专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US6084675A Adjustable beam alignment compensator/retarder with application in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：可调光束对准补偿器/延迟器，适用于分光椭偏仪和偏光计系统
公开(公告)号：US6084675A
公开(公告)日：2000-07-04
申请号：US246888
申请日：1999-02-08
申请人： Craig M. Herzinger , Blaine D. Johs
发明人： Craig M. Herzinger , Blaine D. Johs
IPC分类号： G01J3/28 , G01J4/00 , G01N21/21
CPC分类号： G01J3/447 , G01J4/00 , G01N21/211 , G01J2003/2866
摘要： Disclosed is a compensator/retarder system which allows adjustment to eliminate introduction of significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when the present invention retarder system is caused to continuously rotate in a rotating compensator ellipsometer system. Also disclosed is a method of calibration of an ellipsometer/polarimeter system which includes a present invention compensator/retarder system.
摘要翻译：公开了一种补偿器/延迟器系统，其允许调节以消除引起与其相互作用的电磁辐射束的传播方向上的显着偏差和/或位移，即使本发明的延迟器系统在旋转中连续旋转补偿椭圆仪系统。还公开了一种校准椭偏仪/偏振计系统的方法，其包括本发明的补偿器/延迟器系统。

2. 发明授权

US5969818A Beam folding optics system and method of use with application in ellipsometry and polarimetry 有权
标题翻译：光束折射光学系统及其应用于椭偏仪和偏光镜的方法
公开(公告)号：US5969818A
公开(公告)日：1999-10-19
申请号：US144764
申请日：1998-08-31
申请人： Blaine D. Johs , Ping He
发明人： Blaine D. Johs , Ping He
IPC分类号： G01J3/14 , G01J3/447 , G01J4/00
CPC分类号： G01J3/14 , G01J3/447
摘要： Disclosed is an electromagnetic beam directing system and method which enables changing the direction of propagation of a beam of electromagnetic radiation without significantly changing the phase angle between orthogonal components therein. Two pairs of mirrors are oriented to form two orthogonally related planes such that phase shift entered to an electromagnetic beam by interaction with the first pair of mirrors is canceled by interaction with the second pair.
摘要翻译：公开了一种电磁射束引导系统和方法，其能够改变电磁辐射束的传播方向，而不会显着改变其中的正交分量之间的相位角。两对反射镜被定向以形成两个正交相关平面，使得通过与第二对反射镜相互作用而进入电磁波的相位与第二对的相互作用被抵消。

3. 发明授权

US5956145A System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems 失效
公开(公告)号：US5956145A
公开(公告)日：1999-09-21
申请号：US17423
申请日：1998-02-02
申请人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam , Stephen P. Ducharme
发明人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam , Stephen P. Ducharme
IPC分类号： G01J3/28 , G01J4/00 , G01N21/21
CPC分类号： G01N21/211 , G01J4/00 , G01J2003/2866
摘要： Disclosed is a system and method for controlling polarization state determining parameters of a polarized beam of light in an ellipsometer or polarimeter and the like system, (eg. a modulation element ellipsometer system), so that they are in ranges wherein the sensitivity, (of a sample system characterizing PSI and DELTA value monitoring detector used to measure changes in said polarization state resulting from interaction with a "composite sample system," comprised of a sample system per se. and a beam polarization state determining variable retarder, to noise and measurement errors etc. therein), is reduced. The present invention allows determining sample system per se. characterizing PSI and DELTA values, from Composite Sample System characterizing PSI and DELTA values, by compensating for the presence of present invention components, (VR1) and/or VR2), added to an ellipsometer or polarimeter and the like system. The present invention also improves the ability of an ellipsometer or polarimeter and the like system fitted with present invention components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterizing PSI and DELTA determining data values, wherein a sample system per se. investigating polarized beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. Practice of the present invention also allows determination of the "Handedness" of a polarized beam of light, and of sample system Jones or Mueller Matrix component values. As well, the present invention provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter system.

4. 发明授权

US10048059B1 Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of material deposited at or etched from a working electrode that preferrably comprises non-normal oriented nanofibers 有权
公开(公告)号：US10048059B1
公开(公告)日：2018-08-14
申请号：US15330127
申请日：2016-08-11
申请人： Mathias M. Schubert , Tino Hofmann , John A. Woollam , Rebecca Y. Lai
发明人： Mathias M. Schubert , Tino Hofmann , John A. Woollam , Rebecca Y. Lai
IPC分类号： G01B11/06 , G01N27/42 , G01N27/27 , G01N21/21 , C25B11/04 , C25B3/04 , G01J4/00
摘要： Disclosed are systems and methods that enable determination of uncorrelated thickness of a working electrode and surface region optical constants in settings involving electrochemical processing at a working electrodes in a Piezoelectric Balance system, by simultaneous application of an Ellipsometer system, the working electrode optionally having a multiplicity of nanofibers that are oriented non-normally to a surface of said working electrode. Further disclosed is, simultaneous with said determinations, the monitoring of electrochemical processes at a piezoelectric balance working electrode driven by electrical energy applied between said working electrode and counter electrode.

5. 发明授权

US10026167B1 Method of obtaining micrographs of transparent or semi-transparent specimens using anisotropic contrast 有权
公开(公告)号：US10026167B1
公开(公告)日：2018-07-17
申请号：US14757232
申请日：2015-12-09
申请人： J. A. WOOLLAM CO., INC. , BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA
发明人： Tino Hofmann , Mathias M. Schubert , Tadas Kasputis , Angela K. Pannier , Craig M. Herzinger , John A. Woollam
IPC分类号： G06T7/00 , G01J4/00 , G01N21/23 , G01N21/21 , G06K9/46 , G01J4/04
摘要： Anisotropic contrast methodology in combination with use of sample investigating polarized electromagnetic radiation to provide Jones or Mueller Matrix imaging data corresponding to areas on samples.

6. 发明授权

US08169611B2 Terahertz-infrared ellipsometer system, and method of use 有权
公开(公告)号：US08169611B2
公开(公告)日：2012-05-01
申请号：US12456791
申请日：2009-06-23
申请人： Craig M. Herzinger , Matias M. Schubert , Tino Hofmann , Martin M. Liphardt , John A. Woollam
发明人： Craig M. Herzinger , Matias M. Schubert , Tino Hofmann , Martin M. Liphardt , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J4/04 , G01J5/20 , G01J5/42 , G01N21/3581 , G01N2021/3595
摘要： The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.

7. 发明授权

US07619752B2 Sample orientation system and method 有权
标题翻译：样本取向系统和方法
公开(公告)号：US07619752B2
公开(公告)日：2009-11-17
申请号：US11980262
申请日：2007-10-30
申请人： Martin M. Liphardt , Christopher A. Goeden
发明人： Martin M. Liphardt , Christopher A. Goeden
IPC分类号： G01B11/14
CPC分类号： G01N21/211 , G01N21/47 , G01N21/55 , G01N2201/02
摘要： System and method for orienting the tilt and vertical position of samples in ellipsometer and the like systems.
摘要翻译：用于定位椭偏仪等样品的倾斜和垂直位置的系统和方法。

8. 发明授权

US07483148B1 Ellipsometric investigation of very thin films 有权
标题翻译：非常薄膜的椭圆测量研究
公开(公告)号：US07483148B1
公开(公告)日：2009-01-27
申请号：US11724849
申请日：2007-03-16
申请人： Blaine D. Johs
发明人： Blaine D. Johs
IPC分类号： G01B11/02 , G01J4/00
CPC分类号： G01N21/211 , G01N2021/213
摘要： Use of spectroscopic data obtained by investigation of a witness sample having a relatively thick dielectric on a surface thereof during deposition of a thin film onto the witness sample and onto a process sample having no, or a relatively thin dielectric on its surface, in characterizing thin film deposited onto the process sample.
摘要翻译：在将薄膜沉积到可见样品上并在其表面上没有或相对薄的电介质的工艺样品上，在表面上利用通过研究具有相对厚的电介质的见证样品获得的光谱数据，薄膜沉积在工艺样品上。

9. 发明授权

US6084674A Parallelogram shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭偏仪和偏振计系统的平行四边形光学延迟器元件
公开(公告)号：US6084674A
公开(公告)日：2000-07-04
申请号：US225118
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G02B5/30 , G01J4/00
CPC分类号： G02B5/3083 , G01J2003/2866
摘要： A retarder system and method of its use in ellipsometers and polarimeters are disclosed. The retarder system is a parallelogram shaped element which, as viewed in side elevation, has top and bottom sides which are parallel to one another. The retarder system also has right and left sides which are parallel to one another, with both the right and left sides being oriented at an angle to the top and bottom sides. The retarder system is made of a material with an index of refraction greater than that of a surrounding ambient. In use an input beam of electromagnetic radiation is caused to enter the right or left side of the retarder system, is diffracted inside the retarder system, and follows a locus which causes it to essentially totally internally reflect from internal interfaces of both the top and bottom sides, then emerge from the retarder system at the opposite, left or right respectively, side in a direction which is essentially undeviated and undisplaced from the locus of the input beam of electromagnetic radiation, even when the retarder system is caused to rotate about an axis coincident with the locus of the electromagentic beam.
摘要翻译：公开了一种用于椭偏仪和偏振计的延迟器系统及其方法。延迟器系统是平行四边形元件，从侧视图看，具有彼此平行的顶侧和底侧。缓速器系统还具有彼此平行的左右两侧，左右两侧与顶侧和底侧成一定角度。缓速器系统由折射率大于周围环境的材料制成。在使用中，导致电磁辐射的输入束进入延迟器系统的右侧或左侧，在延迟器系统内部衍射，并且跟随一个轨迹，使得其基本上完全内部从顶部和底部的内部接口反射侧面，然后即使当延迟器系统绕轴线旋转时，从相对的左侧或右侧的延迟器系统以从电磁辐射的输入光束的轨迹基本上未变形和未放置的方向出现与电磁光束的轨迹一致。

10. 发明授权

US09933357B1 Elliposometer system with polarization state generator and polarization state analyzer in environmental chamber 有权
公开(公告)号：US09933357B1
公开(公告)日：2018-04-03
申请号：US15530584
申请日：2017-02-03
申请人： J.A. WOOLLAM CO., INC.
发明人： Ping He , Gregory K. Pribil , Martin M. Liphardt
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01J3/0286 , G01J4/04 , G01N2201/0227 , G01N2201/023 , G01N2201/084
摘要： An ellipsometer system with polarization state generator and polarization state analyzer components inside at least one internal environment supporting encasement, said at least one encasement being present inside said environmental chamber.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式