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    • 3. 发明授权
    • Electron beam apparatus
    • 电子束装置
    • US07960697B2
    • 2011-06-14
    • US12257304
    • 2008-10-23
    • Zhongwei ChenWeiming RenJoe WangXuedong LiuJuying DouFumin HeFeng CaoYan RenXiaoli GuoWei HeQingpo Xi
    • Zhongwei ChenWeiming RenJoe WangXuedong LiuJuying DouFumin HeFeng CaoYan RenXiaoli GuoWei HeQingpo Xi
    • H01J49/44
    • H01J37/073H01J37/244H01J37/28H01J2237/06341H01J2237/24592
    • The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.
    • 本发明涉及采用扫描电子显微镜进行样品检查和缺陷检查的带电粒子束装置。 本发明提供了通过利用具有大的尖端半径的场致发射阴极尖端来提高成像分辨率的解决方案,在阴极和阳极之间的地电位上施加大的加速电压,将光束极限孔定位在聚光透镜之前,利用聚光透镜激发电流 优化图像分辨率,应用高管偏压缩短电子行进时间,采用和修正SORIL物镜,以改善大视野和电漂移下的像差,并减少水冷物镜在操作材料分析时的紧迫性。 本发明提供了通过利用SORIL的快速扫描能力并在样品和检测器之间提供大的电压差来提高产量的解决方案。
    • 4. 发明授权
    • High efficiency scintillator detector for charged particle detection
    • 用于带电粒子检测的高效闪烁体检测器
    • US08829451B2
    • 2014-09-09
    • US13495102
    • 2012-06-13
    • Zhibin WangWei HeFumin He
    • Zhibin WangWei HeFumin He
    • G01T1/20
    • G01T1/2002H01J37/244H01J37/28H01J2237/2443
    • An assembly for a charged particle detection device of high detection efficiency is described. The assembly comprising a metal grid for applying attractive potential to lure charged particles; a scintillator disc to absorb the energy from impinging charged particle and reemit the energy in form of light or photons; a light guide to transmit light or photons; and a photomultiplier tube (PMT) cohere with the end of light guide to receive light or photons from light guide and convert it into current signal. A light guide with a bullet-head-shaped front portion ensures total reflection of light propagating within the light guide. A frustum-cone-shaped scintillator disc releases the light that originally trapped in the scintillator disc due to the shape of scintillator.
    • 描述了一种检测效率高的带电粒子检测装置的组件。 所述组件包括金属网格,用于施加诱发电位以诱使带电粒子; 闪烁体盘,以吸收来自撞击带电粒子的能量并以光或光子的形式再次产生能量; 用于传输光或光子的光导; 和光电倍增管(PMT)与光导的端部相连,以从光导中接收光或光子并将其转换为电流信号。 具有子弹头前部的光导确保了在光导内传播的光的全反射。 锥形锥形闪烁体盘由于闪烁体的形状而释放原先被俘获在闪烁体盘中的光。
    • 5. 发明申请
    • HIGH EFFICIENCY SCINTILLATOR DETECTOR FOR CHARGED PARTICLE DETECTION
    • 用于充电颗粒检测的高效扫描仪检测器
    • US20130334430A1
    • 2013-12-19
    • US13495102
    • 2012-06-13
    • Zhibin WangWei HeFumin He
    • Zhibin WangWei HeFumin He
    • G01T1/20
    • G01T1/2002H01J37/244H01J37/28H01J2237/2443
    • An assembly for a charged particle detection device of high detection efficiency is described. The assembly comprising a metal grid for applying attractive potential to lure charged particles; a scintillator disc to absorb the energy from impinging charged particle and reemit the energy in form of light or photons; a light guide to transmit light or photons; and a photomultiplier tube (PMT) cohere with the end of light guide to receive light or photons from light guide and convert it into current signal. A light guide with a bullet-head-shaped front portion ensures total reflection of light propagating within the light guide. A frustum-cone-shaped scintillator disc releases the light that originally trapped in the scintillator disc due to the shape of scintillator.
    • 描述了一种检测效率高的带电粒子检测装置的组件。 所述组件包括金属网格,用于施加诱发电位以诱使带电粒子; 闪烁体盘,以吸收来自撞击带电粒子的能量并以光或光子的形式再次产生能量; 用于传输光或光子的光导; 和光电倍增管(PMT)与光导的端部相连,以从光导中接收光或光子并将其转换为电流信号。 具有子弹头前部的光导确保了在光导内传播的光的全反射。 锥形锥形闪烁体盘由于闪烁体的形状而释放原先被俘获在闪烁体盘中的光。