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1. 发明授权

US08183495B2 Cascade source and a method for controlling the cascade source 有权
标题翻译：级联源和控制级联源的方法
公开(公告)号：US08183495B2
公开(公告)日：2012-05-22
申请号：US12967392
申请日：2010-12-14
申请人： Martin Dinant Bijker , Leonardus Peterus Maria Clijsen , Franciscus Cornelius Dings , Remco Leonardus J. Robertus Pennings
发明人： Martin Dinant Bijker , Leonardus Peterus Maria Clijsen , Franciscus Cornelius Dings , Remco Leonardus J. Robertus Pennings
IPC分类号： B23K1/02
CPC分类号： H05H1/34 , H05H2001/3452
摘要： A cascade source provided with a cathode housing, a number of cascade plates insulated from each other and stacked on top of each other which together bound at least one plasma channel, and an anode plate provided with an outflow opening connecting to the plasma channel, wherein one cathode is provided per plasma channel, which cathode comprises an electrode which is adjustable relative to the cathode housing in the direction of the plasma channel, wherein the clamping provision is preferably of the collet chuck type. Also described is method for controlling the cascade source in use.
摘要翻译：一种级联源，其设置有阴极壳体，多个级联板彼此绝缘并堆叠在一起，彼此结合在一起结合至少一个等离子体通道;以及阳极板，其设置有连接到等离子体通道的流出开口，其中每个等离子体通道设置一个阴极，该阴极包括可在等离子体通道的方向上相对于阴极壳体调节的电极，其中夹紧配置优选为夹头卡盘型。还描述了在使用中控制级联源的方法。

2. 发明申请

US20110206485A1 CONVEYOR ASSEMBLY AND METHOD FOR CONVEYING A SUBSTRATE CARRIER 有权
标题翻译：输送机组件和输送基板载体的方法
公开(公告)号：US20110206485A1
公开(公告)日：2011-08-25
申请号：US13059890
申请日：2009-08-21
申请人： Eduard Renier Francisca Clerkx , Ernst Dullemeijer , Franciscus Cornelius Dings
发明人： Eduard Renier Francisca Clerkx , Ernst Dullemeijer , Franciscus Cornelius Dings
IPC分类号： B65G17/12 , B65G47/00
CPC分类号： B65G47/646 , B65G47/644 , B65G47/645 , B65G49/064 , B65G2249/02 , C23C14/505 , C23C14/562 , C23C16/4588 , C23C16/545 , H01L21/67173 , H01L21/67271 , H01L21/67748 , Y10S414/139
摘要： A conveyor assembly suitable for use in a substrate processing system includes: at least one substrate carrier having a substrate-carrying surface configured to support at least one substrate; a processing track; a return track; a drive system configured to drive the substrate carrier along the processing track and the return track; and at least one swivel unit configured to pivot the substrate carrier around a substantially horizontal axis from a first orientation into a second orientation, and/or vice versa. Also provided is a method for conveying a substrate carrier including: providing a substrate carrier; positioning the substrate carrier in a first orientation; conveying the substrate carrier along a first track; and rotating the substrate carrier around a substantially horizontal axis into a second orientation.
摘要翻译：适用于基板处理系统的输送机组件包括：至少一个基板载体，其具有构造成支撑至少一个基板的基板承载表面; 加工轨道返回轨道驱动系统，被配置为沿着所述处理轨道和所述返回轨道驱动所述衬底载体; 以及至少一个旋转单元，其构造成将基板载体围绕基本水平的轴线从第一取向枢转到第二取向，和/或反之亦然。还提供了一种用于输送基板载体的方法，包括：提供基板载体; 将衬底载体定位在第一取向; 沿着第一轨道传送所述衬底载体; 以及将基底载体围绕基本上水平的轴线旋转成第二取向。

3. 发明授权

US08080366B2 In-line process for making thin film electronic devices 有权
标题翻译：制造薄膜电子设备的在线工艺
公开(公告)号：US08080366B2
公开(公告)日：2011-12-20
申请号：US11709785
申请日：2007-02-23
申请人： Ronaldus Joannes Cornelis Maria Kok , Marinus Franciscus Johannes Evers , Franciscus Cornelius Dings
发明人： Ronaldus Joannes Cornelis Maria Kok , Marinus Franciscus Johannes Evers , Franciscus Cornelius Dings
IPC分类号： G03F7/20
CPC分类号： H01L27/1214 , H01L21/67173 , H01L21/67196 , H01L21/67225 , H01L51/56
摘要： An in-line process for making a thin film electronic device on a substrate is described comprising the steps of: a) depositing a structurable layer onto a substrate; b) depositing a patternable material onto the structurable layer in a first pattern; and c) etching the structurable layer in areas uncovered by the patternable material. The steps are carried out without intermediate exposure of the substrate to ambient air.
摘要翻译：描述了在衬底上制造薄膜电子器件的在线工艺，其包括以下步骤：a）将可结构化层沉积到衬底上; b）以第一图案将可图案材料沉积到所述结构化层上; 以及c）在由可图案材料覆盖的区域中蚀刻可结构化层。在不将基板中间暴露于环境空气的情况下进行这些步骤。

4. 发明申请

US20110185930A1 TRANSPORT TABLE AND METHOD FOR THE USE THEREOF 有权
标题翻译：运输表及其使用方法
公开(公告)号：US20110185930A1
公开(公告)日：2011-08-04
申请号：US12997505
申请日：2009-06-11
申请人： Cornelius Adrianus Henricus Van Der Avoort , Robbert Hilmar Backer , Cornelius Petrus Du Pau , Marcel Peeren
发明人： Cornelius Adrianus Henricus Van Der Avoort , Robbert Hilmar Backer , Cornelius Petrus Du Pau , Marcel Peeren
IPC分类号： B65G35/04 , B41F1/28
CPC分类号： B65G35/04
摘要： A transport table, comprising a transport web; an unwinding roller for unwinding the transport web therefrom; a first return element; a second return element; a winding roller for winding thereon the unwound transport web; a first frame with which the first and the second return element are connected; and a second frame with which the unwinding roller and the winding roller are rotatably connected, wherein the unwinding roller, the winding roller and the return elements together are designed for stretching the transport web such that between the first and the second return element a surface of the transport web is available as transport surface, and wherein the second frame is movable along a path substantially parallel to said transport surface with respect to the first frame. The invention also discloses a method for the use of the transport table.
摘要翻译：一种运输台，包括运输网; 用于从其中展开传送网的展开辊; 第一个返回元素; 第二个返回元素; 卷绕辊，用于在其上卷绕未卷绕的输送幅材; 与第一和第二返回元件连接的第一框架; 以及第二框架，所述展开辊和所述卷绕辊可旋转地连接在其上，其中所述展开辊，所述卷绕辊和所述返回元件在一起被设计成用于拉伸所述运送卷筒纸，使得在所述第一和第二返回元件之间的表面输送带可用作输送表面，并且其中第二框架可相对于第一框架沿着基本上平行于所述输送表面的路径移动。本发明还公开了一种使用传送台的方法。

5. 发明申请

US20110079506A1 CASCADE SOURCE AND A METHOD FOR CONTROLLING THE CASCADE SOURCE 有权
标题翻译： CASCADE源和一种控制CASCADE源的方法
公开(公告)号：US20110079506A1
公开(公告)日：2011-04-07
申请号：US12967392
申请日：2010-12-14
申请人： Martin D. Bijker , Leonardus P., M. Clijsen , Franciscus C. Dings , Remco L., J., R. Pennings
发明人： Martin D. Bijker , Leonardus P., M. Clijsen , Franciscus C. Dings , Remco L., J., R. Pennings
IPC分类号： H05H1/48 , B01J19/08
CPC分类号： H05H1/34 , H05H2001/3452
摘要： A cascade source provided with a cathode housing, a number of cascade plates insulated from each other and stacked on top of each other which together bound at least one plasma channel, and an anode plate provided with an outflow opening connecting to the plasma channel, wherein one cathode is provided per plasma channel, which cathode comprises an electrode which is adjustable relative to the cathode housing in the direction of the plasma channel, wherein the clamping provision is preferably of the collet chuck type. Also described is method for controlling the cascade source in use.
摘要翻译：一种级联源，其设置有阴极壳体，多个级联板彼此绝缘并堆叠在一起，彼此结合在一起结合至少一个等离子体通道;以及阳极板，其设置有连接到等离子体通道的流出开口，其中每个等离子体通道设置一个阴极，该阴极包括可在等离子体通道的方向上相对于阴极壳体调节的电极，其中夹紧配置优选为夹头卡盘型。还描述了在使用中控制级联源的方法。

6. 发明申请

US20100244068A1 Method For Applying A Thin-Film Encapsulation Layer Assembly To An Organic Device, And An Organic Device Provided With A Thin-Film Encapsulation Layer Assembly Preferably Applied With Such A Method 审中-公开
标题翻译：用于将薄膜封装层组件应用于有机器件的方法以及具有薄膜封装层组件的有机器件优选地以这种方法应用
公开(公告)号：US20100244068A1
公开(公告)日：2010-09-30
申请号：US12599847
申请日：2008-05-16
申请人： Bas Jan Emile van Rens , Yvo Hendrik Croonen , Ruediger Lange
发明人： Bas Jan Emile van Rens , Yvo Hendrik Croonen , Ruediger Lange
IPC分类号： H01L51/52 , H01L51/56
CPC分类号： H01L51/5256 , H01L2251/5315
摘要： A method for applying a thin-film encapsulation layer assembly to an organic device, which comprises a substrate which is provided with an active stack and is then provided with the thin-film encapsulation layer assembly for screening the active stack substantially from oxygen and moisture, wherein the thin-film encapsulation layer assembly is formed by applying at least one organic and at least one inorganic layer applied with PECVD or reactive sputtering, onto the active stack, wherein after application of a first organic layer a metal layer is applied to the first organic layer before an inorganic layer is applied thereto utilizing PECVD or reactive sputtering, wherein the metal layer is applied utilizing a deposition technique that causes relatively little radiation, wherein the metal layer protects the organic layer against radiation upon a subsequent PECVD or reactive sputtering process step for applying an inorganic layer. The invention also relates to an organic device manufactured with such a method.
摘要翻译：一种将薄膜封装层组件应用于有机器件的方法，该方法包括：具有活性叠层的衬底，然后提供薄膜封装层组件，用于基本上从氧气和湿气中筛选活性组合物，其中所述薄膜封装层组件通过将施加有PECVD或反应性溅射的至少一种有机和至少一种无机层施加到所述活性叠层上而形成，其中在施加第一有机层之后，将金属层施加到所述第一使用PECVD或反应性溅射将无机层施加到其之前的有机层，其中使用引起相对较少辐射的沉积技术施加金属层，其中金属层在随后的PECVD或反应性溅射工艺步骤中保护有机层免受辐射用于施加无机层。本发明还涉及使用这种方法制造的有机器件。

7. 发明授权

US08869692B2 Transport table and method for the use thereof 有权
标题翻译：运输工具及其使用方法
公开(公告)号：US08869692B2
公开(公告)日：2014-10-28
申请号：US12997505
申请日：2009-06-11
申请人： Cornelius Adrianus Henricus Van Der Avoort , Robbert Hilmar Backer , Cornelius Petrus Du Pau , Marcel Peeren
发明人： Cornelius Adrianus Henricus Van Der Avoort , Robbert Hilmar Backer , Cornelius Petrus Du Pau , Marcel Peeren
IPC分类号： B05C17/06 , B05C17/08 , B41L13/00 , B65G35/04
CPC分类号： B65G35/04
摘要： A transport table, comprising a transport web; an unwinding roller for unwinding the transport web therefrom; a first return element; a second return element; a winding roller for winding thereon the unwound transport web; a first frame with which the first and the second return element are connected; and a second frame with which the unwinding roller and the winding roller are rotatably connected, wherein the unwinding roller, the winding roller and the return elements together are designed for stretching the transport web such that between the first and the second return element a surface of the transport web is available as transport surface, and wherein the second frame is movable along a path substantially parallel to said transport surface with respect to the first frame. The invention also discloses a method for the use of the transport table.
摘要翻译：一种运输台，包括运输网; 用于从其中展开传送网的展开辊; 第一个返回元素; 第二个返回元素; 卷绕辊，用于在其上卷绕未卷绕的输送幅材; 与第一和第二返回元件连接的第一框架; 以及第二框架，所述展开辊和所述卷绕辊可旋转地连接在其上，其中所述展开辊，所述卷绕辊和所述返回元件在一起被设计成用于拉伸所述运送卷筒纸，使得在所述第一和第二返回元件之间的表面输送带可用作输送表面，并且其中第二框架可相对于第一框架沿着基本上平行于所述输送表面的路径移动。本发明还公开了一种使用传送台的方法。

8. 发明授权

US08609556B2 Thin film deposition apparatus with an expanding thermal plasma source and method for depositing a thin film using the same 有权
标题翻译：具有扩展的热等离子体源的薄膜沉积装置和使用其沉积薄膜的方法
公开(公告)号：US08609556B2
公开(公告)日：2013-12-17
申请号：US13496820
申请日：2010-09-17
申请人： Björn Van Gerwen , Roland Cornelis Maria Bosch , Franciscus Cornelius Dings
发明人： Björn Van Gerwen , Roland Cornelis Maria Bosch , Franciscus Cornelius Dings
IPC分类号： H01L21/31
CPC分类号： C23C16/513 , C23C16/54
摘要： Assembly and method for depositing a thin film including: providing an expanding thermal plasma plume, including at least one chemical component to be deposited; designating a first and a second deposition zone within the plasma plume, such that the first and second deposition zones have a mutually different relative content of the chemical component; providing a substrate, and transporting said substrate through the plasma plume along a substrate transport path having a substrate transport path direction; and providing a mask that is at least partly disposed in the plasma plume and that shields a portion of the substrate transport path from being deposited on, wherein said shielded portion of the substrate transport path extends in the direction of the substrate transport path and bridges at least the first deposition zone, while it starts or terminates in the second deposition zone.
摘要翻译：一种用于沉积薄膜的组装和方法，包括：提供膨胀的热等离子体羽流，其包括至少一种待沉积的化学组分; 指定等离子体羽流内的第一和第二沉积区，使得第一和第二沉积区具有相互不同的化学组分的相对含量; 提供基板，以及沿着具有基板输送路径方向的基板输送路径输送所述基板通过等离子体羽流; 并且提供至少部分地布置在等离子体羽流中并且屏蔽衬底传送路径的一部分的掩模，其中衬底传送路径的所述屏蔽部分沿着衬底传送路径的方向延伸并桥接在至少第一沉积区，而其在第二沉积区中开始或终止。

9. 发明授权

US08222635B2 Method for manufacturing an organic light emitting device as well as such a device 有权
标题翻译：制造有机发光装置的方法以及这种装置
公开(公告)号：US08222635B2
公开(公告)日：2012-07-17
申请号：US12532044
申请日：2007-03-20
申请人： Bas Jan Emile Van Rens , Ruediger Lange
发明人： Bas Jan Emile Van Rens , Ruediger Lange
IPC分类号： H01L35/24
CPC分类号： H01L27/3288 , H01L51/5253 , H01L51/5256
摘要： An electronic device includes at least a substrate, an area on the substrate which has to be protected against moisture and/or oxygen, at least one contact, and an encapsulation layer system including at least a first inorganic layer. The at least one contact extends from the sealed area to a part of the substrate not sealed by the encapsulation layer system. The contact includes a shunt, which is an interruption bridged by an electrically conductive bridge. The first inorganic layer of the encapsulation system is applied so that it is in direct physical contact with the electrically conductive bridge. The bridge has a structure and shape which can be sealingly covered by the encapsulation layer system and is made from a material through which no moisture and/or oxygen can penetrate.
摘要翻译：一种电子器件至少包括一个衬底，该衬底上必须防止湿气和/或氧气的区域，至少一个触点，以及包括至少第一无机层的封装层系统。所述至少一个接触件从所述密封区域延伸到所述衬底的未被所述封装层系统密封的部分。触点包括一个分流器，它是由导电桥接桥接的中断。应用封装系统的第一无机层，使其与导电桥直接物理接触。该桥具有可被密封层系统密封地覆盖的结构和形状，并且由不会有水分和/或氧气穿透的材料制成。

10. 发明申请

US20100236618A1 METHOD FOR MANUFACTURING A PHOTOVOLTAIC CELL AND A PHOTOVOLTAIC CELL OBTAINED WITH SUCH A METHOD 审中-公开
标题翻译：制造光伏电池的方法和采用这种方法获得的光伏电池
公开(公告)号：US20100236618A1
公开(公告)日：2010-09-23
申请号：US12682439
申请日：2008-10-13
申请人： Martin Dinant Bijker
发明人： Martin Dinant Bijker
IPC分类号： H01L31/0232 , H01L31/18
CPC分类号： H01L31/022425 , H01L31/02327 , H01L31/056 , Y02E10/52
摘要： A method for manufacturing a photovoltaic cell, such as a solar cell is disclosed. The method includes: providing a silicon substrate; applying to a side of the silicon substrate, a first layer of a metal with a relatively high optical reflectance, such as a layer of silver; applying to the first layer, a second layer of a metal with a relatively high electrical conductivity coefficient, such as a layer of aluminum or an Al alloy; and then firing the substrate having the first and second layers in order to obtain an alloy of the metals of the first and second layers and the silicon, wherein the alloy formed comprises a maximum amount of metal dissolved in the silicon in amounts up to the eutectic point of the alloy. In one implementation, the alloy is substantially an n-type Si—Al—Ag alloy. Thus, an improved Back Surface Field is formed in the substrate. The invention further relates to a photo voltaic cell obtained with the aid of such method.
摘要翻译：公开了太阳能电池等太阳能电池的制造方法。该方法包括：提供硅衬底; 施加到硅衬底的一侧，具有较高光学反射率的第一金属层，例如银层; 向第一层施加具有较高导电系数的第二层金属，例如铝或Al合金层; 然后焙烧具有第一层和第二层的基板，以获得第一和第二层和硅的金属的合金，其中形成的合金包含最高量溶解在硅中的金属，直到共晶体点的合金。在一种实施方案中，合金基本上是n型Si-Al-Ag合金。因此，在衬底中形成改进的背面场。本发明还涉及借助于这种方法获得的光电池。

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