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    • 3. 发明授权
    • Cascade source and a method for controlling the cascade source
    • 级联源和控制级联源的方法
    • US07872207B2
    • 2011-01-18
    • US10557043
    • 2004-05-19
    • Martin D. BijkerLeonardus P. M. ClijsenFranciscus C. DingsRemco L. J. R. Pennings
    • Martin D. BijkerLeonardus P. M. ClijsenFranciscus C. DingsRemco L. J. R. Pennings
    • B23K10/00
    • H05H1/34H05H2001/3452
    • A cascade source includes a cathode housing, a number of cascade plates insulated from each other and stacked on top of each other which together bound at least one plasma channel, and an anode plate provided with an outflow opening connecting to the plasma channel. One cathode is provided per plasma channel, which cathode includes an electrode which is adjustable relative to the cathode housing in the direction of the plasma channel. The clamp may be of the collet chuck type. At least a part of the housing of the source may be substantially transparent. A method for controlling the cascade source in use includes monitoring the electromagnetic radiation of the plasma through the substantially transparent housing part, and, dependent on the monitored radiation, controlling the plasma forming process in the source by variation of the gas supply, or variation of the potential difference between the cathode and the anode or a combination thereof.
    • 级联源包括阴极壳体,多个级联板彼此绝缘并堆叠在彼此的顶部上,其一起结合至少一个等离子体通道;以及阳极板,阳极板设置有连接到等离子体通道的流出开口。 每个等离子体通道提供一个阴极,该阴极包括可在等离子体通道的方向上相对于阴极壳体调节的电极。 夹具可以是夹头卡盘类型。 源的壳体的至少一部分可以是基本透明的。 用于控制使用中的级联源的方法包括通过基本上透明的壳体部分来监测等离子体的电磁辐射,并且根据所监测的辐射,通过气体供应的变化或变化来控制源中的等离子体形成过程 阴极和阳极之间的电位差或其组合。