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1. 发明授权

US08441649B2 Multi-beam interferometer displacement measuring system utilized in a large measuring range 有权
标题翻译：多光束干涉仪位移测量系统用于大量程
公开(公告)号：US08441649B2
公开(公告)日：2013-05-14
申请号：US12926697
申请日：2010-12-06
申请人： Yung-Cheng Wang , Lih-Horng Shyu , Chung-Ping Chang , Pi-Cheng Tung
发明人： Yung-Cheng Wang , Lih-Horng Shyu , Chung-Ping Chang , Pi-Cheng Tung
IPC分类号： G01B9/02
CPC分类号： G01B9/02018 , G01B9/02061 , G01B11/14 , G01B2290/25 , G01B2290/70
摘要： A multi-beam interferometer displacement measuring system has a light source module, a resonator module and a detecting device. The light source module has an emitter and a polaroid sheet. The emitter emits a non-polarizing beam. The polaroid sheet receives and transforms the non-polarizing beam into a polarizing beam. The resonator module receives the polarizing beam and has a coated glass panel, a corner cube prism and a wave-delay plate. The coated glass panel receives and reflects the polarizing beam. The corner cube prism receives and reflects the polarizing beam to the coated glass panel to form a resonant cavity. The wave-delay plate is mounted between the coated glass panel and the corner cube prism to receive the polarizing beam. The detecting device faces the coated glass panel to receive the interferential stripes formed in the resonator module and has a polarizing beam splitter, two power detectors and a signal processor.
摘要翻译：多光束干涉仪位移测量系统具有光源模块，谐振器模块和检测装置。光源模块具有发射器和偏光片。发射极发射非偏振光束。偏光片接收并将非偏振光束变换为偏振光束。谐振器模块接收偏振光束，并具有涂覆的玻璃面板，角立方棱镜和波浪延迟板。涂覆的玻璃面板接收和反射偏振光束。拐角立方棱镜将偏振光束接收并反射到涂覆的玻璃面板以形成谐振腔。波延迟板安装在涂覆的玻璃面板和角立方棱镜之间以接收偏振光束。检测装置面向涂覆的玻璃面板以接收在谐振器模块中形成的干涉条纹，并具有偏振分束器，两个功率检测器和信号处理器。

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