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1. 发明授权

US08161803B2 Micromachined comb drive for quantitative nanoindentation 有权
标题翻译：微加工梳状驱动器用于定量纳米压痕
公开(公告)号：US08161803B2
公开(公告)日：2012-04-24
申请号：US12497834
申请日：2009-07-06
申请人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
IPC分类号： B82Y3/00 , G01N3/42 , G01N3/00
CPC分类号： G01N3/40 , G01B7/34 , G01N3/42 , G01N19/00 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q60/366 , Y10S977/956
摘要： A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, the indenter tip moveable together with the probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor comprising a plurality of comb capacitors configured to drive the probe, together with the indenter tip, along a displacement axis, including in an indentation direction, upon application of a bias voltage to the actuation capacitor. The micromachined comb drive further includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
摘要翻译：微机电（MEMS）纳米压头换能器，包括主体，可相对于主体移动的探针，连接到可移动探针的端部的压头，可与探针一起移动的压头以及微机械梳状驱动器。微加工梳状驱动器包括静电致动器电容器，该静电致动器电容器包括多个梳状电容器，该多个梳状电容器被配置为在施加偏置电压到致动电容器时沿包括压痕方向的位移轴沿着位移轴驱动探头。微加工梳状驱动器还包括形成差分电容位移传感器的多个感测电容器，每个感测电容器包括多个梳状电容器，并且每个感测电容器被配置为提供一起代表探针位置的电容电平，其中，致动器电容器和感测电容器的梳状电容器包括耦合到主体的固定电极梳和耦合到探针的可移动电极梳。

2. 发明授权

US09304072B2 Micromachined comb drive for quantitative nanoindentation 有权
标题翻译：微加工梳状驱动器用于定量纳米压痕
公开(公告)号：US09304072B2
公开(公告)日：2016-04-05
申请号：US13454823
申请日：2012-04-24
申请人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
IPC分类号： G01N3/42 , B82Y15/00 , G01B7/34 , G01N19/00 , G01Q60/36 , G01N3/40 , G01Q10/00 , G01Q20/00
CPC分类号： G01N3/40 , G01B7/34 , G01N3/42 , G01N19/00 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q60/366 , Y10S977/956
摘要： A microelectromechanical nanoindenter including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor configured to drive the probe, along with the indenter tip. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
摘要翻译：包括主体，可相对于主体移动的探针，连接到可移动探针的端部的压头，以及微加工梳状驱动器的微机电纳米压痕机。微加工梳状驱动器包括静电致动器电容器，其构造成与压头尖端一起驱动探针。微加工梳状驱动器包括形成差分电容位移传感器的多个感测电容器，每个感测电容器包括多个梳状电容器，并且每个感测电容器被配置为提供一起代表探头位置的电容电平，其中，致动器电容器和感测电容器的梳状电容器包括耦合到主体的固定电极梳和耦合到探针的可移动电极梳。

3. 发明申请

US20120266666A1 MICROMACHINED COMB DRIVE FOR QUANTITATIVE NANOINDENTATION 审中-公开
标题翻译： MICROMACHINED COMB DRIVE FOR Quantant NANOINDENTATION
公开(公告)号：US20120266666A1
公开(公告)日：2012-10-25
申请号：US13454823
申请日：2012-04-24
申请人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
IPC分类号： G01N3/40
CPC分类号： G01N3/40 , G01B7/34 , G01N3/42 , G01N19/00 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q60/366 , Y10S977/956
摘要： A microelectromechanical nanoindenter including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor configured to drive the probe, along with the indenter tip. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
摘要翻译：包括主体，可相对于主体移动的探针，连接到可移动探针的端部的压头，以及微加工梳状驱动器的微机电纳米压痕机。微加工梳状驱动器包括静电致动器电容器，其构造成与压头尖端一起驱动探针。微加工梳状驱动器包括形成差分电容位移传感器的多个感测电容器，每个感测电容器包括多个梳状电容器，并且每个感测电容器被配置为提供一起代表探头位置的电容电平，其中，致动器电容器和感测电容器的梳状电容器包括耦合到主体的固定电极梳和耦合到探针的可移动电极梳。

4. 发明申请

US20100132441A1 MICROMACHINED COMB DRIVE FOR QUANTITATIVE NANOINDENTATION 有权
标题翻译： MICROMACHINED COMB DRIVE FOR Quantant NANOINDENTATION
公开(公告)号：US20100132441A1
公开(公告)日：2010-06-03
申请号：US12497834
申请日：2009-07-06
申请人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
IPC分类号： G01N3/42
CPC分类号： G01N3/40 , G01B7/34 , G01N3/42 , G01N19/00 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q60/366 , Y10S977/956
摘要： A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, the indenter tip moveable together with the probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor comprising a plurality of comb capacitors configured to drive the probe, together with the indenter tip, along a displacement axis, including in an indentation direction, upon application of a bias voltage to the actuation capacitor. The micromachined comb drive further includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
摘要翻译：微机电（MEMS）纳米压头换能器，包括主体，可相对于主体移动的探针，连接到可移动探针的端部的压头，可与探针一起移动的压头以及微机械梳状驱动器。微加工梳状驱动器包括静电致动器电容器，该静电致动器电容器包括多个梳状电容器，该多个梳状电容器被配置为在施加偏置电压到致动电容器时沿包括压痕方向的位移轴沿着位移轴驱动探头。微加工梳状驱动器还包括形成差分电容位移传感器的多个感测电容器，每个感测电容器包括多个梳状电容器，并且每个感测电容器被配置为提供一起代表探针位置的电容电平，其中，致动器电容器和感测电容器的梳状电容器包括耦合到主体的固定电极梳和耦合到探针的可移动电极梳。

5. 发明授权

US08434370B2 Micro/nano-mechanical test system employing tensile test holder with push-to-pull transformer 有权
标题翻译：微/纳机械测试系统采用拉拔式测试架，带有推挽式变压器
公开(公告)号：US08434370B2
公开(公告)日：2013-05-07
申请号：US12575368
申请日：2009-10-07
申请人： Yunje Oh , Edward Cyrankowski , Zhiwei Shan , Syed Amanula Syed Asif
发明人： Yunje Oh , Edward Cyrankowski , Zhiwei Shan , Syed Amanula Syed Asif
IPC分类号： G01L1/00
CPC分类号： G01L1/005 , B81C99/005 , G01N3/08 , G01N2203/0286 , G01N2203/0647
摘要： A micromachined or microelectromechanical system (MEMS) based push-to-pull mechanical transformer for tensile testing of micro-to-nanometer scale material samples including a first structure and a second structure. The second structure is coupled to the first structure by at least one flexible element that enables the second structure to be moveable relative to the first structure, wherein the second structure is disposed relative to the first structure so as to form a pulling gap between the first and second structures such that when an external pushing force is applied to and pushes the second structure in a tensile extension direction a width of the pulling gap increases so as to apply a tensile force to a test sample mounted across the pulling gap between a first sample mounting area on the first structure and a second sample mounting area on the second structure.
摘要翻译：一种用于对包括第一结构和第二结构的微米至纳米尺度材料样品的拉伸测试的基于微机械或微机电系统（MEMS）的推挽式机械变压器。第二结构通过至少一个可使第二结构相对于第一结构运动的柔性元件耦合到第一结构，其中第二结构相对于第一结构设置，以在第一结构之间形成牵引间隙以及第二结构，使得当在拉伸延伸方向上施加外推力并推动所述第二结构时，所述牵引间隙的宽度增加，以便对安装在所述牵引间隙上的第一样品第一结构上的安装区域和第二结构上的第二样品安装区域。

6. 发明申请

US20110265559A1 2-D MEMS TRIBOMETER WITH COMB DRIVES 有权
标题翻译：具有组合驱动的2-D MEMS测速仪
公开(公告)号：US20110265559A1
公开(公告)日：2011-11-03
申请号：US13099113
申请日：2011-05-02
申请人： Yunje Oh , Syed Amanula Syed Asif , Oden L. Warren
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden L. Warren
IPC分类号： G01N3/48
CPC分类号： G01N3/42 , B82Y35/00 , G01N2203/0286 , G01Q60/366
摘要： A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe coupled to and moveable relative to the body, the probe holding a removeable indenter tip, a first micromachined comb drive and a second micromachined comb drive. The first micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a first axis, including in an indentation direction, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the first axis. The second micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a second axis, which is perpendicular to the first axis, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the second axis. Each of the electrostatic capacitive actuators and the differential capacitive sensors comprises an electrode comb pair, each electrode comb pair including a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
摘要翻译：一种微机电（MEMS）纳米压头换能器，包括主体，耦合到主体并且可相对于主体移动的探针，探头保持可移除的压头，第一微加工梳状驱动器和第二微加工梳状驱动器。第一微加工梳状驱动器包括致动器，其包括多个静电电容致动器，其被配置为响应于所施加的偏置电压沿着包括在压入方向的第一轴线驱动探针;以及位移传感器，其包括多个差分电容传感器具有一起代表探针相对于第一轴的位置的电容水平。第二微加工梳状驱动器包括致动器，其包括多个静电电容致动器，其被配置为响应于所施加的偏置电压沿着垂直于第一轴线的第二轴线驱动探头;以及位移传感器，其包括多个差动电容传感器具有一起代表探针相对于第二轴的位置的电容水平。每个静电电容致动器和差分电容传感器包括电极梳对，每个电极梳对包括耦合到本体的固定电极梳和耦合到探针的可移动电极梳。

7. 发明授权

US08738315B2 Digital damping control of nanomechanical test instruments 有权
标题翻译：纳米机械试验仪器的数字阻尼控制
公开(公告)号：US08738315B2
公开(公告)日：2014-05-27
申请号：US12498238
申请日：2009-07-06
申请人： Yunje Oh , Matthew R. Wilson , Ryan Charles Major , Syed Amanula Syed Asif , Oden L. Warren
发明人： Yunje Oh , Matthew R. Wilson , Ryan Charles Major , Syed Amanula Syed Asif , Oden L. Warren
IPC分类号： G06F19/00
CPC分类号： G01Q60/366 , G01N3/42 , G01N2203/0234 , G01N2203/0286 , G01Q10/065
摘要： A method of damping control for a nanomechanical test system, the method including providing an input signal, providing an output signal representative of movement of a displaceable probe along an axis in response to the input signal, performing a frequency-dependent phase shift of the output signal to provide a phase-shifted signal, adjusting the phase-shifted signal by a gain value to provide a feedback signal, and adjusting the input signal by incorporating the feedback signal with the input signal.
摘要翻译：一种用于纳米机械测试系统的阻尼控制的方法，所述方法包括提供输入信号，响应于所述输入信号提供表示可移动探针沿着轴移动的输出信号，执行所述输出的频率相关相移信号以提供相移信号，通过增益值调整相移信号以提供反馈信号，以及通过将反馈信号与输入信号相结合来调整输入信号。

8. 发明申请

US20100095780A1 MICRO/NANO-MECHANICAL TEST SYSTEM EMPLOYING TENSILE TEST HOLDER WITH PUSH-TO-PULL TRANSFORMER 有权
标题翻译：微型/纳米机械测试系统采用推拉变压器的拉伸测试台
公开(公告)号：US20100095780A1
公开(公告)日：2010-04-22
申请号：US12575368
申请日：2009-10-07
申请人： Yunje Oh , Edward Cyrankowski , Zhiwei Shan , Syed Amanula Syed Asif
发明人： Yunje Oh , Edward Cyrankowski , Zhiwei Shan , Syed Amanula Syed Asif
IPC分类号： G01L1/00
CPC分类号： G01L1/005 , B81C99/005 , G01N3/08 , G01N2203/0286 , G01N2203/0647
摘要： A micromachined or microelectromechanical system (MEMS) based push-to-pull mechanical transformer for tensile testing of micro-to-nanometer scale material samples including a first structure and a second structure. The second structure is coupled to the first structure by at least one flexible element that enables the second structure to be moveable relative to the first structure, wherein the second structure is disposed relative to the first structure so as to form a pulling gap between the first and second structures such that when an external pushing force is applied to and pushes the second structure in a tensile extension direction a width of the pulling gap increases so as to apply a tensile force to a test sample mounted across the pulling gap between a first sample mounting area on the first structure and a second sample mounting area on the second structure.
摘要翻译：一种用于对包括第一结构和第二结构的微米至纳米尺度材料样品的拉伸测试的基于微机械或微机电系统（MEMS）的推挽式机械变压器。第二结构通过至少一个可使第二结构相对于第一结构运动的柔性元件耦合到第一结构，其中第二结构相对于第一结构设置，以便在第一结构之间形成牵引间隙以及第二结构，使得当在拉伸延伸方向上施加外推力并推动所述第二结构时，所述牵引间隙的宽度增加，以便对安装在所述牵引间隙上的第一样品第一结构上的安装区域和第二结构上的第二样品安装区域。

9. 发明授权

US09157845B2 2-D MEMS tribometer with comb drives 有权
标题翻译：具有梳齿驱动器的2-D MEMS摩擦计
公开(公告)号：US09157845B2
公开(公告)日：2015-10-13
申请号：US13099113
申请日：2011-05-02
申请人： Yunje Oh , Syed Amanula Syed Asif , Oden L. Warren
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden L. Warren
IPC分类号： G01N3/42 , B82Y35/00 , G01Q60/36
CPC分类号： G01N3/42 , B82Y35/00 , G01N2203/0286 , G01Q60/366
摘要： A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe coupled to and moveable relative to the body, the probe holding a removeable indenter tip, a first micromachined comb drive and a second micromachined comb drive. The first micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a first axis, including in an indentation direction, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the first axis. The second micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a second axis, which is perpendicular to the first axis, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the second axis. Each of the electrostatic capacitive actuators and the differential capacitive sensors comprises an electrode comb pair, each electrode comb pair including a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
摘要翻译：一种微机电（MEMS）纳米压头换能器，包括主体，耦合到主体并且可相对于主体移动的探针，探头保持可移除的压头，第一微加工梳状驱动器和第二微加工梳状驱动器。第一微加工梳状驱动器包括致动器，其包括多个静电电容致动器，其被配置为响应于所施加的偏置电压沿着包括在压入方向的第一轴线驱动探针;以及位移传感器，其包括多个差分电容传感器具有一起代表探针相对于第一轴的位置的电容水平。第二微加工梳状驱动器包括致动器，其包括多个静电电容致动器，其被配置为响应于所施加的偏置电压沿着垂直于第一轴线的第二轴线驱动探头;以及位移传感器，其包括多个差动电容传感器具有一起代表探针相对于第二轴的位置的电容水平。每个静电电容致动器和差分电容传感器包括电极梳对，每个电极梳对包括耦合到本体的固定电极梳和耦合到探针的可移动电极梳。

10. 发明申请

US20100036636A1 DIGITAL DAMPING CONTROL OF NANOMECHANICAL TEST INSTRUMENTS 有权
标题翻译：南方测试仪器的数字阻尼控制
公开(公告)号：US20100036636A1
公开(公告)日：2010-02-11
申请号：US12498238
申请日：2009-07-06
申请人： Yunje Oh , Matthew R. Wilson , Ryan Charles Major , Syed Amanula Syed Asif , Oden L. Warren
发明人： Yunje Oh , Matthew R. Wilson , Ryan Charles Major , Syed Amanula Syed Asif , Oden L. Warren
IPC分类号： G06F19/00 , G01M17/00
CPC分类号： G01Q60/366 , G01N3/42 , G01N2203/0234 , G01N2203/0286 , G01Q10/065
摘要： A method of damping control for a nanomechanical test system, the method including providing an input signal, providing an output signal representative of movement of a displaceable probe along an axis in response to the input signal, performing a frequency-dependent phase shift of the output signal to provide a phase-shifted signal, adjusting the phase-shifted signal by a gain value to provide a feedback signal, and adjusting the input signal by incorporating the feedback signal with the input signal.
摘要翻译：一种用于纳米机械测试系统的阻尼控制的方法，所述方法包括提供输入信号，响应于所述输入信号提供表示可移动探针沿着轴移动的输出信号，执行所述输出的频率相关相移信号以提供相移信号，通过增益值调整相移信号以提供反馈信号，以及通过将反馈信号与输入信号相结合来调整输入信号。

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