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1. 发明申请

US20090317744A1 POLYMER AND CHEMICALLY AMPLIFIED RESIST COMPOSITION COMPRISING THE SAME 有权
标题翻译：聚合物和化学稳定化合物包括它们
公开(公告)号：US20090317744A1
公开(公告)日：2009-12-24
申请号：US12467683
申请日：2009-05-18
申请人： Yusuke FUJI , Mitsuhiro Hata
发明人： Yusuke FUJI , Mitsuhiro Hata
IPC分类号： G03F7/004 , C08G63/00
CPC分类号： C08F220/28 , C08F220/18 , Y10S430/114
摘要： A polymer comprising a structural unit represented by the formula (Ia) or (Ib): wherein R1 represents a hydrogen atom etc., R2 represents a linear, branched chain or cyclic C1-C8 alkyl group, R3 represents a methyl group, n represents an integer of 0 to 14, Z1 represents a single bond etc., k represents an integer of 1 to 4, R4 and R5 each independently represents a hydrogen atom etc., and m represents an integer of 1 to 3, a structural unit represented by the formula (II): wherein R6 and R7 each independently represents a hydrogen atom etc., R8 represents a methyl group, R9 represents a hydrogen atom etc., n′ represents an integer of 0 to 12, Z2 represents a single bond etc., k′ represents an integer of 1 to 4, R21 and R22 each independently represents a hydrogen atom etc., and R23 represents a C1-C30 monovalent hydrocarbon group, and at least one structural unit selected from the group consisting of structural units represented by the formulae (IIIa), (IIIb), (IIIc), (IIId) and (IIIf) wherein R10 represents a hydrogen atom etc., R11 represents a methyl group, R12 is independently in each occurrence a carboxyl group etc., j represents an integer of 0 to 3, a represents an integer of 0 to 5, b represents an integer of 0 to 3, c represents an integer of 0 to (2j+2), Z3 represents a single bond etc., and k″ represents an integer of 1 to 4.
摘要翻译：一种包含由式（Ia）或（Ib）表示的结构单元的聚合物：其中R1表示氢原子等，R2表示直链，支链或环状的C1-C8烷基，R3表示甲基，n表示 0〜14的整数，Z1表示单键等，k表示1〜4的整数，R4和R5各自独立地表示氢原子等，m表示1〜3的整数，表示的结构单元式（II）表示：其中R6和R7各自独立地表示氢原子等，R8表示甲基，R9表示氢原子等，n'表示0〜12的整数，Z2表示单键等 k表示1〜4的整数，R 21和R 22各自独立地表示氢原子等，R 23表示碳原子数为1〜30的一价烃基，以及至少一个选自以下结构单元的结构单元：通式（IIIa），（IIIb），（IIIc），（IIId）和（IIIf））其中R 10表示氢原子等，R 11表示甲基，R 12各自独立地表示羧基等，j表示0〜3的整数，a表示0〜5的整数，b表示整数 0〜3的整数，c表示0〜（2j + 2）的整数，Z 3表示单键等，k表示1〜4的整数。

2. 发明申请

US20090264565A1 POLYMER AND CHEMICALLY AMPLIFIED RESIST COMPOSITION COMPRISING THE SAME 有权
标题翻译：聚合物和化学稳定化合物包括它们
公开(公告)号：US20090264565A1
公开(公告)日：2009-10-22
申请号：US12426038
申请日：2009-04-17
申请人： Yusuke FUJI , Mitsuhiro HATA
发明人： Yusuke FUJI , Mitsuhiro HATA
IPC分类号： C08K5/42 , C08F118/02 , C08F24/00 , C08L37/00 , C08L31/02
CPC分类号： C08F220/10 , C08F220/18 , C08F220/28 , C08F220/32
摘要： The present invention provides a polymer comprising a structural unit represented by the formula (Ia) or (Ib): wherein R1 represents a hydrogen atom etc., R2 represents a linear, branched chain or cyclic C1-C8 alkyl group, R3 represents a methyl group, n represents an integer of 0 to 14, Z1 represents a single bond etc., k represents an integer of 1 to 4, R4 and R5 each independently represents a hydrogen atom etc., and m represents an integer of 1 to 3, a structural unit represented by the formula (II): wherein R6 and R7 each independently represents a hydrogen atom etc., R8 represents a methyl group, R9 represents a hydrogen atom etc., Z2 represents a single bond etc., k′ represents an integer of 1 to 4, Z′ represents a group capable to eliminate by an action of an acid, and a structural unit represented by the formula (III): wherein R10 represents a carboxyl group etc., l′ represents an integer of 0 to 3, Z3 represents a single bond etc., and k″ represents an integer of 1 to 4.
摘要翻译：本发明提供一种包含由式（Ia）或（Ib）表示的结构单元的聚合物：其中R1表示氢原子等，R2表示直链，支链或环状的C1-C8烷基，R3表示甲基基团，n表示0〜14的整数，Z1表示单键等，k表示1〜4的整数，R4和R5各自独立地表示氢原子等，m表示1〜3的整数，由式（II）表示的结构单元：其中R6和R7各自独立地表示氢原子等，R8表示甲基，R9表示氢原子等，Z2表示单键等，k'表示 1〜4的整数，Z'表示能够通过酸的除去的基团和由式（III）表示的结构单元：其中，R 10表示羧基等，l'表示0〜 3，Z 3表示单键等，k“表示1〜4的整数。

3. 发明申请

US20090263742A1 CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION 有权
标题翻译：化学放大正电阻组合物
公开(公告)号：US20090263742A1
公开(公告)日：2009-10-22
申请号：US12425759
申请日：2009-04-17
申请人： Yusuke FUJI , Junji SHIGEMATSU , Takayuki MIYAGAWA , Nobuo ANDO , Ichiki TAKEMOTO
发明人： Yusuke FUJI , Junji SHIGEMATSU , Takayuki MIYAGAWA , Nobuo ANDO , Ichiki TAKEMOTO
IPC分类号： G03F7/00
CPC分类号： G03F7/0397 , G03F7/0045 , G03F7/0046 , G03F7/0395 , G03F7/2041 , Y10S430/108 , Y10S430/111
摘要： The present invention provides a chemically amplified resist composition comprising: a resin (A) which contains no fluorine atom and a structural unit (a1) having an acid-labile group in a side chain, a resin (B) which contains a structural unit (b2) having a fluorine-containing group in a side chain and at least one structural unit selected from the group consisting of a structural unit (b1) having an acid-labile group, a structural unit (b3) having a hydroxyl group and a structural unit (b4) having a lactone structure in a side chain, and an acid generator, wherein the content of the structural unit (b1) based on the total units of the resin (B) is less than 10 mol %.
摘要翻译：本发明提供了一种化学放大抗蚀剂组合物，其包含：不含氟原子的树脂（A）和侧链具有酸不稳定基团的结构单元（a1），含有结构单元的树脂（B） b2）和具有酸不稳定基团的结构单元（b1），具有羟基的结构单元（b3）和结构单元（b3）的至少一种结构单元，在侧链中具有含氟基团，在侧链中具有内酯结构的单元（b4）和酸产生剂，其中基于树脂（B）的总单元的结构单元（b1）的含量小于10摩尔％。

4. 发明申请

US20080274426A1 CHEMICALLY AMPLIFIED RESIST COMPOSITION 有权
标题翻译：化学稳定组分
公开(公告)号：US20080274426A1
公开(公告)日：2008-11-06
申请号：US12052189
申请日：2008-03-20
申请人： Yusuke FUJI , Yoshiyuki TAKATA
发明人： Yusuke FUJI , Yoshiyuki TAKATA
IPC分类号： G03F7/004
CPC分类号： G03F7/0397 , G03F7/0045 , G03F7/0046 , Y10S430/111 , Y10S430/122 , Y10S430/123
摘要： The present invention provides a chemically amplified resist composition comprising: (A) a resin which comprises (a) a structural unit having an acid-labile group, (b) a structural unit having at least one hydroxyl group, (c) a structural unit having at least one lactone structure, and (d) a structural unit represented by the formula (Ia) or (Ib): wherein R1 represents a hydrogen atom or a methyl group, R3 represents a methyl group, n represents an integer of 0 to 14, and Z represents a single bond or —[CH2]k—COO—, and (B) at least one acid generator.
摘要翻译：本发明提供一种化学放大抗蚀剂组合物，其包含：（A）树脂，其包含（a）具有酸不稳定基团的结构单元，（b）具有至少一个羟基的结构单元，（c）结构单元具有至少一个内酯结构，和（d）由式（Ia）或（Ib）表示的结构单元：其中R 1表示氢原子或甲基，R 3 表示甲基，n表示0〜14的整数，Z表示单键或 - [CH 2 SO 2 -COO-，和（B）至少一种酸发生剂。

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