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    • 2. 发明申请
    • FLOW CYTOMETRY OPTICS
    • 流式细胞仪光学
    • US20160290915A1
    • 2016-10-06
    • US15036712
    • 2014-11-14
    • BECKMAN COULTER, INC.
    • Antao ChenJuan J. Fernandez De CastroPaul K. Church
    • G01N15/14G01N21/53G01N21/64
    • G01N15/1436G01N15/1459G01N21/53G01N21/645G01N2015/0065G01N2021/6421G01N2021/6463G01N2021/6478G01N2021/6484G01N2201/0637
    • High numerical aperture collection optics for particle analyzers may include an ellipsoidal reflector or an ellipsoidal reflector in combination with a spherical reflector, and may efficiently collect light scattered or emitted by particles in a sample stream and then couple that collected light into a lower numerical aperture portion of the instrument's optical detection system, such as into an optical fiber for example. The reflectors may be integrated with a flow cell through which the sample stream passes, or may be separate components arranged around a flow cell or, in instruments not employing a flow cell, arranged around a sample stream in air. Refractive beam steering optics may allow multiple closely spaced excitation beams to be directed into the sample stream at low angles of incidence. The collection optics and refractive beam steering optics may be employed separately or in combination with each other.
    • 用于粒子分析器的高数值孔径采集光学器件可以包括椭球反射器或与球形反射器组合的椭圆反射器,并且可以有效地收集由样品流中的颗粒散射或发射的光,然后将收集的光耦合到较低的数值孔径部分 的仪器的光学检测系统,例如成为光纤。 反射器可以与样品流通过的流动池一体化,或者可以是布置在流动池周围的分离的组件,或者在不使用流动池的仪器中,布置在空气中的样品流周围。 折射光束转向光学器件可以允许多个紧密间隔的激发光束以低入射角被引导到样品流中。 收集光学器件和折射光束转向光学元件可以单独使用或者彼此组合使用。
    • 4. 发明授权
    • Method and system for imaging a target
    • 用于成像目标的方法和系统
    • US09322776B2
    • 2016-04-26
    • US14463004
    • 2014-08-19
    • The Boeing Company
    • Stephen Kerry Wilcken
    • G01N21/47
    • G01N21/4738G01N21/55G01N2201/02G01N2201/061G01N2201/06113G01N2201/0636G01N2201/0637
    • A system for characterizing a bi-directional reflectance distribution function scattered light pattern of a portion of a sample is disclosed. The system can comprise a hemispherical member comprising an reflective inner surface; an entrance port operable to receive electromagnetic radiation from an electromagnetic radiation source; a first reflective optical element operable to receive at least a portion of the electromagnetic radiation and to direct the at least the portion of the electromagnetic radiation onto the portion of the sample to be characterized; a wide-angle lens operable receive the electromagnetic radiation that was specularly reflected and diffusely scattered from the portion of the sample onto the inner surface of the hemispherical member; and an imaging device operable to record intensity information imaged by the wide-angle lens to characterize the bi-directional reflectance distribution function scattered light pattern of the portion of the sample.
    • 公开了一种用于表征样品的一部分的双向反射分布函数散射光图案的系统。 该系统可以包括半球形构件,其包括反射内表面; 入口端口,其可操作以从电磁辐射源接收电磁辐射; 第一反射光学元件,其可操作以接收所述电磁辐射的至少一部分并且将所述电磁辐射的至少一部分引导到要表征的所述样品的所述部分上; 广角镜可操作地接收从样品部分镜面反射和漫射散射到半球形构件的内表面上的电磁辐射; 以及成像装置,其可操作以记录由广角镜头成像的强度信息,以表征样品部分的双向反射分布函数散射光图案。
    • 5. 发明申请
    • Spectroscopic Ellipsometers
    • 光谱椭偏仪
    • US20070247624A1
    • 2007-10-25
    • US11739679
    • 2007-04-24
    • Tongxin LuXiaohan Wang
    • Tongxin LuXiaohan Wang
    • G01J4/00
    • G01N21/211G01B11/0625G01N21/9501G01N2021/213G01N2021/8427G01N2201/0636G01N2201/0637
    • The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.
    • 本发明公开了一种光学测量和/或检查装置,其在一个应用中可用于半导体器件的检查。 公开了一种用于提取椭偏仪的未测试装置的信息的方法,包括以下步骤:使用多个偏振器提供多个入射偏振光束,其中每个光束以指定的偏振角极化; 使用抛物面反射器将所述多个入射偏振光束聚焦在DUT上的点上; 使用抛物面反射器收集从所述DUT反射的多个光束; 以及使用多个分析器分析所述收集的束,其中每个分析器相对于其各自的偏振器具有指定的偏振角。
    • 6. 发明申请
    • Optical Focusing Devices
    • 光学聚焦装置
    • US20070242267A1
    • 2007-10-18
    • US11735979
    • 2007-04-16
    • Tongxin LuXiaohan Wang
    • Tongxin LuXiaohan Wang
    • G01J3/40
    • G01N21/9501G01B11/0625G01N2021/8427G01N2201/0636G01N2201/0637
    • The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.
    • 本发明公开了一种光学测量和/或检查装置,其在一个应用中可用于半导体器件的检查。 它包括用于提供光线的光源; 具有内部反射表面的半抛物线形反射器,其中具有焦点和总结轴的反射器和被测试装置设置在焦点附近。 进入反射器的与概要轴平行的光线将被引导到焦点并反射出所测试的器件,并产生指示所述被测器件的信号,然后反射光 射线离开所述反射器。 检测器接收退出的光线,并且可以分析光线以确定被测器件的特性。