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1. 发明申请

US20090306807A1 MULTIDIMENSIONAL PROCESS WINDOW OPTIMIZATION IN SEMICONDUCTOR MANUFACTURING 有权
标题翻译：半导体制造中的多维处理窗优化
公开(公告)号：US20090306807A1
公开(公告)日：2009-12-10
申请号：US12135522
申请日：2008-06-09
申请人： Yunsheng Song , Xu Ouyang , James P. Rice
发明人： Yunsheng Song , Xu Ouyang , James P. Rice
IPC分类号： G06F19/00
CPC分类号： H01L22/20 , H01L22/12
摘要： A method for optimizing multiple process windows in a semiconductor manufacturing process is disclosed. The message comprises performing dependent variable composition on a plurality of dependent variables. Metrology data is joined with the dependent variables, and then a partial least squares regression is performed on the joined data set to obtain a prediction equation, and a variable importance prediction for each process window in a process window set. A set of product limited yield are derived, and the process window set is adjusted, and the yields recalculated, until an optimal process window set is derived.
摘要翻译：公开了一种在半导体制造工艺中优化多个工艺窗口的方法。该消息包括在多个因变量上执行从属变量组合。计量学数据与因变量相连，然后对连接的数据集执行偏最小二乘回归，以获得预测方程，并对过程窗口集中的每个过程窗口进行可变重要度预测。导出一组产品有限收益，并调整过程窗口集合，并重新计算收益，直到导出最优过程窗口集合。

2. 发明授权

US07962234B2 Multidimensional process window optimization in semiconductor manufacturing 有权
标题翻译：半导体制造中的多维过程窗口优化
公开(公告)号：US07962234B2
公开(公告)日：2011-06-14
申请号：US12135522
申请日：2008-06-09
申请人： Yunsheng Song , Xu Ouyang , James P. Rice
发明人： Yunsheng Song , Xu Ouyang , James P. Rice
IPC分类号： G06F19/00
CPC分类号： H01L22/20 , H01L22/12
摘要： A method for optimizing multiple process windows in a semiconductor manufacturing process is disclosed. The method comprises performing dependent variable composition on a plurality of dependent variables. Metrology data is joined with the dependent variables, and then a partial least squares regression is performed on the joined data set to obtain a prediction equation, and a variable importance prediction for each process window in a process window set. A set of product limited yield are derived, and the process window, set is adjusted, and the yields recalculated, until an optimal process window set is derived.
摘要翻译：公开了一种在半导体制造工艺中优化多个工艺窗口的方法。该方法包括在多个因变量上执行因变量组合。计量学数据与因变量相连，然后对连接的数据集执行偏最小二乘回归，以获得预测方程，并对过程窗口集中的每个过程窗口进行可变重要度预测。导出一组产品有限产量，并调整过程窗口集合，并重新计算产量，直到导出最优过程窗口集合。

3. 发明申请

US20090119357A1 ADVANCED CORRELATION AND PROCESS WINDOW EVALUATION APPLICATION 审中-公开
标题翻译：先进的关联和过程窗口评估应用
公开(公告)号：US20090119357A1
公开(公告)日：2009-05-07
申请号：US11934914
申请日：2007-11-05
申请人： James P. Rice , Yunsheng Song , Yun-Yu Wang , Chienfan Yu
发明人： James P. Rice , Yunsheng Song , Yun-Yu Wang , Chienfan Yu
IPC分类号： G06F17/15
CPC分类号： G06K9/6253
摘要： A method only has the user input (or select) a data type, a report key, a dependent variable table, and/or filtering restrictions. Using this information, the method automatically locates independent variable data based on the data type and the report key. This independent variable data can be in the form of a table and comprises independent variables. The method automatically joins the dependent variable table and the independent variable data to create a joint table. Then, the method can automatically perform a statistical analysis of the joint table to find correlations between the dependent variables and the independent variables and output the correlations, without requiring the user to input or identify the independent variables.
摘要翻译：方法只有用户输入（或选择）数据类型，报告键，因变量表和/或过滤限制。使用该信息，该方法根据数据类型和报告密钥自动定位独立的变量数据。这个独立的变量数据可以是一个表格的形式，并且包括自变量。该方法自动连接因变量表和独立变量数据以创建联合表。然后，该方法可以自动执行联合表的统计分析，以找出因变量和独立变量之间的相关性，并输出相关性，而不需要用户输入或识别自变量。

4. 发明授权

US5343554A Non-linear genetic process for data encoding and for solving problems using automatically defined functions 失效
标题翻译：用于数据编码的非线性遗传过程和使用自动定义的函数来解决问题
公开(公告)号：US5343554A
公开(公告)日：1994-08-30
申请号：US881507
申请日：1992-05-11
申请人： John R. Koza , James P. Rice
发明人： John R. Koza , James P. Rice
IPC分类号： G06N3/12 , G06F15/00
CPC分类号： G06N3/126
摘要： An apparatus and method for solving problems using automatic function definitions, for solving problems using recursion and for performing data encoding. The present invention includes an apparatus and process for creating a population and then evolving that population to generate a result. When solving problems using automatic function definition, the apparatus and process initially creates a population of entities. Each of said entities has sub-entities of internally and externally invoked sub-entities. The externally invoked sub-entities are capable of having actions, invocations of sub-entities which are invoked internally, and material. Also, each sub-entity which is invoked internally is capable of including actions, invocations of internally invocable sub-entities, material provided to the externally invocable sub-entity, and material. The population is then evolved to generate a solution to the problem. When using the process to solve problems using recursion, the entities in the population are constructed in such a manner as explicitly to represent the termination predicate, the base case and the non-base case of the recursion. Each entity has access to a name denoting that entity so as allow recursive references. The population is then evolved to generate a solution to the problem. When encoding a set of data values into a procedure capable of approximating those data values, the apparatus and process initially creates a population of entities. The population is then evolved to generate a solution to the problem.
摘要翻译：一种使用自动功能定义解决问题的装置和方法，用于使用递归和执行数据编码来解决问题。本发明包括一种用于创建人口然后演变该群体以产生结果的装置和过程。当使用自动功能定义解决问题时，设备和过程最初创建了一组实体。每个所述实体具有内部和外部调用子实体的子实体。外部调用的子实体能够具有内部调用的子实体的动作，调用和材料。而且，内部调用的每个子实体都能够包括内部可调用子实体的动作，调用，提供给外部可调用子实体的材料和材料。然后逐渐演变人口以产生问题的解决方案。当使用该过程来解决使用递归的问题时，群体中的实体以明确的方式构造，以表示终止谓词，基本情况和递归的非基本情况。每个实体都可以访问一个表示该实体的名称，以便允许递归引用。然后逐渐演变人口以产生问题的解决方案。当将一组数据值编码为能够近似这些数据值的过程时，该装置和过程最初创建一组实体。然后逐渐演变人口以产生问题的解决方案。

5. 发明授权

US06751677B1 Method and apparatus for allowing a secure and transparent communication between a user device and servers of a data access network system via a firewall and a gateway 有权
标题翻译：用于经由防火墙和网关在用户设备和数据接入网络系统的服务器之间进行安全和透明的通信的方法和装置
公开(公告)号：US06751677B1
公开(公告)日：2004-06-15
申请号：US09379755
申请日：1999-08-24
申请人： Slawomir K. Ilnicki , James P. Rice
发明人： Slawomir K. Ilnicki , James P. Rice
IPC分类号： G06F954
CPC分类号： H04L63/08 , H04L63/0884 , H04L67/16 , Y10S707/99944
摘要： A method of allowing a secure and transparent communication between a user device and servers of a data access network system via a firewall and a gateway is described. The method includes the step of designating a plurality of ports in the firewall for the gateway, each corresponding to one of a number of ports in the gateway. Each of the gateway ports can be dynamically assigned to correspond to the port of one of the servers. The method also includes a step of proxifying an object reference used in a user request for a target server from the user device in order to establish secure connection between the user device and the target server. This step is first performed by replacing the IP address and the port number of the target server of the user request with a dynamically assigned gateway port and the IP address of the gateway. Then the dynamically assigned gateway port and the gateway's IP address are mapped to the port of and IP address of the target server such that the user request is not required to expose the IP address and port number of the target server at the gateway.
摘要翻译：描述了通过防火墙和网关在用户设备和数据接入网络系统的服务器之间进行安全和透明的通信的方法。该方法包括为网关指定防火墙中的多个端口的步骤，每个端口对应于网关中的多个端口中的一个。每个网关端口都可以动态分配，以对应于其中一个服务器的端口。该方法还包括从用户设备处理用户对目标服务器的用户请求中使用的对象引用以在用户设备和目标服务器之间建立安全连接的步骤。首先通过使用动态分配的网关端口和网关的IP地址替换用户请求的目标服务器的IP地址和端口号来执行该步骤。然后将动态分配的网关端口和网关的IP地址映射到目标服务器的端口和IP地址，以便用户请求不需要在网关上公开目标服务器的IP地址和端口号。

6. 发明授权

US5148513A Non-linear genetic process for use with plural co-evolving populations 失效
标题翻译：与多个共同演化群体一起使用的非线性遗传过程
公开(公告)号：US5148513A
公开(公告)日：1992-09-15
申请号：US584259
申请日：1990-09-18
申请人： John R. Koza , James P. Rice
发明人： John R. Koza , James P. Rice
IPC分类号： G06N3/12
CPC分类号： G06N3/126
摘要： A non-linear genetic process for problem solving using co-evolving populations of entities is disclosed. The iterative process of the present invention operates on a plurality of populations of problem solving entities. First, an activated entity in one of the plurality of populations (evolving population) performs, producing a result. The result is assigned a value and the value is associated with the producing entity. The value assigned is computed relative to the performance of the entity in a population different from the evolving population (one of the environmental populations). Next, entities having relatively high associated values are selected from the evolving population. The selected entities perform either crossover or fitness proportionate reproduction. In addition, other operations such as mutation, permutation, define building blocks and editing may be used. Next, the newly created entities are added to the evolving population. Finally, one of the environmental populations switch roles with the evolving population and the process repeats for the new evolving population and the new environmental populations.
摘要翻译：公开了一种使用共同演化的实体群体解决问题的非线性遗传过程。本发明的迭代过程在多个问题解决实体群体上运行。首先，多个群体（演进群体）中的一个中的激活实体执行，产生结果。为结果分配一个值，该值与生产实体相关联。分配的价值相对于不同于不断发展的人口（一个环境人口）的人口中的实体的表现计算。接下来，从演化的群体中选择具有相对较高关联值的实体。所选择的实体执行交叉或适应度比例再现。此外，可以使用诸如突变，置换，定义构建块和编辑的其他操作。接下来，新创建的实体被添加到不断发展的人口中。最后，其中一个环境人口与不断变化的人口相互转换，并为新的人口和新的环境人口重复进程。

7. 发明授权

US5390282A Process for problem solving using spontaneously emergent self-replicating and self-improving entities 失效
标题翻译：使用自发出现的自我复制和自我完善实体解决问题的过程
公开(公告)号：US5390282A
公开(公告)日：1995-02-14
申请号：US899627
申请日：1992-06-16
申请人： John R. Koza , James P. Rice
发明人： John R. Koza , James P. Rice
IPC分类号： G06N3/00 , G06N3/12 , G06F15/18
CPC分类号： G06N3/126 , G06N3/004
摘要： An apparatus and process for solving problems using self-replicating and self-improving entities. The present invention includes an apparatus and process for solving a problem using a population of entities, wherein each of the entities is an arrangement of actions and material which are capable of including an incorporation action and are capable of including an emission action. The present invention also includes a process and apparatus for activating each of the entities by presenting each of the entities with at least one combination of environmental material. If an entity has an incorporation action then that entity searches the population for a part of one of the entities and then incorporates the portion of the one entity associated with the part into itself. If the entity includes an emission action then the entity searches the population for a part and then the entity produces at least one emission, such that if the entity responds effectively to a combination of environmental material then the emission enters the population and if the entity fails to respond effectively then the emission fails to enter the population. The activation continues until one of the entities responds effectively to a specified number of combinations of material, such that a solution to the problem is generated.
摘要翻译：使用自我复制和自我完善实体解决问题的设备和过程。本发明包括用于使用实体群来解决问题的装置和方法，其中每个实体是能够包括并入动作并且能够包括排放动作的动作和材料的布置。本发明还包括通过使每个实体呈现环境材料的至少一种组合来激活每个实体的过程和装置。如果实体具有并入操作，那么该实体搜索该群体中的一个实体的一部分，然后将与该部分相关联的一个实体的部分合并到其中。如果实体包括排放行动，那么实体搜索人口中的一部分，然后该实体产生至少一个排放，使得如果实体有效地响应环境材料的组合，那么排放进入群体，并且如果实体失败有效地应对排放不能进入人口。激活继续，直到其中一个实体有效响应指定数量的材料组合，从而生成问题的解决方案。

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