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1. 发明申请

US20060128073A1 Multiple-wavelength laser micromachining of semiconductor devices 审中-公开
标题翻译：半波长激光微加工半导体器件
公开(公告)号：US20060128073A1
公开(公告)日：2006-06-15
申请号：US11067464
申请日：2005-02-25
申请人： Yunlong Sun , Richard Harris , Kelly Bruland , Robert Hainsey , Ho Lo , Lei Sun
发明人： Yunlong Sun , Richard Harris , Kelly Bruland , Robert Hainsey , Ho Lo , Lei Sun
IPC分类号： H01L21/82 , B23K26/16
CPC分类号： H01L23/5258 , B23K26/0604 , B23K26/0613 , B23K26/0622 , B23K26/067 , B23K26/361 , B23K26/40 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/14 , B23K2103/172 , B23K2103/26 , B23K2103/50 , H01L2924/0002 , H01S3/10046 , H01S3/2383 , Y10S438/94 , H01L2924/00
摘要： A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.
摘要翻译：在轮廓不同时刻，不同激光波长的特殊形状的激光脉冲能量分布提供了减少的受控抖动，从而能够实现高质量处理和较小可能光斑尺寸的半导体器件微机械加工。

2. 发明申请

US20050087522A1 Laser processing of a locally heated target material 审中-公开
标题翻译：激光加工局部加热的靶材
公开(公告)号：US20050087522A1
公开(公告)日：2005-04-28
申请号：US10777973
申请日：2004-02-11
申请人： Yunlong Sun , Liu Jinjiao , Richard Harris , Pradeep Subrahmanyan , Robert Hainsey , Weixiong Lu
发明人： Yunlong Sun , Liu Jinjiao , Richard Harris , Pradeep Subrahmanyan , Robert Hainsey , Weixiong Lu
IPC分类号： B23K26/06 , B23K26/38 , H05K3/00
CPC分类号： B23K26/0608 , B23K26/0604 , B23K26/382 , B23K26/389 , B23K26/40 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/14 , B23K2103/172 , B23K2103/26 , B23K2103/42 , B23K2103/50 , B23K2103/52 , B23K2103/56 , H05K3/0038 , H05K2203/108 , H05K2203/1105
摘要： A method and laser system effect rapid removal of material from a workpiece by applying heating energy in the form of a light beam to a target location on the workpiece to elevate its temperature while maintaining its dimensional stability. When the target portion of the workpiece is heated, a laser beam is directed for incidence on the heated target location. The laser beam preferably has a processing laser output that is appropriate to effect removal of the target material from the workpiece. The combined incidence of the processing laser output and the heating energy on the target location enables the processing laser output to remove a portion of the target material at a material removal rate that is higher than the material removal rate achievable when the target material is not heated.
摘要翻译：一种方法和激光系统通过将光束形式的加热能量施加到工件上的目标位置来实现材料从工件的快速移除，以提高其温度同时保持其尺寸稳定性。当工件的目标部分被加热时，激光束被引导以被加热到目标位置上。激光束优选地具有适合于从工件去除目标材料的处理激光输出。处理激光输出和加热能量在目标位置的组合发生率使得处理激光输出能够以高于目标材料不加热时可实现的材料去除速率的材料去除速率去除目标材料的一部分。

3. 发明申请

US20090245302A1 METHODS AND SYSTEMS FOR DYNAMICALLY GENERATING TAILORED LASER PULSES 有权
标题翻译：动态生成定制激光脉冲的方法和系统
公开(公告)号：US20090245302A1
公开(公告)日：2009-10-01
申请号：US12060076
申请日：2008-03-31
申请人： Brian W. Baird , Clint R. Vandergiessen , Steve Swaringen , Robert Hainsey , Yunlong Sun , Kelly J. Bruland , Andrew Hooper
发明人： Brian W. Baird , Clint R. Vandergiessen , Steve Swaringen , Robert Hainsey , Yunlong Sun , Kelly J. Bruland , Andrew Hooper
IPC分类号： H01S3/10
CPC分类号： H01S3/1305 , B23K26/0622 , H01S3/0057 , H01S3/102
摘要： Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. The temporal pulse profile includes a first portion that defines a first time duration, and a second portion that defines a second time duration. A method includes generating a laser pulse based on laser system input parameters configured to shape the laser pulse according to the temporal pulse profile, detecting the generated laser pulse, comparing the generated laser pulse to the temporal pulse profile, and adjusting the laser system input parameters based on the comparison.
摘要翻译：使用激光加工诸如半导体晶片或其他材料的工件包括选择对应于与预定义的时间脉冲轮廓相关联的目标类别的目标。时间脉冲分布包括限定第一持续时间的第一部分和限定第二持续时间的第二部分。一种方法包括：基于激光系统输入参数产生激光脉冲，所述激光系统输入参数被配置为根据时间脉冲分布来形成激光脉冲，检测所产生的激光脉冲，将所产生的激光脉冲与时间脉冲分布进行比较，以及调整激光系统输入参数基于比较。

4. 发明授权

US08526473B2 Methods and systems for dynamically generating tailored laser pulses 有权
标题翻译：动态产生定制激光脉冲的方法和系统
公开(公告)号：US08526473B2
公开(公告)日：2013-09-03
申请号：US12060076
申请日：2008-03-31
申请人： Brian W. Baird , Clint R. Vandergiessen , Steve Swaringen , Robert Hainsey , Yunlong Sun , Kelly J. Bruland , Andrew Hooper
发明人： Brian W. Baird , Clint R. Vandergiessen , Steve Swaringen , Robert Hainsey , Yunlong Sun , Kelly J. Bruland , Andrew Hooper
IPC分类号： H01L21/302 , H01S3/10 , B23K26/38
CPC分类号： H01S3/1305 , B23K26/0622 , H01S3/0057 , H01S3/102
摘要： Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. The temporal pulse profile includes a first portion that defines a first time duration, and a second portion that defines a second time duration. A method includes generating a laser pulse based on laser system input parameters configured to shape the laser pulse according to the temporal pulse profile, detecting the generated laser pulse, comparing the generated laser pulse to the temporal pulse profile, and adjusting the laser system input parameters based on the comparison.
摘要翻译：使用激光加工诸如半导体晶片或其他材料的工件包括选择对应于与预定义的时间脉冲轮廓相关联的目标类别的目标。时间脉冲分布包括限定第一持续时间的第一部分和限定第二持续时间的第二部分。一种方法包括：基于激光系统输入参数产生激光脉冲，所述激光系统输入参数被配置为根据时间脉冲分布来形成激光脉冲，检测所产生的激光脉冲，将所产生的激光脉冲与时间脉冲分布进行比较，以及调整激光系统输入参数基于比较。

5. 发明申请

US20050041976A1 Generating sets of tailored laser pulses 有权
标题翻译：生成一组定制的激光脉冲
公开(公告)号：US20050041976A1
公开(公告)日：2005-02-24
申请号：US10921765
申请日：2004-08-18
申请人： Yunlong Sun , Robert Hainsey
发明人： Yunlong Sun , Robert Hainsey
IPC分类号： B23K20060101 , B23K26/06 , B23K26/38 , H01S20060101 , H04J14/02
CPC分类号： H01L23/5258 , B23K26/0613 , B23K26/0622 , B23K2101/40 , H01L2924/0002 , H01L2924/00
摘要： In a master oscillator power amplifier, a driver (208) of a diode laser (202) is specially controlled to generate a set of two or more injection laser pulses that are injected into a power amplifier (204) operated in an unsaturated state to generate a set (50) of laser pulses (52) that replicate the temporal power profile of the injection laser pulses to remove a conductive link (22) and/or its overlying passivation layer (44) in a memory or other IC chip. Each set (50) includes at least one specially tailored pulse (52) and/or two or more pulses (50) having different temporal power profiles. The duration of the set (50) is short enough to be treated as a single “pulse” by conventional positioning systems (380) to perform on-the-fly link removal without stopping.
摘要翻译：在主振荡器功率放大器中，特别地控制二极管激光器（202）的驱动器（208），以产生注入到以不饱和状态操作的功率放大器（204）中的两个或更多个注入激光脉冲的集合，以产生一组（50）激光脉冲（52），其复制所述注入激光脉冲的时间功率分布以去除存储器或其它IC芯片中的导电连接（22）和/或其上覆钝化层（44）。每个组（50）包括具有不同时间功率分布的至少一个特别定制的脉冲（52）和/或两个或更多个脉冲（50）。集合（50）的持续时间足够短以被常规定位系统（380）视为单个“脉冲”，以在不停止的情况下执行即时链路去除。

6. 发明申请

US20090179201A1 Laser Chalcogenide Phase Change Device 有权
标题翻译：激光硫族化物相变装置
公开(公告)号：US20090179201A1
公开(公告)日：2009-07-16
申请号：US11972660
申请日：2008-01-11
申请人： Andy E. Hooper , Allen Kawasaki , Robert Hainsey
发明人： Andy E. Hooper , Allen Kawasaki , Robert Hainsey
IPC分类号： H01L29/04 , H01L21/263
CPC分类号： H01L23/5258 , H01L2924/0002 , H01L2924/00
摘要： A laser activated phase change device for use in an integrated circuit comprises a chalcogenide fuse configured to connect a first patterned metal line and a second patterned metal line and positioned between an inter layer dielectric and an over fuse dielectric. The fuse interconnects active semiconductor elements manufactured on a substrate. A method for activating the laser activated phase change device includes selecting a laser condition of a laser based on characteristics of the fuse and programming a phase-change of the fuse with the laser by direct photon absorption until a threshold transition temperature is met.
摘要翻译：用于集成电路的激光激活相变装置包括被配置为连接第一图案化金属线和第二图案化金属线并位于层间电介质和过熔断绝缘体之间的硫族化物保险丝。熔丝将在衬底上制造的有源半导体元件互连。用于激活激光激活相变装置的方法包括：基于熔丝的特性来选择激光的激光状态，并通过直接光子吸收来编程与激光器的熔丝的相变直到达到阈值转变温度。

7. 发明授权

US08178818B2 Photonic milling using dynamic beam arrays 失效
标题翻译：使用动态光束阵列进行光子研磨
公开(公告)号：US08178818B2
公开(公告)日：2012-05-15
申请号：US12235294
申请日：2008-09-22
申请人： Brian W. Baird , Kelly J. Bruland , Robert Hainsey
发明人： Brian W. Baird , Kelly J. Bruland , Robert Hainsey
IPC分类号： B23K26/02 , B23K26/04
CPC分类号： B23K26/03
摘要： A laser processing system includes a beam positioning system to align beam delivery coordinates relative to a workpiece. The beam positioning system generates position data corresponding to the alignment. The system also includes a pulsed laser source and a beamlet generation module to receive a laser pulse from the pulsed laser source. The beamlet generation module generates a beamlet array from the laser pulse. The beamlet array includes a plurality of beamlet pulses. The system further includes a beamlet modulator to selectively modulate the amplitude of each beamlet pulse in the beamlet array, and beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data.
摘要翻译：激光处理系统包括用于使输送坐标相对于工件对准的光束定位系统。光束定位系统产生对准的位置数据。该系统还包括脉冲激光源和子束产生模块，以从脉冲激光源接收激光脉冲。子波束生成模块从激光脉冲生成小波阵列。子束阵列包括多个子束脉冲。该系统还包括一个子束调制器，用于选择性地调制子束阵列中的每个子束脉冲的振幅，以及子束传递光学器件，用于将调制的子束阵列聚焦到与位置数据对应的工件上的位置上的一个或多个目标上。

8. 发明申请

US20110194574A1 METHOD AND APPARATUS FOR RELIABLY LASER MARKING ARTICLES 有权
标题翻译：可靠的激光标记方法和装置
公开(公告)号：US20110194574A1
公开(公告)日：2011-08-11
申请号：US12704293
申请日：2010-02-11
申请人： Haibin Zhang , Glenn Simenson , Robert Hainsey , David Barsic , Jeffrey Howerton , Wayne Crowther , Patrick Leonard
发明人： Haibin Zhang , Glenn Simenson , Robert Hainsey , David Barsic , Jeffrey Howerton , Wayne Crowther , Patrick Leonard
IPC分类号： H01S3/10 , B41J2/47
CPC分类号： B41J2/442 , B41M5/262
摘要： The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.
摘要翻译：本发明是一种用于在阳极氧化铝样品上产生颜色和光密度可选择可见标记的方法和装置。该方法包括提供激光打标系统，其具有激光器，激光光学器件和可操作地连接到所述激光器以控制激光脉冲参数的控制器和具有存储的激光脉冲参数的控制器，选择存储的与所需颜色和光密度相关联的激光脉冲参数引导激光打标系统产生激光脉冲，该激光脉冲具有与所需颜色和光密度相关联的激光脉冲参数，包括大于约1皮秒并小于约1000皮秒的时间脉冲宽度以撞击所述阳极氧化铝。

9. 发明申请

US20090242522A1 PHOTONIC MILLING USING DYNAMIC BEAM ARRAYS 失效
标题翻译：使用动态光束阵列的光电铣削
公开(公告)号：US20090242522A1
公开(公告)日：2009-10-01
申请号：US12235294
申请日：2008-09-22
申请人： Brian W. Baird , Kelly J. Bruland , Robert Hainsey
发明人： Brian W. Baird , Kelly J. Bruland , Robert Hainsey
IPC分类号： B23K26/00
CPC分类号： B23K26/03
摘要： A laser processing system includes a beam positioning system to align beam delivery coordinates relative to a workpiece. The beam positioning system generates position data corresponding to the alignment. The system also includes a pulsed laser source and a beamlet generation module to receive a laser pulse from the pulsed laser source. The beamlet generation module generates a beamlet array from the laser pulse. The beamlet array includes a plurality of beamlet pulses. The system further includes a beamlet modulator to selectively modulate the amplitude of each beamlet pulse in the beamlet array, and beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data.
摘要翻译：激光处理系统包括用于使输送坐标相对于工件对准的光束定位系统。光束定位系统产生对准的位置数据。该系统还包括脉冲激光源和子束产生模块，以从脉冲激光源接收激光脉冲。子波束生成模块从激光脉冲生成小波阵列。子束阵列包括多个子束脉冲。该系统还包括一个子束调制器，用于选择性地调制子束阵列中的每个子束脉冲的振幅，以及子束传递光学器件，用于将调制的子束阵列聚焦到与位置数据对应的工件上的位置上的一个或多个目标上。

10. 发明授权

US08379679B2 Method and apparatus for reliably laser marking articles 有权
标题翻译：用于可靠地激光打标的方法和装置
公开(公告)号：US08379679B2
公开(公告)日：2013-02-19
申请号：US12704293
申请日：2010-02-11
申请人： Haibin Zhang , Glenn Simenson , Robert Hainsey , David Barsic , Jeffrey Howerton , Wayne Crowther , Patrick Leonard
发明人： Haibin Zhang , Glenn Simenson , Robert Hainsey , David Barsic , Jeffrey Howerton , Wayne Crowther , Patrick Leonard
IPC分类号： H01S3/10 , H01S3/13
CPC分类号： B41J2/442 , B41M5/262
摘要： The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.
摘要翻译：本发明是一种用于在阳极氧化铝样品上产生颜色和光密度可选择可见标记的方法和装置。该方法包括提供激光打标系统，其具有激光器，激光光学器件和可操作地连接到所述激光器以控制激光脉冲参数的控制器和具有存储的激光脉冲参数的控制器，选择存储的与所需颜色和光密度相关联的激光脉冲参数引导激光打标系统产生激光脉冲，该激光脉冲具有与所需颜色和光密度相关联的激光脉冲参数，包括大于约1皮秒并小于约1000皮秒的时间脉冲宽度以撞击所述阳极氧化铝。

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