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    • 2. 发明授权
    • Method and arrangement for controlling the electrical relationships of a
current-intensive glow discharge
    • 用于控制电流密集辉光放电的电气关系的方法和装置
    • US4193070A
    • 1980-03-11
    • US769163
    • 1977-02-16
    • Werner Oppel
    • Werner Oppel
    • C23C8/36H01J37/32H02H1/00H02H3/10H02H7/00H05B7/16G08B21/00
    • H01J37/32018C23C8/36H01J37/32935H02H1/0015H02H3/10H05B7/16H02H7/003
    • In a glow-discharge workpiece-treating system's control system, the existence of a direct short-circuit between workpiece and glow-discharge treatment chamber is ascertained. This is done by comparing a voltage-indicating signal and a current-indicating signal against respective threshold levels, and generating a short-circuit signal when the voltage-indicating signal falls below its threshold level and the current-indicating signal exceeds its threshold level. Preferably, the threshold level for the voltage-indicating signal, although lower than the arc-discharge voltage of the system, is higher than the glow-discharge voltage of the system. When used in combination with conventional arc-discharge-responsive switching action, operative for briefly interrupting and then resuming operation in response to each detected arc discharge during normal operation, this can serve to differentiate between arc discharge, which although undesirable is a part of normal operation, and, on the other hand, actual galvanic short circuiting, for which brief interruption of operation constitutes no remedy at all. In a preferred embodiment, the short-circuit detection involves automatic detection of whether the potential difference between the workpiece and the treatment chamber does or does not exceed a threshold level within a predetermined time interval, corresponding to one or several normal-operation brief interruptions of operation.
    • 在辉光放电工件处理系统的控制系统中,确定工件与辉光放电处理室之间存在直接短路。 这通过将电压指示信号和电流指示信号与相应的阈值电平进行比较来完成,并且当电压指示信号低于其阈值电平并且电流指示信号超过其阈值电平时产生短路信号。 优选地,电压指示信号的阈值电平虽然低于系统的放电电压,但高于系统的辉光放电电压。 当与常规的放电响应开关动作结合使用时,可以在正常操作期间对每个检测到的电弧放电进行短暂的中断和然后恢复运行,这可以用于区分电弧放电,尽管这是不正常的 另一方面,实际的电气短路,根本不构成任何补救。 在优选实施例中,短路检测涉及自动检测工件和处理室之间的电位差是否在预定的时间间隔内达到或不超过阈值水平,对应于一个或几个正常操作的短暂中断 操作。