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    • 4. 发明申请
    • METHOD OF MANUFACTURING A DEVICE
    • 制造装置的方法
    • US20150206853A1
    • 2015-07-23
    • US14425407
    • 2013-09-09
    • KYOCERA Corporation
    • Hideki MatsushitaMasanobu Kitada
    • H01L23/00B32B37/24B32B38/00B32B37/18
    • H01L24/83B32B37/18B32B37/24B32B38/0008B32B38/0036B32B2037/243B32B2305/30B32B2310/14B32B2311/00B32B2313/00B32B2457/14C23C14/18C23C14/46H01L21/2007H01L2924/365
    • Provided is a device in which the metal content existing in a joining interface is controlled. A manufacturing method for the device comprises: a step in which the surfaces of a first substrate and a second substrate are activated using a FAB gun; a step in which a plurality of metals are discharged by using the FAB gun to sputter a discharged metal body comprising the plurality of metals, and the plurality of metals are affixed to the surfaces of the first substrate and the second substrate; a step in which the first substrate and the second substrate are joined at room temperature; and a step in which heating is performed at a temperature that is high in comparison to the agglomeration start temperature of the plurality of metals and of the elements that constitute the first substrate or the second substrate. With regards to the step in which the plurality of metals are affixed, the density of the plurality of metals existing on the joining interface of the first substrate and the second substrate is set to 1×1012/cm2 or less by adjusting the exposure area of the discharged metal body.
    • 提供了控制存在于接合界面中的金属含量的装置。 该装置的制造方法包括:使用FAB枪激活第一基板和第二基板的表面的步骤; 通过使用FAB枪对包含多个金属的排出的金属体溅射多个金属的步骤,并且将多个金属固定在第一基板和第二基板的表面上; 第一基板和第二基板在室温下接合的步骤; 以及与多个金属和构成第一基板或第二基板的元件的凝聚开始温度相比,在高的温度下进行加热的工序。 关于固定有多个金属的步骤,通过调整第一基板和第二基板的接合界面上存在的多个金属的密度,通过调整第一基板和第二基板的接触界面的曝光面积而设定为1×10 12 / cm 2以下 排出的金属体。