy loss spectroscopy, removing, for each of the preselected areas, a preselected noise component of the electron energy spectrum-imaging data to form a plasmon energy spectrum-imaging data, generating, for each of the preselected areas, a plasmon energy map based on the respective plasmon energy spectrum-imaging data, determining, for each of the preselected areas, an average plasmon energy value from the respective plasmon energy map, and calculating a relative mass density of the preselected areas based on the average plasmon energy value, a number of valence electrons per molecule, and a molecular weight for each of the preselected areas.
    • 提供了在器件级使用光谱分析来表征相对膜密度的方法。 一种这样的方法包括使用能量色散X射线光谱法在工件的预选区域获得材料的组成,使用电子能量损失光谱法在每个预选区域获得电子能量损失光谱成像数据, 预选区域,电子能谱成像数据的预选噪声分量,以形成等离子体激元能谱成像数据,为每个预选区域生成基于相应的等离子体激元能谱成像数据的等离子体激元能量图,确定 对于每个预选区域,来自各个等离子体激元能量图的平均等离子体激元能量值,并且基于平均等离子体激元能量值,每分子的价电子数和分子量来计算预选区域的相对质量密度 对于每个预选区域。