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1. 发明申请

US20110265559A1 2-D MEMS TRIBOMETER WITH COMB DRIVES 有权
标题翻译：具有组合驱动的2-D MEMS测速仪
公开(公告)号：US20110265559A1
公开(公告)日：2011-11-03
申请号：US13099113
申请日：2011-05-02
申请人： Yunje Oh , Syed Amanula Syed Asif , Oden L. Warren
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden L. Warren
IPC分类号： G01N3/48
CPC分类号： G01N3/42 , B82Y35/00 , G01N2203/0286 , G01Q60/366
摘要： A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe coupled to and moveable relative to the body, the probe holding a removeable indenter tip, a first micromachined comb drive and a second micromachined comb drive. The first micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a first axis, including in an indentation direction, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the first axis. The second micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a second axis, which is perpendicular to the first axis, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the second axis. Each of the electrostatic capacitive actuators and the differential capacitive sensors comprises an electrode comb pair, each electrode comb pair including a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
摘要翻译：一种微机电（MEMS）纳米压头换能器，包括主体，耦合到主体并且可相对于主体移动的探针，探头保持可移除的压头，第一微加工梳状驱动器和第二微加工梳状驱动器。第一微加工梳状驱动器包括致动器，其包括多个静电电容致动器，其被配置为响应于所施加的偏置电压沿着包括在压入方向的第一轴线驱动探针;以及位移传感器，其包括多个差分电容传感器具有一起代表探针相对于第一轴的位置的电容水平。第二微加工梳状驱动器包括致动器，其包括多个静电电容致动器，其被配置为响应于所施加的偏置电压沿着垂直于第一轴线的第二轴线驱动探头;以及位移传感器，其包括多个差动电容传感器具有一起代表探针相对于第二轴的位置的电容水平。每个静电电容致动器和差分电容传感器包括电极梳对，每个电极梳对包括耦合到本体的固定电极梳和耦合到探针的可移动电极梳。

2. 发明授权

US08738315B2 Digital damping control of nanomechanical test instruments 有权
标题翻译：纳米机械试验仪器的数字阻尼控制
公开(公告)号：US08738315B2
公开(公告)日：2014-05-27
申请号：US12498238
申请日：2009-07-06
申请人： Yunje Oh , Matthew R. Wilson , Ryan Charles Major , Syed Amanula Syed Asif , Oden L. Warren
发明人： Yunje Oh , Matthew R. Wilson , Ryan Charles Major , Syed Amanula Syed Asif , Oden L. Warren
IPC分类号： G06F19/00
CPC分类号： G01Q60/366 , G01N3/42 , G01N2203/0234 , G01N2203/0286 , G01Q10/065
摘要： A method of damping control for a nanomechanical test system, the method including providing an input signal, providing an output signal representative of movement of a displaceable probe along an axis in response to the input signal, performing a frequency-dependent phase shift of the output signal to provide a phase-shifted signal, adjusting the phase-shifted signal by a gain value to provide a feedback signal, and adjusting the input signal by incorporating the feedback signal with the input signal.
摘要翻译：一种用于纳米机械测试系统的阻尼控制的方法，所述方法包括提供输入信号，响应于所述输入信号提供表示可移动探针沿着轴移动的输出信号，执行所述输出的频率相关相移信号以提供相移信号，通过增益值调整相移信号以提供反馈信号，以及通过将反馈信号与输入信号相结合来调整输入信号。

3. 发明授权

US09157845B2 2-D MEMS tribometer with comb drives 有权
标题翻译：具有梳齿驱动器的2-D MEMS摩擦计
公开(公告)号：US09157845B2
公开(公告)日：2015-10-13
申请号：US13099113
申请日：2011-05-02
申请人： Yunje Oh , Syed Amanula Syed Asif , Oden L. Warren
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden L. Warren
IPC分类号： G01N3/42 , B82Y35/00 , G01Q60/36
CPC分类号： G01N3/42 , B82Y35/00 , G01N2203/0286 , G01Q60/366
摘要： A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe coupled to and moveable relative to the body, the probe holding a removeable indenter tip, a first micromachined comb drive and a second micromachined comb drive. The first micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a first axis, including in an indentation direction, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the first axis. The second micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a second axis, which is perpendicular to the first axis, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the second axis. Each of the electrostatic capacitive actuators and the differential capacitive sensors comprises an electrode comb pair, each electrode comb pair including a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
摘要翻译：一种微机电（MEMS）纳米压头换能器，包括主体，耦合到主体并且可相对于主体移动的探针，探头保持可移除的压头，第一微加工梳状驱动器和第二微加工梳状驱动器。第一微加工梳状驱动器包括致动器，其包括多个静电电容致动器，其被配置为响应于所施加的偏置电压沿着包括在压入方向的第一轴线驱动探针;以及位移传感器，其包括多个差分电容传感器具有一起代表探针相对于第一轴的位置的电容水平。第二微加工梳状驱动器包括致动器，其包括多个静电电容致动器，其被配置为响应于所施加的偏置电压沿着垂直于第一轴线的第二轴线驱动探头;以及位移传感器，其包括多个差动电容传感器具有一起代表探针相对于第二轴的位置的电容水平。每个静电电容致动器和差分电容传感器包括电极梳对，每个电极梳对包括耦合到本体的固定电极梳和耦合到探针的可移动电极梳。

4. 发明申请

US20100036636A1 DIGITAL DAMPING CONTROL OF NANOMECHANICAL TEST INSTRUMENTS 有权
标题翻译：南方测试仪器的数字阻尼控制
公开(公告)号：US20100036636A1
公开(公告)日：2010-02-11
申请号：US12498238
申请日：2009-07-06
申请人： Yunje Oh , Matthew R. Wilson , Ryan Charles Major , Syed Amanula Syed Asif , Oden L. Warren
发明人： Yunje Oh , Matthew R. Wilson , Ryan Charles Major , Syed Amanula Syed Asif , Oden L. Warren
IPC分类号： G06F19/00 , G01M17/00
CPC分类号： G01Q60/366 , G01N3/42 , G01N2203/0234 , G01N2203/0286 , G01Q10/065
摘要： A method of damping control for a nanomechanical test system, the method including providing an input signal, providing an output signal representative of movement of a displaceable probe along an axis in response to the input signal, performing a frequency-dependent phase shift of the output signal to provide a phase-shifted signal, adjusting the phase-shifted signal by a gain value to provide a feedback signal, and adjusting the input signal by incorporating the feedback signal with the input signal.
摘要翻译：一种用于纳米机械测试系统的阻尼控制的方法，所述方法包括提供输入信号，响应于所述输入信号提供表示可移动探针沿着轴移动的输出信号，执行所述输出的频率相关相移信号以提供相移信号，通过增益值调整相移信号以提供反馈信号，以及通过将反馈信号与输入信号相结合来调整输入信号。

5. 发明授权

US08453498B2 Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy 有权
标题翻译：用于定量纳米压痕结合透射电子显微镜的可动电容式换能器
公开(公告)号：US08453498B2
公开(公告)日：2013-06-04
申请号：US12886745
申请日：2010-09-21
申请人： Oden L. Warren , Syed Amanula Syed Asif , Edward Cyrankowski , Kalin Kounev
发明人： Oden L. Warren , Syed Amanula Syed Asif , Edward Cyrankowski , Kalin Kounev
IPC分类号： G01B5/28 , G01B7/16 , G01L1/00
CPC分类号： G01B7/22 , G01D5/2417 , G01N3/42 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q30/02 , G01Q60/366 , H01J2237/20264 , H02N1/002
摘要： An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.
摘要翻译：一种可启动电容换能器，包括换能器主体，包括可置换电极并被电气配置为静电致动器的第一电容器和包括可置换电极并被电气配置为电容位移传感器的第二电容器，其中所述第二电容器包括多板电容器。可致动电容换能器还包括联接轴，其被配置为将第一电容器的可移动电极机械耦合到第二电容器的可移动电极，以形成相对于换能器本体可位移的可移位电极单元，以及机械地耦合到联接轴，以便与可移位电极单元一致地移动。

6. 发明申请

US20110005306A1 ACTUATABLE CAPACITIVE TRANSDUCER FOR QUANTITATIVE NANOINDENTATION COMBINED WITH TRANSMISSION ELECTRON MICROSCOPY 有权
标题翻译：与传输电子显微镜组合的定量纳米致动电容式传感器
公开(公告)号：US20110005306A1
公开(公告)日：2011-01-13
申请号：US12886745
申请日：2010-09-21
申请人： Oden L. Warren , S.A. Syed Asif , Edward Cyrankowski , Kalin Kounev
发明人： Oden L. Warren , S.A. Syed Asif , Edward Cyrankowski , Kalin Kounev
IPC分类号： G01N3/48
CPC分类号： G01B7/22 , G01D5/2417 , G01N3/42 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q30/02 , G01Q60/366 , H01J2237/20264 , H02N1/002
摘要： An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.
摘要翻译：一种可启动电容换能器，包括换能器主体，包括可置换电极并被电气配置为静电致动器的第一电容器和包括可置换电极并被电气配置为电容位移传感器的第二电容器，其中所述第二电容器包括多板电容器。可致动电容换能器还包括联接轴，其被配置为将第一电容器的可移动电极机械耦合到第二电容器的可移动电极，以形成相对于换能器本体可位移的可移位电极单元，以及机械地耦合到联接轴，以便与可移位电极单元一致地移动。

7. 发明授权

US07798011B2 Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy 有权
标题翻译：用于定量纳米压痕结合透射电子显微镜的可动电容式换能器
公开(公告)号：US07798011B2
公开(公告)日：2010-09-21
申请号：US11672489
申请日：2007-02-07
申请人： Oden L. Warren , S. A. Syed Asif , Edward Cyrankowski , Kalin Kounev
发明人： Oden L. Warren , S. A. Syed Asif , Edward Cyrankowski , Kalin Kounev
IPC分类号： G01B7/16
CPC分类号： G01B7/22 , G01D5/2417 , G01N3/42 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q30/02 , G01Q60/366 , H01J2237/20264 , H02N1/002
摘要： An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.-
摘要翻译：一种可启动电容换能器，包括换能器主体，包括可置换电极并被电气配置为静电致动器的第一电容器和包括可置换电极并被电气配置为电容位移传感器的第二电容器，其中所述第二电容器包括多板电容器。可致动电容换能器还包括联接轴，其被配置为将第一电容器的可移动电极机械耦合到第二电容器的可移动电极，以形成相对于换能器本体可位移的可移位电极单元，以及机械地耦合到联接轴，以便与可移位电极单元一致地移动。 -

8. 发明授权

US07425698B2 Feedback influenced increased-quality-factor scanning probe microscope 有权
标题翻译：反馈影响增加质量因子扫描探针显微镜
公开(公告)号：US07425698B2
公开(公告)日：2008-09-16
申请号：US11495403
申请日：2006-07-28
申请人： Oden L. Warren , Peter R. Norton , John F. Graham
发明人： Oden L. Warren , Peter R. Norton , John F. Graham
IPC分类号： H01J3/14 , G01N23/00 , G01B5/28
CPC分类号： G01Q10/065 , G01Q60/34
摘要： An interfacial force microscope includes a differential-capacitance displacement sensor having a tip mounted on an oscillating member. The sensor generates displacement signals in response to oscillations of the member. A scanner is adjacent the sensor and supports a sample to be imaged. The scanner is actuable to move the sample relative to the sensor to bring the tip into intermittent contact with said sample as the member oscillates. A controller is in communication with the sensor and the scanner. The controller includes a sensor feedback circuit receiving the displacement signals and an AC setpoint signal. The AC setpoint signal has a frequency generally equal to the frequency at the peak of the displacement versus frequency curve of the sensor. The output of the sensor feedback circuit is applied to the sensor to oscillate the member. The controller also provides output to the scanner in response to the displacement signals to control the separation distance between the sensor and the sample.
摘要翻译：界面力显微镜包括具有尖端安装在振荡构件上的差动电容位移传感器。传感器响应于构件的振荡产生位移信号。扫描器与传感器相邻，并支持待成像的样品。扫描器可致动以使样品相对于传感器移动，以使得尖端随着构件振荡而与所述样品间歇接触。控制器与传感器和扫描仪通信。控制器包括接收位移信号的传感器反馈电路和AC设定点信号。交流设定点信号的频率大体上等于传感器位移对频率曲线峰值处的频率。传感器反馈电路的输出被施加到传感器以使构件振荡。控制器还响应于位移信号向扫描仪提供输出，以控制传感器和样品之间的间隔距离。

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