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    • 4. 发明申请
    • METHOD, SYSTEM, AND COMPUTER PROGRAM PRODCUT FOR LITHOGRAPHY SIMULATION IN ELECTRONIC DESIGN AUTOMATION
    • 电子设计自动化中的图形仿真的方法,系统和计算机程序
    • US20100169060A1
    • 2010-07-01
    • US12347926
    • 2008-12-31
    • Zhenhai Zhu
    • Zhenhai Zhu
    • G06F17/10G06F17/50
    • G03F7/705
    • Disclosed are improved methods, systems, and computer program products for lithographic simulation of an electronic circuit design. Various embodiments of the present invention identifies a mask pattern, performs offline precharacterization for the mask pattern by solving an equation which models a solution for the mask pattern and an interaction between the mask pattern and one or more effects, performs online evaluation based at least upon a parameterized form of the equation, determines a field around the mask pattern based at least upon the act of performing the online evaluation, and stores a result of the act of determining an electromagnetic field around the mask pattern in a tangible computer readable or usable medium
    • 公开了用于电子电路设计的光刻仿真的改进的方法,系统和计算机程序产品。 本发明的各种实施例识别掩模图案,通过求解用于掩模图案的解的模型和掩模图案与一个或多个效果之间的相互作用的等式来对掩模图案执行离线预特性,至少基于 方程式的参数化形式至少基于执行在线评估的动作来确定掩模图案周围的场,并且将在屏蔽图案周围确定电磁场的动作的结果存储在有形计算机可读或可用介质中
    • 5. 发明授权
    • Method, system, and computer program product for lithography simulation in electronic design automation
    • 电子设计自动化中光刻仿真的方法,系统和计算机程序产品
    • US08209161B2
    • 2012-06-26
    • US12347926
    • 2008-12-31
    • Zhenhai Zhu
    • Zhenhai Zhu
    • G06F17/50
    • G03F7/705
    • Disclosed are improved methods, systems, and computer program products for lithographic simulation of an electronic circuit design. Various embodiments of the present invention identifies a mask pattern, performs offline precharacterization for the mask pattern by solving an equation which models a solution for the mask pattern and an interaction between the mask pattern and one or more effects, performs online evaluation based at least upon a parameterized form of the equation, determines a field around the mask pattern based at least upon the act of performing the online evaluation, and stores a result of the act of determining an electromagnetic field around the mask pattern in a tangible computer readable or usable medium
    • 公开了用于电子电路设计的光刻仿真的改进的方法,系统和计算机程序产品。 本发明的各种实施例识别掩模图案,通过求解用于掩模图案的解的模型和掩模图案与一个或多个效果之间的相互作用的等式来对掩模图案执行离线预特性,至少基于 方程式的参数化形式至少基于执行在线评估的动作来确定掩模图案周围的场,并且将在屏蔽图案周围确定电磁场的动作的结果存储在有形计算机可读或可用介质中