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    • 1. 发明授权
    • Thin-film electroluminescence display device
    • 薄膜电致发光显示装置
    • US5539424A
    • 1996-07-23
    • US197492
    • 1994-02-16
    • Yutaka HattoriAtsushi MizutaniNobuei ItoTadashi Hattori
    • Yutaka HattoriAtsushi MizutaniNobuei ItoTadashi Hattori
    • H05B33/12H05B33/22G09G3/30
    • H05B33/12H05B33/22
    • A thin-film EL display device of red luminescent color having high luminous intensity and high reliability is disclosed. The thin-film EL display device has a first transparent electrode, a first transparent insulating layer, a light-emitting layer of zinc sulfide (ZnS) with the addition of manganese (Mn), a red-light transmitting filter of amorphous silicon (a-Si), a second transparent insulating layer, and a second transparent electrode (second electrode), which are successively deposited one on top of another on a glass substrate. The EL display device produces red light from orange light emission from the light-emitting layer. High temperature resistance of the filter permits the insertion of the filter to a desired position during the fabrication process for the thin-film EL display device. Furthermore, since the filter characteristics of the thin-film EL display do not suffer degradation by the heat generated during the light emitting operation thereof, there is no concern for luminescent color deterioration with time.
    • 公开了一种具有高发光强度和高可靠性的红色发光颜色的薄膜EL显示装置。 薄膜EL显示装置具有第一透明电极,第一透明绝缘层,添加有锰(Mn)的硫化锌(ZnS)发光层,非晶硅的红光透射滤光片(a -Si),第二透明绝缘层和第二透明电极(第二电极),其在玻璃基板上依次彼此沉积。 EL显示装置产生来自发光层的橙色发光的红光。 过滤器的耐高温性允许在薄膜EL显示装置的制造过程中将滤光片插入所需位置。 此外,由于薄膜EL显示器的滤光器特性不会因其在发光操作期间产生的热而劣化,所以不关心发光颜色随时间劣化。
    • 7. 发明授权
    • Method and apparatus for fabricating electroluminescent device
    • 用于制造电致发光器件的方法和装置
    • US06004618A
    • 1999-12-21
    • US841334
    • 1997-04-30
    • Atsushi MizutaniMasayuki KatayamaNobuei ItoTadashi Hattori
    • Atsushi MizutaniMasayuki KatayamaNobuei ItoTadashi Hattori
    • C23C16/30C23C16/44C23C16/455H05B33/10H05B33/14B05D5/12C23C16/00
    • C23C16/45576C23C16/305H05B33/10
    • Fabrication of an electroluminescent device having a high-quality luminescent layer is disclosed. The device emits intense blue light. A first electrode layer, a first dielectric layer, the luminescent layer, a second dielectric layer, and a second electrode layer are successively formed on a glass substrate. At least the exit side of the device is made from an optically transparent material. A first gaseous source material of a group II element belonging to group II of the periodic table, a second gaseous source material of a group VIB element belonging to group VIB, and a third gaseous source material of an element forming the luminescent center of the luminescent layer are supplied into a reaction furnace through first, second, and third gas supply tubes, respectively, and caused to react with each other. Thus, the luminescent layer is formed by chemical vapor deposition. The first material acts as a base material from which the luminescent layer is formed. The first tube for the first material is laid in the center of the furnace. The third tube for the third material forming the luminescent center is laid around the first gas supply tube. The second tube is laid around the third tube.
    • 公开了具有高品质发光层的电致发光器件的制造。 该装置发出强烈的蓝光。 在玻璃基板上依次形成第一电极层,第一电介质层,发光层,第二电介质层和第二电极层。 至少装置的出口侧由光学透明材料制成。 属于元素周期表II族的第II族元素的第一气态源材料,属于VIB族的VIB族元素的第二气态源材料和形成发光体的发光中心的元素的第三气态源材料 层分别通过第一,第二和第三气体供给管供给到反应炉中,并使其彼此反应。 因此,通过化学气相沉积形成发光层。 第一材料作为形成发光层的基材。 用于第一种材料的第一管被放置在炉的中心。 形成发光中心的第三材料的第三管被放置在第一气体供应管的周围。 第二个管被放置在第三根管子周围。
    • 8. 发明授权
    • Thin-film El display panel having uniform display characteristics
    • 具有均匀显示特性的薄膜El显示面板
    • US06262531B1
    • 2001-07-17
    • US09187454
    • 1998-11-05
    • Kazuhiro InoguchiNobuei ItoTadashi HattoriYutaka HattoriMasahiko Osada
    • Kazuhiro InoguchiNobuei ItoTadashi HattoriYutaka HattoriMasahiko Osada
    • H01J162
    • H05B33/06H05B33/04H05B33/12H05B33/26
    • A thin-film EL display panel which has excellent packageability, high reliability and stable performance characteristics, and which can prevent nonuniformity of brightness and color from occurring and a fabrication method thereof are provided. In the above thin-film EL display panel, two thin-film EL elements 1 and 2 formed by sequentially laminating first electrodes 12 and 22, first insulating layers, luminescent layers, second insulating layers and second electrodes 16 and 26 respectively on glass substrates 11 and 21 are laminated into position and connecting terminal portions 12a, 22a, 16a and 26a for connecting the first electrodes 12 and 22 and second electrodes 16 and 26 are formed on the edge portions of the substrates 11 and 21 of the thin-film EL elements 1 and 2. connecting pad portions 17 and 18 which correspond respectively to the connecting terminal portions 22a and 26a of the thin-film EL element 2 are provided on the edge portions on the substrate of the thin-film EL element 1, the connecting pad portions are connected to the connecting terminal portions of the other thin-film EL element via conductive coupling sections 19 and the connecting pad portions and the connecting terminal portions to which lead wires are connected are provided on the edge portion of one substrate at a position where both substrates will not be laminated.
    • 提供了具有优异的可封装性,高可靠性和稳定的性能特性的薄膜EL显示面板,并且可以防止发生亮度和颜色的不均匀性及其制造方法。 在上述薄膜EL显示面板中,通过将玻璃基板11上的第一电极12和22,第一绝缘层,发光层,第二绝缘层和第二电极16和26依次层叠而形成的两个薄膜EL元件1和2 和21层压到位置,并且用于连接第一电极12和22的连接端子部分12a,22a,16a和26a和第二电极16和26形成在薄膜EL元件的基板11和21的边缘部分上 在薄膜EL元件1的基板上的边缘部分设置有与薄膜EL元件2的连接端子部分22a和26a相对应的连接焊盘部分17和18,连接焊盘 部分经由导电耦合部分19和连接焊盘部分和连接端子部分连接到另一薄膜EL元件的连接端子部分,引线 连接在一个基板的边缘部分上,两个基板将不被层压的位置。
    • 9. 发明授权
    • Dry etching method and manufacturing method of manufacturing EL element
using same
    • 干蚀刻方法和使用其制造EL元件的制造方法
    • US5888410A
    • 1999-03-30
    • US825579
    • 1997-03-31
    • Hajime IshiharaKazuhiro InoguchiYutaka HattoriNobuei ItoTadashi Hattori
    • Hajime IshiharaKazuhiro InoguchiYutaka HattoriNobuei ItoTadashi Hattori
    • C23F4/00H01L21/302H01L21/3065H01L21/461H01L21/465H05B33/10H05B33/12H05B33/14B44C1/22
    • H05B33/10H01L21/465
    • A dry etching method performing dry etching of a material containing zinc forms and patterns a resist on the material to be etched, and etches the material using an etching gas which is a mixed gas of methane gas and an inert gas. A dry etching method that dry etches a material containing zinc etches the material using an etching gas that consists only of methane gas, an inert gas, and hydrogen gas alone. Another dry etching method that dry etches a material containing zinc introduces an etching gas that contains methane gas, an inert gas, and hydrogen gas into a dry etching device, in which the flow rate of the hydrogen gas is set such that it is equal to or greater than the value at which the amount of dissociated hydrogen becomes saturated, and etches the material using the etching gas. An EL element manufacturing method forms a first luminescent material containing zinc in its composition on a first insulated layer, forms a first resist that has a first pattern on the first luminescent material, dry etches the first luminescent material through the first resist, thereby forming the first luminescent layer; forms a second luminescent material having zinc in its composition on the first luminescent layer, forms a second resist on the second luminescent material, and dry etches the second luminescent material through the second resist.
    • 对含有锌的材料进行干蚀刻的干式蚀刻方法形成并在待蚀刻材料上形成抗蚀剂,并使用作为甲烷气体和惰性气体的混合气体的蚀刻气体蚀刻材料。 使用仅由甲烷气体,惰性气体和氢气单独构成的蚀刻气体来干燥蚀刻含锌材料的干蚀刻方法蚀刻材料。 对含有锌的材料进行干蚀刻的另一种干蚀刻方法将含有甲烷气体,惰性气体和氢气的蚀刻气体引入到干法蚀刻装置中,其中氢气的流量设定为等于 或大于解离氢的量饱和的值,并且使用蚀刻气体蚀刻该材料。 EL元件制造方法在第一绝缘层上形成含有锌的第一发光材料,在第一发光材料上形成具有第一图案的第一抗蚀剂,通过第一抗蚀剂干燥蚀刻第一发光材料,从而形成 第一发光层; 在第一发光层上形成具有锌组成的第二发光材料,在第二发光材料上形成第二抗蚀剂,并通过第二抗蚀剂干蚀刻第二发光材料。