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1. 发明授权

US08705205B1 Magnetic recording head having a dual sidewall angle 有权
标题翻译：具有双重侧壁角度的磁记录头
公开(公告)号：US08705205B1
公开(公告)日：2014-04-22
申请号：US13169685
申请日：2011-06-27
申请人： Yunfei Li , Lijie Guan , Ying Hong , Zhigang Bai , Jinqiu Zhang , Yugang Wang , Feng Liu , Tao Pan
发明人： Yunfei Li , Lijie Guan , Ying Hong , Zhigang Bai , Jinqiu Zhang , Yugang Wang , Feng Liu , Tao Pan
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315
摘要： A magnetic transducer having an air-bearing surface (ABS) is described. The magnetic transducer includes a pole and at least one coil for energizing the pole. The pole has a pole tip proximate to the ABS, a yoke distal from the ABS, and a bottom surface including a bottom bevel. At least the yoke includes at least one sidewall having a first angle and a second angle. The first angle is between the bottom surface and the at least one sidewall. The second angle is a constant distance along the at least one sidewall from the first angle.
摘要翻译：描述了具有空气轴承表面（ABS）的磁换能器。磁换能器包括极和用于激励极的至少一个线圈。杆具有靠近ABS的极尖端，远离ABS的轭，以及包括底部斜面的底表面。至少轭包括具有第一角度和第二角度的至少一个侧壁。第一角度在底表面和至少一个侧壁之间。第二角度是从第一角度沿着至少一个侧壁的恒定距离。

2. 发明授权

US08520337B1 Perpendicular magnetic recording writer pole with leading and trailing bevel side wall angles at air bearing surface 有权
标题翻译：垂直磁记录笔杆，空气轴承表面具有前后斜面侧壁角
公开(公告)号：US08520337B1
公开(公告)日：2013-08-27
申请号：US13436712
申请日：2012-03-30
申请人： Feng Liu , Zhigang Bai , Yugang Wang , Jinqiu Zhang , Ying Hong , Tao Pan
发明人： Feng Liu , Zhigang Bai , Yugang Wang , Jinqiu Zhang , Ying Hong , Tao Pan
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315
摘要： A perpendicular magnetic recording transducer with leading and trailing bevel side wall angles at air bearing surface for use in a data storage device is provided. The transducer includes a magnetic writer pole having a pole tip facing an air bearing surface (ABS). The pole tip includes a pole tip face having a leading edge, a trailing edge, a first side wall, and a second side wall. The first side wall includes a first side wall section adjoining the leading edge and a second side wall section adjoining the trailing edge. The first side wall section is at a first angle measured from a perpendicular center line dividing the trailing edge. The second side wall section is at a second angle measured from a perpendicular center line dividing the trailing edge. The second angle is greater than three degrees. The first angle is greater than the second angle.
摘要翻译：提供了一种用于数据存储装置的在空气轴承表面具有前后倾斜侧壁角度的垂直磁记录传感器。换能器包括具有面向空气轴承表面（ABS）的极尖的磁性写入极。极尖包括具有前缘，后缘，第一侧壁和第二侧壁的极尖端面。第一侧壁包括邻接前缘的第一侧壁部分和与后缘相邻的第二侧壁部分。第一侧壁部分是从分割后缘的垂直中心线测量的第一角度。第二侧壁部分是从分割后缘的垂直中心线测量的第二角度。第二个角度大于三度。第一角度大于第二角度。

3. 发明授权

US09478236B1 Perpendicular magnetic recording write head 有权
标题翻译：垂直磁记录头
公开(公告)号：US09478236B1
公开(公告)日：2016-10-25
申请号：US13631808
申请日：2012-09-28
申请人： Feng Liu , Jinqiu Zhang , Zhigang Bai , Yugang Wang
发明人： Feng Liu , Jinqiu Zhang , Zhigang Bai , Yugang Wang
IPC分类号： G11B5/147
CPC分类号： G11B5/147 , G11B5/1278 , G11B5/3116
摘要： A main pole of a perpendicular magnetic recording write head is disclosed with a non-rectangular shape at the air bearing surface and a rectangular shape behind the air bearing surface. The main pole transitions from the non-rectangular shape to a rectangular shape at a distance of 10 nm to 100 nm behind the air bearing surface. The main pole includes leading and trailing beveled surfaces that extend from the non-rectangular shape of the pole at the air bearing surface toward the rectangular shape transition.
摘要翻译：公开了一种垂直磁记录写头的主极，在空气轴承表面具有非矩形形状，在空气轴承表面后面呈矩形形状。主极在空气轴承表面后方10nm到100nm的距离处从非矩形形状转变为矩形。主杆包括从空气轴承表面上的极的非矩形形状向矩形形状转变延伸的前后倾斜表面。

4. 发明授权

US09123359B1 Magnetic recording transducer with sputtered antiferromagnetic coupling trilayer between plated ferromagnetic shields and method of fabrication 有权
标题翻译：磁记录传感器，具有溅射反铁磁耦合三层电镀铁磁屏蔽和制造方法
公开(公告)号：US09123359B1
公开(公告)日：2015-09-01
申请号：US12976916
申请日：2010-12-22
申请人： Dehua Han , Ming Sun , Feng Liu , Jinqiu Zhang , Shaoping Li , Lieping Zhong , Xiaoqi Liu , Tao Pan
发明人： Dehua Han , Ming Sun , Feng Liu , Jinqiu Zhang , Shaoping Li , Lieping Zhong , Xiaoqi Liu , Tao Pan
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/315 , G11B5/3163
摘要： A magnetic recording transducer for use in a data storage device is described. The transducer has a main writer pole and magnetic shields adjacent to the main writer pole. The magnetic shields include a first plated soft ferromagnetic layer, a second plated soft ferromagnetic layer, and an antiferromagnetic coupling (AFC) trilayer between the first plated soft ferromagnetic layer and the second plated soft ferromagnetic layer. The AFC trilayer includes a first AFC layer of sputtered ferromagnetic material; a second AFC layer of a nonmagnetic antiferromagnetic exchange material, and a third AFC layer of sputtered ferromagnetic material. Shields with AFC trilayers in leading, side, and/or trailing shields, as well as between shields are provided. A method of fabricating is also provided.
摘要翻译：描述了用于数据存储装置的磁记录传感器。传感器有一个主要的写入极和磁屏蔽，靠近主要的写入极。磁屏蔽包括第一镀层软铁磁层，第二电镀软铁磁层和第一镀层软铁磁层与第二电镀软铁磁层之间的反铁磁耦合（AFC）三层。 AFC三层包括溅射铁磁材料的第一AFC层; 非磁性反铁磁交换材料的第二AFC层和溅射的铁磁材料的第三AFC层。提供了前导，侧面和/或尾部屏蔽以及屏蔽之间的AFC三层屏蔽罩。还提供了一种制造方法。

5. 发明授权

US08563146B1 Method and system for providing a magnetic recording pole having a dual sidewall angle 有权
标题翻译：用于提供具有双重侧壁角的磁记录极的方法和系统
公开(公告)号：US08563146B1
公开(公告)日：2013-10-22
申请号：US13169710
申请日：2011-06-27
申请人： Jinqiu Zhang , Ying Hong , Hai Sun , Hongping Yuan , Guanghong Luo , Xiaoyu Yang , Hongmei Han , Lingyun Miao
发明人： Jinqiu Zhang , Ying Hong , Hai Sun , Hongping Yuan , Guanghong Luo , Xiaoyu Yang , Hongmei Han , Lingyun Miao
IPC分类号： G11B5/33
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A method for fabricating a magnetic transducer having an air-bearing surface (ABS). An underlayer having a first and second regions and a bevel connecting these regions is provided. The first region is thicker and closer to the ABS than the second region. An intermediate layer conformal with the underlayer is provided. A hard mask layer having a top surface perpendicular to the ABS is formed on the intermediate layer. Part of the hard mask and intermediate layers are removed to provide a trench. The trench has a bottom surface and sidewalls having a first angle between the bottom surface and the intermediate layer and a second angle corresponding to the hard mask layer. A pole is provided in the trench. The pole has a pole tip, a yoke distal, and a bottom bevel. At least the yoke includes sidewalls having sidewall angles corresponding to the first and second angles.
摘要翻译：一种制造具有空气轴承表面（ABS）的磁换能器的方法。提供具有第一和第二区域的底层以及连接这些区域的斜面。第一区域比第二区域更厚且更接近ABS。提供与底层共形的中间层。在中间层上形成具有垂直于ABS的顶表面的硬掩模层。除去硬掩模和中间层的一部分以提供沟槽。沟槽具有底表面和在底表面和中间层之间具有第一角度的侧壁和对应于硬掩模层的第二角度。在沟槽中设置一个极点。杆具有极尖，轭远端和底斜面。至少轭包括具有对应于第一和第二角度的侧壁角的侧壁。

6. 发明授权

US08225488B1 Method for providing a perpendicular magnetic recording (PMR) pole 有权
标题翻译：提供垂直磁记录（PMR）极的方法
公开(公告)号：US08225488B1
公开(公告)日：2012-07-24
申请号：US12471278
申请日：2009-05-22
申请人： Jinqiu Zhang , Yun-Fei Li , Ying Hong
发明人： Jinqiu Zhang , Yun-Fei Li , Ying Hong
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for providing a PMR pole in a magnetic recording transducer comprises providing a mask on an intermediate layer, the mask including a line having at least one side, providing a hard mask on the mask, a first portion of the hard mask residing on the at least one side and a second portion residing on a surface of the intermediate layer, the hard mask including a dry-etchable layer and a high removal ratio layer on the dry-etchable layer, removing at least part of the first portion of the hard mask, at least a portion of the line being exposed, removing the line, thereby providing an aperture in the hard mask corresponding to the line, forming a trench in the intermediate layer under the aperture using a removal process, and providing the PMR pole, at least a portion of the PMR pole residing in the trench.
摘要翻译：用于在磁记录换能器中提供PMR极的方法包括在中间层上提供掩模，所述掩模包括具有至少一个侧面的线，在所述掩模上提供硬掩模，所述硬掩模的位于所述掩模上的第一部分驻留在中间层的表面上的至少一个侧面和第二部分，该硬掩模包括在该可干蚀刻层上的可干蚀刻层和高去除率层，去除硬的第一部分的至少一部分掩模，线的至少一部分被暴露，去除线，从而在对应于线的硬掩模中提供孔，使用去除过程在孔下方的中间层中形成沟槽，以及提供PMR极， PMR极的至少一部分位于沟槽中。

7. 发明授权

US08451563B1 Method for providing a side shield for a magnetic recording transducer using an air bridge 有权
标题翻译：用于使用空气桥提供用于磁记录换能器的侧屏蔽的方法
公开(公告)号：US08451563B1
公开(公告)日：2013-05-28
申请号：US13331208
申请日：2011-12-20
申请人： Jinqiu Zhang , Feng Liu , Shaoping Li , Ming Sun
发明人： Jinqiu Zhang , Feng Liu , Shaoping Li , Ming Sun
IPC分类号： G11B5/17 , G11B5/127
CPC分类号： G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49044
摘要： A method fabricates a side shield for a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. The nonmagnetic layer has a pole trench therein. The pole trench has a shape and location corresponding to the pole. A wet etchable layer is deposited. Part of the wet etchable layer resides in the pole trench. A pole is formed. The pole has a bottom and a top wider than the bottom in the pole tip region. Part of the pole in the pole tip region is in the pole trench on at least part of the wet etchable layer. At least parts of the wet etchable layer and the nonmagnetic layer are removed, forming an air bridge. The air bridge is between part of the pole at the ABS location and an underlying layer. Side shield layer(s) that substantially fill the air bridge are deposited.
摘要翻译：一种制造用于具有对应于ABS的非磁性层和ABS位置的磁换能器的侧屏蔽的方法。非磁性层在其中具有极沟槽。极沟具有对应于极的形状和位置。沉积湿蚀刻层。湿蚀刻层的一部分位于极沟槽中。一个极点形成。电极具有底部和顶部宽于电极尖端区域中的底部。极尖区域中的极的一部分在至少部分湿蚀刻层的极沟中。去除湿蚀刻层和非磁性层的至少一部分，形成空气桥。空气桥在ABS位置的极点的一部分和下层之间。基本上填充空气桥的侧面屏蔽层被沉积。

8. 发明授权

US09202480B2 Double patterning hard mask for damascene perpendicular magnetic recording (PMR) writer 有权
标题翻译：用于大马士革垂直磁记录（PMR）作者的双重图案化硬掩模
公开(公告)号：US09202480B2
公开(公告)日：2015-12-01
申请号：US12579316
申请日：2009-10-14
申请人： Xiaohai Xiang , Yun-Fei Li , Jinqiu Zhang , Hongping Yuan , Xianzhong Zeng , Hai Sun
发明人： Xiaohai Xiang , Yun-Fei Li , Jinqiu Zhang , Hongping Yuan , Xianzhong Zeng , Hai Sun
IPC分类号： B44C1/22 , C03C15/00 , H01L21/4763 , G11B5/31 , G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T428/11
摘要： Various embodiments of the subject disclosure provide a double patterning process that uses two patterning steps to produce a write structure having a nose shape with sharp corners. In one embodiment, a method for forming a write structure on a multi-layer structure comprising a substrate and an insulator layer on the substrate is provided. The method comprises forming a hard mask layer over the insulator layer, performing a first patterning process to form a pole and yoke opening in the hard mask layer, performing a second patterning process to remove rounded corners of the pole and yoke opening in the hard mask layer, removing a portion of the insulator layer corresponding to the pole and yoke opening in the hard mask layer to form a trench in the insulator layer, and filling the trench with a magnetic material.
摘要翻译：本发明公开的各种实施例提供一种双重图案化工艺，其使用两个图案化步骤来产生具有尖角的鼻子形状的写入结构。在一个实施例中，提供了一种用于在包括衬底和衬底上的绝缘体层的多层结构上形成写结构的方法。该方法包括在绝缘体层上形成硬掩模层，执行第一图案化工艺以在硬掩模层中形成极和轭开口，执行第二图案化处理以去除硬掩模中的极和轭开口的圆角去除与硬掩模层中的极和轭开口相对应的绝缘体层的一部分，以在绝缘体层中形成沟槽，并用磁性材料填充沟槽。

9. 发明授权

US08018678B1 Method for simultaneous electronic lapping guide (ELG) and perpendicular magnetic recording (PMR) pole formation 有权
标题翻译：同时电子研磨导轨（ELG）和垂直磁记录（PMR）极点形成方法
公开(公告)号：US08018678B1
公开(公告)日：2011-09-13
申请号：US12324442
申请日：2008-11-26
申请人： Jinqiu Zhang , Tsung Yuan Chen , Steven C. Rudy
发明人： Jinqiu Zhang , Tsung Yuan Chen , Steven C. Rudy
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3166 , G11B5/3169
摘要： A method for providing a perpendicular magnetic recording (PMR) head is disclosed. The method comprises: providing a stop layer; providing an insulating layer over the stop layer; forming a pole trench in the insulating layer by performing a reactive ion etching (RIE) process in the insulating layer over the stop layer; forming an electronic lapping guide (ELG) in the insulating layer by performing the RIE process in the insulating layer over the stop layer; and providing a PMR pole in which at least a portion of the PMR pole resides in the pole trench.
摘要翻译：公开了一种用于提供垂直磁记录（PMR）头的方法。该方法包括：提供停止层; 在停止层上提供绝缘层; 通过在所述绝缘层上在停止层上进行反应离子蚀刻（RIE）工艺，在所述绝缘层中形成极沟槽; 通过在所述阻挡层上的所述绝缘层中进行RIE处理，在所述绝缘层中形成电子研磨导向器（ELG）; 以及提供PMR极，其中PMR极的至少一部分位于极沟中。

10. 发明授权

US07286329B1 GMR sensor with shallow contiguous junction and bias layers aligned with free sensor layers 失效
标题翻译： GMR传感器具有与自由传感器层对准的浅连续结和偏置层
公开(公告)号：US07286329B1
公开(公告)日：2007-10-23
申请号：US10788656
申请日：2004-02-27
申请人： Yingjian Chen , Wei Zhang , Mohamad T. Krounbi , Satoru Araki , Jinqiu Zhang
发明人： Yingjian Chen , Wei Zhang , Mohamad T. Krounbi , Satoru Araki , Jinqiu Zhang
IPC分类号： G11B5/39
CPC分类号： G01R31/318357 , G11B5/3932
摘要： A magnetic sensor is disclosed having a shallow contiguous junction. Such a sensor is can greatly increase yield for mass-produced heads, especially for large wafers. The magnetic bias layers can be aligned with a free layer of the sensor, improving performance. Milling may be terminated prior to penetration of an antiferromagnetic layer, so that for example the antiferromagnetic layer may extend significantly beyond the free and pinned layers of the sensor.
摘要翻译：公开了一种具有浅连续结的磁传感器。这种传感器可以大大提高批量生产头部的产量，特别是对于大型晶片。磁偏置层可以与传感器的自由层对准，从而提高性能。铣削可以在穿透反铁磁层之前终止，使得例如反铁磁层可以显着地延伸超过传感器的自由和固定层。

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