专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20090116005A1 FINE PARTICLE MEASURING METHOD, SUBSTRATE FOR MEASUREMENT, AND MEASURING APPARATUS 有权
标题翻译：精细颗粒测量方法，测量用基板和测量装置
公开(公告)号：US20090116005A1
公开(公告)日：2009-05-07
申请号：US12259235
申请日：2008-10-27
申请人： Motohiro FURUKI , Shingo IMANISHI , Masataka SHINODA , Akitoshi SUZUKI , Kazushi MIYAKE
发明人： Motohiro FURUKI , Shingo IMANISHI , Masataka SHINODA , Akitoshi SUZUKI , Kazushi MIYAKE
IPC分类号： G01N21/05
CPC分类号： G01N15/1425 , G01N15/1436 , G01N15/1459 , G01N15/1484 , G01N21/6428 , G01N21/645 , G01N2015/1006 , G01N2015/1497 , G01N2021/058 , G01N2021/6419 , G01N2021/6421 , G01N2201/10 , G01N2201/11
摘要： A fine particle measuring method of performing optical measurement of fine particles introduced into a plurality of sample fluidic channels provided at predetermined distances on a substrate by scanning light to the sample fluidic channels is disclosed. The method includes: sequentially irradiating the light to at least two or more reference regions provided together with the sample fluidic channels; detecting a change of optical property occurring in the light due to the reference regions; and controlling timing of emission of the light to the sample fluidic channels.
摘要翻译：公开了一种微粒测量方法，其通过向样品流体通道扫描光来对引入到以预定距离设置在基板上的多个样品流体通道中的微粒进行光学测量。该方法包括：顺序地将光照射到与样品流体通道一起提供的至少两个或更多个参考区域; 检测由于参考区域而在光中发生的光学特性的变化; 并控制向样品流体通道发射光的定时。

2. 发明申请

US20170363543A1 CONTROL DEVICE OF IMAGE READING APPARATUS, OPERATION METHOD THEREOF, AND IMAGE DETECTION SYSTEM 审中-公开
公开(公告)号：US20170363543A1
公开(公告)日：2017-12-21
申请号：US15493779
申请日：2017-04-21
申请人： FUJIFILM Corporation
发明人： Takashi KOBAYASHI
IPC分类号： G01N21/64
CPC分类号： G01N21/6456 , G01N21/6428 , G01N21/6486 , G01N27/44717 , G01N27/44721 , G01N2021/6419 , G01N2021/6421 , G01N2021/6439 , G01N2201/06193 , G01N2201/11
摘要： There are provided a control device of an image reading apparatus, an operation method and an operation program thereof, and an image detection system capable of quickly and easily outputting an image having an appropriate density for analysis from an image reading apparatus. An image receiving unit receives a pre-image output in pre-scanning performed before main scanning for outputting a main image for analysis in an image reading apparatus. A region information receiving unit receives information of a region in the pre-image designated by a user. A calculation unit calculates an appropriate voltage value that is a voltage value of the photomultiplier at which a density of the region becomes an appropriate density for analysis. A scanning conditions setting unit sets the appropriate voltage value as temporary scanning conditions of main scanning.

3. 发明授权

US09518932B2 Metrology optimized inspection 有权
标题翻译：计量优化检验
公开(公告)号：US09518932B2
公开(公告)日：2016-12-13
申请号：US14517751
申请日：2014-10-17
申请人： KLA-Tencor Corporation
发明人： Allen Park , Craig MacNaughton , Ellis Chang
IPC分类号： G01B11/06 , G01N21/88 , G03F7/00 , G01N21/93 , G01N21/95 , G01N21/956 , G03F7/20
CPC分类号： G01N21/93 , G01B11/06 , G01B11/0675 , G01B2210/56 , G01N21/9501 , G01N21/956 , G01N2201/061 , G01N2201/105 , G01N2201/11 , G01N2201/125 , G03F7/705 , G03F7/70616
摘要： Methods and systems for determining one or more parameters of a wafer inspection process are provided. One method includes acquiring metrology data for a wafer generated by a wafer metrology system. The method also includes determining one or more parameters of a wafer inspection process for the wafer or another wafer based on the metrology data.
摘要翻译：提供了用于确定晶片检查过程的一个或多个参数的方法和系统。一种方法包括获取由晶片计量系统产生的晶片的度量数据。该方法还包括基于测量数据确定晶片或另一晶片的晶片检查过程的一个或多个参数。

4. 发明申请

US20150124247A1 Metrology Optimized Inspection 有权
标题翻译：计量优化检验
公开(公告)号：US20150124247A1
公开(公告)日：2015-05-07
申请号：US14517751
申请日：2014-10-17
申请人： KLA-Tencor Corporation
发明人： Allen Park , Craig MacNaughton , Ellis Chang
IPC分类号： G01N21/93 , G01N21/95
CPC分类号： G01N21/93 , G01B11/06 , G01B11/0675 , G01B2210/56 , G01N21/9501 , G01N21/956 , G01N2201/061 , G01N2201/105 , G01N2201/11 , G01N2201/125 , G03F7/705 , G03F7/70616
摘要： Methods and systems for determining one or more parameters of a wafer inspection process are provided. One method includes acquiring metrology data for a wafer generated by a wafer metrology system. The method also includes determining one or more parameters of a wafer inspection process for the wafer or another wafer based on the metrology data.
摘要翻译：提供了用于确定晶片检查过程的一个或多个参数的方法和系统。一种方法包括获取由晶片计量系统产生的晶片的度量数据。该方法还包括基于测量数据确定晶片或另一晶片的晶片检查过程的一个或多个参数。

5. 发明申请

US20160238533A1 SPECTROSCOPY APPARATUS AND METHODS 审中-公开
标题翻译：光谱仪器和方法
公开(公告)号：US20160238533A1
公开(公告)日：2016-08-18
申请号：US15025464
申请日：2014-09-30
申请人： RENISHAW PLC
发明人： Thomas Anthony MASON
IPC分类号： G01N21/65
CPC分类号： G01N21/65 , G01J3/0208 , G01J3/0237 , G01J3/0248 , G01J3/2803 , G01J3/2823 , G01J3/44 , G01J2003/2826 , G01N2201/025 , G01N2201/06113 , G01N2201/103 , G01N2201/11 , G01N2201/117 , G01N2201/122
摘要： This invention concerns spectroscopy apparatus comprising a light source arranged to generate a light profile on a sample, a photodetector having at least one photodetector element for detecting characteristic light generated from interaction of the sample with light from the light source, a support for supporting the sample, the support movable relative to the light profile, and a processing unit. The processing unit is arranged to associate a spectral value recorded by the photodetector element at a particular time with a point on the sample predicted to have generated the characteristic light recorded by the photodetector element at the particular time based on relative motion anticipated to have occurred between the support and the light profile.
摘要翻译：本发明涉及光谱装置，其包括被配置为在样品上产生光分布的光源，具有至少一个光电探测元件的光电检测器，该光电检测元件用于检测由样品与来自光源的光的相互作用产生的特征光;支撑样品，相对于光轮廓可移动的支撑件，以及处理单元。处理单元被布置为将由特定时间的光电检测器元件记录的光谱值与预测的样品上的点相关联，以在特定时间基于由光电检测器元件记录的特征光，基于预期发生在支持和光线。

6. 发明申请

US20160153894A1 OPTICAL ELEMENT ROTATION TYPE MUELLER-MATRIX ELLIPSOMETER AND METHOD FOR MEASURING MUELLER-MATRIX OF SAMPLE USING THE SAME 审中-公开
标题翻译：光学元件旋转型MUELLER-MATRIX ELLIPSOMETER和用于测量使用其的样品的MUELLER-MATRIX的方法
公开(公告)号：US20160153894A1
公开(公告)日：2016-06-02
申请号：US14906433
申请日：2014-05-13
申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人： Yong Jai Cho , Won Chegal , Hyun Mo Cho
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01J4/00 , G01J4/04 , G01J2004/001 , G01N2021/213 , G01N2201/0683 , G01N2201/11
摘要： Provided is an optical element rotation type Mueller-matrix ellipsometer for solving a problem of measurement accuracy and measurement precision occurring due to residual polarization of a light source, polarization dependence of a photo-detector, measurement values of Fourier coefficients of a high order term in dual optical element rotation type Mueller-matrix ellipsometers according to the related art capable of measuring some or all of components of a Mueller-matrix for any sample.
摘要翻译：提供一种光学元件旋转型米勒矩阵椭偏仪，用于解决由于光源的残余极化产生的测量精度和测量精度的问题，光检测器的偏振度依赖性，高阶项的傅里叶系数的测量值根据相关技术的双光学元件旋转型米勒矩阵椭偏仪能够测量任何样品的Mueller矩阵的一些或全部组分。

7. 发明申请

US20110006219A1 DATA ACQUISITION METHOD USING A LASER SCANNER 有权
标题翻译：使用激光扫描仪的数据采集方法
公开(公告)号：US20110006219A1
公开(公告)日：2011-01-13
申请号：US12666035
申请日：2009-02-13
申请人： Alois Schausberger , Andreas Gfrörer , Wolfgang Fuchs
发明人： Alois Schausberger , Andreas Gfrörer , Wolfgang Fuchs
IPC分类号： G01T1/10
CPC分类号： G02B21/26 , G01N21/278 , G01N21/6458 , G01N2021/6419 , G01N2201/104 , G01N2201/11 , G02B21/0076
摘要： The invention relates to a data acquisition method using a laser scanner for the pixel-precise imaging of fluorescent samples which are on object carriers and have been treated with fluorescent dyes. Such a laser scanner comprises a sample table; at least one laser and a first optical system for providing at least one laser beam for exciting the fluorescent samples; a scanner head (50) having an optical deflecting element for scanning this sample in at least one direction of movement (75); a first lens; a second optical system for forwarding emission beams, which are triggered by the laser beams on the sample and are deflected by the first lens and the deflecting element, to at least one detector; a position encoder (91) which emits position encoder signals (92) which indicate the instantaneous location of the scanner head (50) in relation to a zero point; an electronic element for filtering the detector signals (93) with a defined time constant; and an A/D converter for digitizing the filtered detector signals (93). The data acquisition method according to the invention is characterized in that the filtered detector signals (93) from the A/D converter and the position encoder signals (92) are acquired independently, in a parallel manner and continuously by a computer unit or a controller (40) and are related to a common time base (94), wherein the A/D conversion is carried out so often that each pixel (95) of an image is always assigned more than one data point of the A/D converter.
摘要翻译：本发明涉及一种使用激光扫描仪进行像素精确成像的数据采集方法，其中荧光样品位于物体载体上并用荧光染料处理。这种激光扫描器包括样品台; 至少一个激光器和第一光学系统，用于提供用于激发荧光样品的至少一个激光束; 扫描头（50）具有用于在至少一个运动方向（75）扫描该样品的光学偏转元件; 第一个镜头; 用于转发发射光束的第二光学系统，其由样品上的激光束触发并被第一透镜和偏转元件偏转到至少一个检测器; 位置编码器（91），其发射指示扫描器头（50）相对于零点的瞬时位置的位置编码器信号（92）用于以确定的时间常数对检测器信号（93）进行滤波的电子元件; 以及用于数字化滤波的检测器信号（93）的A / D转换器。根据本发明的数据获取方法的特征在于，来自A / D转换器的滤波检测器信号（93）和位置编码器信号（92）以并行方式独立地获取并且由计算机单元或控制器（40）并且与公共时基（94）相关，其中所述A / D转换经常被执行，使得图像的每个像素（95）总是被分配多个A / D转换器的一个数据点。

8. 发明申请

US20190079008A1 SAMPLE SUBSTANCE MOLECULAR BONDS BREAKDOWN AND SEL COLLECTION 审中-公开
公开(公告)号：US20190079008A1
公开(公告)日：2019-03-14
申请号：US15772493
申请日：2016-02-28
申请人： Hewlett-Packard Development Company, L.P.
发明人： Ning GE
IPC分类号： G01N21/64 , G01N21/65
CPC分类号： G01N21/648 , G01N21/658 , G01N2021/1734 , G01N2201/06113 , G01N2201/11
摘要： A sample comprising a first substance and a second substance is modified by breaking down molecular bonds of the second substance of the sample to form a modified sample having altered surface enhanced luminescence (SEL) characteristics to reduce overlapping of SEL characteristics of the first substance in the second substance. Surface enhanced luminescence data resulting from excitation of the modified sample is collected. Characteristics of the first substance based upon the collected surface enhanced luminescence data are identified.

9. 发明授权

US09702827B1 Optical mode analysis with design-based care areas 有权
公开(公告)号：US09702827B1
公开(公告)日：2017-07-11
申请号：US14946604
申请日：2015-11-19
申请人： KLA-Tencor Corporation
发明人： Bjorn Brauer , Ravikumar Sanapala
IPC分类号： G01N21/00 , G01N21/88 , G01N21/95
CPC分类号： G01N21/8851 , G01N21/9501 , G01N2201/11
摘要： Methods and systems for selecting one or more modes of an inspection subsystem or system for inspection of a specimen are provided. The systems described herein are configured to acquire output for all of the modes to be considered at a location of a known defect on the specimen by aligning output, which is generated at the location with a mode known to generate output in which patterned features on the specimen are resolved to a degree that allows the output to be aligned to design data, with the design data for the specimen to identify the location with substantially high accuracy and then without moving the field of view of the inspection subsystem or system from that location, acquiring the output for all other modes. All of the acquired output can then be used to select mode(s) for inspection of the specimen or another specimen of the same type.

10. 发明申请

US20170146458A1 A System and Method for Inducing and Detecting Multi-Photon Processes in a Sample 有权
公开(公告)号：US20170146458A1
公开(公告)日：2017-05-25
申请号：US15316568
申请日：2015-06-03
申请人： Ludwig-Maximilians-Universität München
发明人： Robert Alexander Huber , Sebastian Karpf , Matthias Eibl
IPC分类号： G01N21/64 , G01N21/65
CPC分类号： G01N21/6456 , G01J3/0218 , G01J3/10 , G01J3/44 , G01J3/4406 , G01N21/6408 , G01N21/65 , G01N2021/6484 , G01N2201/06146 , G01N2201/0635 , G01N2201/105 , G01N2201/11 , G01N2201/12 , H01S3/06712 , H01S3/06754 , H01S3/094007 , H01S3/10015 , H01S3/1618 , H01S3/2316 , H01S3/302 , H01S2301/02
摘要： Described is a system for inducing and detecting multi-photon processes, in particular multi-photon fluorescence or higher harmonic generation in a sample. The system comprises a dynamically-controllable light source, said dynamically-controllable light source comprising a first sub-light source, said first sub-light source being electrically controllable such as to generate controllable time-dependent intensity patterns of light having a first wavelength, and at least one optical amplifier, thereby allowing for active time-control of creation of multi-photon-excitation. The system further comprises a beam delivery unit for delivering light generated by said dynamically-controllable light source to a sample site, and a detector unit or detector assembly for detecting signals indicative of said multi-photon process, in particular multi-photon fluorescence signals or higher harmonics signals.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式