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1. 发明授权

US06554688B2 Method and apparatus for conditioning a polishing pad with sonic energy 失效
公开(公告)号：US06554688B2
公开(公告)日：2003-04-29
申请号：US09754702
申请日：2001-01-04
申请人： Michael S. Lacy
发明人： Michael S. Lacy
IPC分类号： B24B100
CPC分类号： B24B53/017 , B24B1/04 , B24B53/10
摘要： A method and apparatus for conditioning a polishing pad is described, wherein the polishing pad has a polishing surface for polishing the semiconductor wafer, and a back surface opposed to the polishing surface. The method includes positioning a sonic energy generator adjacent to the back surface of the polishing pad, and generating sonic energy through the back surface of the polishing pad. The apparatus includes a sonic energy generator adapted to be positioned adjacent the back surface, the sonic energy generator including a transducer connected to a contact member, wherein the sonic energy generator is adapted to transmit sonic energy in a direction through the back surface and to the polishing surface of the polishing belt.

2. 发明授权

US4720939A Wide belt sander cleaning device 失效
标题翻译：宽带砂光机清洗装置
公开(公告)号：US4720939A
公开(公告)日：1988-01-26
申请号：US867331
申请日：1986-05-23
申请人： Steven C. Simpson , Ronald D. Witt , Gregory E. Volkland
发明人： Steven C. Simpson , Ronald D. Witt , Gregory E. Volkland
IPC分类号： B24B53/10
CPC分类号： B24B53/10
摘要： A device for cleaning abrasive surfaces used in wood sanding operations includes a frame attached to the frame of a belt sanding machine. A retainer assembly is carried by the frame and receives a block of natural or synthetic rubber cleaning material. The retainer assembly and associated block are selectively moved into position whereby abrasive contact of the block with a running belt for cleaning is achieved. The movement of the cartridge assembly is controlled by a fluid cylinder arrangement. Hydraulic withdrawal cylinders at either end of the frame are set to lift the cartridge assembly and block in an upward direction out of a contact position with the sanding belt. A central fluid projection cylinder is used to overcome the upward force of the two outer cylinders, for forcing the block into operative contact with the belt when desired. Controls are provided for regulating contact time with the belt depending on operating conditions. Alternative controls may also be used to adjust the pressure in the cylinders to compensate for the changing weight of the block as it is worn away during use.
摘要翻译：用于清洁用于木材打磨操作中的研磨表面的装置包括附接到带式砂光机的框架上的框架。保持器组件由框架承载并接收一块天然或合成橡胶清洁材料。保持器组件和相关联的块被选择性地移动到位，由此实现块与用于清洁的行进带的磨料接触。墨盒组件的运动由流体气缸装置控制。设置框架任一端的液压取出缸将提升盒组件并向上方向阻止与砂带的接触位置。使用中央液体喷射筒来克服两个外部气缸的向上的力，以便在需要时迫使气囊与皮带接触。根据操作条件，提供控制以调节与皮带的接触时间。也可以使用替代控制来调节气缸中的压力，以补偿块在使用过程中磨损时的重量变化。

3. 发明授权

US06666755B1 Belt wiper for a chemical mechanical planarization system 失效
标题翻译：用于化学机械平面化系统的皮带刮水器
公开(公告)号：US06666755B1
公开(公告)日：2003-12-23
申请号：US10184163
申请日：2002-06-26
申请人： Travis R. Taylor , Christian DiPietro , Stephen Jew , Philip Ngoon , Katgenahalli Y. Ramanujam , Tony Luong
发明人： Travis R. Taylor , Christian DiPietro , Stephen Jew , Philip Ngoon , Katgenahalli Y. Ramanujam , Tony Luong
IPC分类号： B24B100
CPC分类号： B24B53/017 , B24B21/10 , B24B37/04 , B24B53/10
摘要： A belt wiper that can be used in a linear belt-type chemical mechanical planarization (CMP) system to maintain a belt pad is provided. The belt wiper mitigates disturbances within a detection region important to a belt pad steering system. Also, the belt wiper mitigates the obscuring of optical components important to operation of an endpoint detection system. Thus, the belt wiper, by wiping the underside of the belt pad will preserve the functionality of both the belt pad steering system and the endpoint detection system.
摘要翻译：提供可用于线性带式化学机械平面化（CMP）系统以保持皮带垫的皮带刮水器。皮带刮水器可以减轻对皮带垫转向系统重要的检测区域内的干扰。此外，带式刮水器减轻了对端点检测系统的操作重要的光学部件的模糊。因此，通过擦拭皮带垫的下侧，皮带刮水器将保持皮带垫转向系统和端点检测系统的功能。

4. 发明授权

US6036589A Cleaner for a belt sander 失效
标题翻译：清洁砂带机
公开(公告)号：US6036589A
公开(公告)日：2000-03-14
申请号：US179384
申请日：1998-10-27
申请人： Cliff Reilly , James T Kelly
发明人： Cliff Reilly , James T Kelly
IPC分类号： B24B23/06 , B24B53/10
CPC分类号： B24B53/10 , B24B23/06
摘要： A cleaner for a belt sander comprising a mounting plate pivotally coupled to a supporting plate having a cleaning block mounted thereon. The mounting plate is adapted to be mounted to the cover of a belt sander. When the two plates are pivoted closed, the cleaning block is facing away from the abrasive belt of the belt sander so that the sander can be used for sanding. When it is desired to clean the belt, the plates are pivoted open, so that the cleaning block rests against the belt and can clean the belt as it rotates through the sander. The cleaner is especially adapted for use on portable belt sanders.
摘要翻译：一种用于带式打磨机的清洁器，包括可枢转地联接到其上安装有清洁块的支撑板的安装板。安装板适于安装在带式砂磨机的盖上。当两个板旋转关闭时，清洁块面向远离带式砂磨机的砂带，使砂磨机可用于打磨。当需要清洁皮带时，打印板枢转打开，使得清洁块抵靠皮带，并且可以在皮带旋转穿过打磨机时清洁皮带。清洁剂特别适用于便携式砂带机。

5. 发明授权

US5628672A Blowing device for a belt grinding machine 失效
标题翻译：皮带磨床发泡装置
公开(公告)号：US5628672A
公开(公告)日：1997-05-13
申请号：US584344
申请日：1996-01-11
申请人： Jurgen Heesemann
发明人： Jurgen Heesemann
IPC分类号： B08B5/02 , B23Q1/34 , B24B53/10 , B24B21/18 , B24B21/00
CPC分类号： B24B53/10 , B08B5/026 , B23Q1/34
摘要： A blowing device for a belt grinding machine has a nozzle arrangement having nozzles positioned relative to its grinding belt for blowing cleaning air jets onto the circulating grinding belt. The device further has an oscillating drive to oscillate the nozzle arrangement in the longitudinal direction thereof. A pair of elastic members suspend the nozzle arrangement, which is oscillated in the longitudinal direction by using a magnetic field. A ferromagnetic member is connected to the nozzle arrangement and is positioned within the magnetic field produced by an electric coil. By varying the magnetic field, the nozzle arrangement can be moved in the longitudinal direction, the spring providing an elastic restoring force to move the nozzle arrangement is the opposite direction when the magnetic field is turned off.
摘要翻译：用于皮带磨床的吹风装置具有喷嘴装置，其具有相对于其研磨带定位的喷嘴，用于将清洁空气射流吹送到循环研磨带上。该装置还具有振荡驱动器，以使喷嘴装置在其纵向方向上振荡。一对弹性构件使通过使用磁场沿长度方向摆动的喷嘴装置悬挂。铁磁构件连接到喷嘴装置并且位于由电线圈产生的磁场内。通过改变磁场，喷嘴装置能够在纵向方向上移动，当磁场被关闭时，弹簧提供弹性恢复力以使喷嘴装置移动是相反的方向。

6. 发明授权

US5484323A Belt cleaner 失效
标题翻译：皮带清洁剂
公开(公告)号：US5484323A
公开(公告)日：1996-01-16
申请号：US185793
申请日：1994-05-05
申请人： Robert K. Smith
发明人： Robert K. Smith
IPC分类号： B24B53/10
CPC分类号： B24B53/10
摘要： A cleaner for attachment to a wide belt sander, the cleaner being mounted adjacent the top roller of the belt sander. The cleaner is applied to the sanding belt only during operation of the sander.
摘要翻译： PCT No.PCT / AU92 / 00373 Sec。 371日期：1994年5月5日 102（e）日期1994年5月5日PCT提交1992年7月22日PCT公布。出版物WO93 / 01896 日期1993年2月4日。一种用于连接到宽带砂光机的清洁剂，清洁器安装在带式砂磨机的顶辊附近。清洁剂仅在砂光机操作期间应用于砂带。

7. 发明授权

US4815238A Debris collector for a wide belt sander and the like 失效
标题翻译：用于宽带砂光机等的碎屑收集器
公开(公告)号：US4815238A
公开(公告)日：1989-03-28
申请号：US179070
申请日：1988-04-08
申请人： Steven C. Simpson , Ronald D. Witt
发明人： Steven C. Simpson , Ronald D. Witt
IPC分类号： B24B53/10 , B24B21/18
CPC分类号： B24B53/10
摘要： A debris collector for wide belt sanders and the like including an upper assembly. A plurality of posts include upper ends connected to the upper assembly and lower ends connected to a lower assembly. A bag assembly extends between the upper and lower assemblies and is shaped to receive debris.
摘要翻译：用于宽带式砂磨机等的碎屑收集器包括上部组件。多个柱包括连接到上组件的上端和连接到下组件的下端。袋组件在上部和下部组件之间延伸并且被成形为接收碎屑。

8. 发明授权

US3596413A Abrading tool chip extractor and remover 失效
标题翻译：抛光工具芯片提取器和拆卸
公开(公告)号：US3596413A
公开(公告)日：1971-08-03
申请号：US3596413D
申请日：1969-11-26
申请人： DONALD R STEWART
发明人： STEWART DONALD R
IPC分类号： B24B53/007 , B24B53/10 , B24B55/00 , B24B55/04
CPC分类号： B24B53/007 , B24B53/10
摘要： A system for removing metal chips from a driven endless abrading tool to prolong the useful life of the tool. A magnet is provided to extract loosely clinging chips from the abrasive surface to remove the chips of the tool before the chips are ironed into such abrading tool by further abrading contact with a workpiece. A wind tunnel is provided and is in part formed by the magnet, and the abrasive surface of the tool, and an air stream passing through the tunnel exerts a force greater than the magnetically attractive force of the magnet to preclude the accumulation of chips on the magnet.

9. 发明申请

US20060143991A1 Chemical mechanical polishing pad dresser 有权
标题翻译：化学机械抛光垫修整器
公开(公告)号：US20060143991A1
公开(公告)日：2006-07-06
申请号：US11026544
申请日：2004-12-30
申请人： Chien-Min Sung
发明人： Chien-Min Sung
IPC分类号： C09K3/14
CPC分类号： B24B53/02 , B24B1/00 , B24B53/10 , B24B53/12 , B24D3/00
摘要： CMP pad dressers and their methods of manufacture are disclosed. One aspect of the present invention provides a CMP pad dresser having improved superabrasive grit retention in a resin layer. The CMP pad includes a resin layer, superabrasive grit held in the resin layer such that an exposed portion of each superabrasive grit protrudes from the resin layer, and a metal coating layer disposed between each superabrasive grit and the resin layer, where the exposed portions are substantially free of the metal coating layer. The metal coating layer acts to increase the retention of the superabrasive grit in the resin layer as compared to superabrasive grit absent the metal coating layer.
摘要翻译：公开了CMP抛光垫修整器及其制造方法。本发明的一个方面提供了一种在树脂层中具有改进的超研磨砂粒保持性的CMP抛光垫修整器。 CMP垫包括树脂层，超硬磨料保持在树脂层中，使得每个超级磨料砂粒的暴露部分从树脂层突出;以及金属涂层，设置在每个超研磨砂粒和树脂层之间，其中暴露部分是基本上不含金属涂层。与没有金属涂层的超磨料砂粒相比，金属涂层用于增加超研磨砂粒在树脂层中的保留性。

10. 发明授权

US6162113A Process using in-situ abrasive belt/planer cleaning system 失效
标题翻译：使用原位砂带/刨床清洗系统的工艺
公开(公告)号：US6162113A
公开(公告)日：2000-12-19
申请号：US918078
申请日：1997-08-25
申请人： Jay T. Armstrong
发明人： Jay T. Armstrong
IPC分类号： B24B53/10 , B24B1/00
CPC分类号： B24B53/10
摘要： Featured is a method and system for cleaning abrasive sanding and/or planing media, for example sandpaper, wide belt sanding belts, planers, grinding wheels or other abrasive surfaces while the media is either in-situ in the sanding, planing, grinding equipment or when removed. Additionally, the cleaning featured method and system can clean the media while the abrasive media is being used as well as when the abrasive media is not being used. In the cleaning method dry ice (CO.sub.2, solid carbon dioxide) particles are propelled towards the abrasive surface at a high velocity so the dry ice particles impact on the surface of the abrasive media at a high velocity. Additionally, the dry ice (CO.sub.2, solid carbon dioxide) particles are propelled as to impact the abrasive surface at varying angles and locations as necessary to effectively clean the abrasive surface. Further, the dry ice particles are propelled towards the abrasive media when it is in motion, for example rotating, so the dry ice particles impact the abrasive media at different locations of the media. The method and system allow the abrasive media to be cleaned while the abrasive media is being used for its' intended purpose. Thereby reducing equipment downtime usually associated with cleaning and/or changing the abrasive media due to becoming dirty and/or worn.
摘要翻译：特别是用于清洁研磨砂光和/或刨削介质的方法和系统，例如砂纸，宽带砂带，刨床，砂轮或其他研磨表面，同时介质在砂磨，刨削，研磨设备或原位何时删除此外，清洁特征的方法和系统可以在使用研磨介质以及不使用研磨介质时清洁介质。在清洁方法中，干冰（CO2，固体二氧化碳）颗粒以高速推向研磨表面，因此干冰颗粒以高速度冲击研磨介质的表面。此外，干冰（CO 2，固体二氧化碳）颗粒被推进，以便根据需要以不同的角度和位置冲击研磨表面，以有效地清洁研磨表面。此外，当干冰颗粒运动时，例如旋转，干冰颗粒被推向研磨介质，因此干冰颗粒在介质的不同位置冲击研磨介质。该方法和系统允许在研磨介质用于其预期目的时清洁研磨介质。从而减少了由于变脏和/或磨损而清洗和/或更换研磨介质而造成的设备停机时间。

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