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1. 发明授权

US07796257B2 Measuring apparatus, measuring method, and characteristic measurement unit 有权
标题翻译：测量装置，测量方法和特征测量单元
公开(公告)号：US07796257B2
公开(公告)日：2010-09-14
申请号：US12087663
申请日：2006-12-27
申请人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
发明人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01J4/04
摘要： A measuring apparatus includes a light intensity information acquisition section 40 that acquires light intensity information relating to a measurement light containing a given band component, the measurement light having been modulated by optical elements included in an optical system 10 and a measurement target (or a sample 100), and a calculation section 50 that calculates at least one matrix element of a Mueller matrix that indicates the optical characteristics of the measurement target based on the light intensity information relating to the measurement light and a theoretical expression for the light intensity of the measurement light. The light intensity information acquisition section 40 acquires the light intensity information relating to a plurality of the measurement lights obtained from the optical system 10 by changing setting of a principal axis direction of at least one of the optical elements. The calculation section 50 performs a carrier amplitude coefficient calculation process, and a matrix element calculation process that calculates the at least one matrix element based on a carrier amplitude coefficient and the theoretical expression for the carrier amplitude coefficient including the at least one matrix element.
摘要翻译：测量装置包括光强度信息获取部分40，其获取与包含给定频带分量的测量光有关的光强度信息，测量光已被包括在光学系统10中的光学元件和测量对象（或样品 100），以及计算部50，其基于与测量光有关的光强度信息和测量光强度的理论表达式，计算指示测量对象的光学特性的Mueller矩阵的至少一个矩阵元素光。光强度信息获取部40通过改变至少一个光学元件的主轴方向的设定来获取与从光学系统10获得的多个测量光有关的光强度信息。计算部分50执行载波幅度系数计算处理和基于载波幅度系数和包括至少一个矩阵元素的载波幅度系数的理论表达式来计算至少一个矩阵元素的矩阵元素计算处理。

2. 发明申请

US20090051916A1 Measuring Apparatus, Measuring Method, and Characteristic Measurement Unit 有权
标题翻译：测量装置，测量方法和特性测量单元
公开(公告)号：US20090051916A1
公开(公告)日：2009-02-26
申请号：US12087663
申请日：2006-12-27
申请人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
发明人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01J4/04
摘要： A measuring apparatus includes a light intensity information acquisition section 40 that acquires light intensity information relating to a measurement light containing a given band component, the measurement light having been modulated by optical elements included in an optical system 10 and a measurement target (or a sample 100), and a calculation section 50 that calculates at least one matrix element of a Mueller matrix that indicates the optical characteristics of the measurement target based on the light intensity information relating to the measurement light and a theoretical expression for the light intensity of the measurement light. The light intensity information acquisition section 40 acquires the light intensity information relating to a plurality of the measurement lights obtained from the optical system 10 by changing setting of a principal axis direction of at least one of the optical elements. The calculation section 50 performs a carrier amplitude coefficient calculation process, and a matrix element calculation process that calculates the at least one matrix element based on a carrier amplitude coefficient and the theoretical expression for the carrier amplitude coefficient including the at least one matrix element.
摘要翻译：测量装置包括光强度信息获取部分40，其获取与包含给定频带分量的测量光有关的光强度信息，测量光已被包括在光学系统10中的光学元件和测量对象（或样品 100），以及计算部50，其基于与测量光有关的光强度信息和测量光强度的理论表达式，计算指示测量对象的光学特性的Mueller矩阵的至少一个矩阵元素光。光强度信息获取部40通过改变至少一个光学元件的主轴方向的设定来获取与从光学系统10获得的多个测量光有关的光强度信息。计算部分50执行载波幅度系数计算处理和基于载波幅度系数和包括至少一个矩阵元素的载波幅度系数的理论表达式来计算至少一个矩阵元素的矩阵元素计算处理。

3. 发明申请

US20090213374A1 Optical Characteristic Measuring Apparatus and Optical Characteristics Measuring Method 有权
标题翻译：光学特性测量装置和光学特性测量方法
公开(公告)号：US20090213374A1
公开(公告)日：2009-08-27
申请号：US11887410
申请日：2006-03-17
申请人： Yukitoshi Otani , Toshitaka Wakayama
发明人： Yukitoshi Otani , Toshitaka Wakayama
IPC分类号： G01J4/00
CPC分类号： G01N21/23 , G01N2021/218
摘要： An optical characteristic measuring apparatus includes an optical system 10 including first and second carrier retarders 24 and 32 having the retardations being known and differing from each other. The optical characteristic measuring apparatus performs: a spectrum extraction process of extracting a plurality of spectral peaks from a frequency spectrum obtained by analyzing a light intensity signal detected by light-receiving/spectroscopic means; and an optical characteristic element calculation process of calculating an optical characteristic element representing optical characteristics of a measurement target based on the spectral peaks and the retardations of the first and second carrier retarders.
摘要翻译：光学特性测量装置包括光学系统10，该光学系统10包括第一和第二载体延迟器24和32，其具有已知的并且彼此不同的延迟。光学特性测量装置执行：从通过分析由光接收/分光装置检测的光强度信号获得的频谱中提取多个频谱峰值的频谱提取处理; 以及基于第一和第二载波延迟器的频谱峰值和延迟来计算表示测量对象的光学特性的光学特征元素的光学特征元素计算处理。

4. 发明申请

US20090040522A1 Measuring Apparatus and Measuring Method 审中-公开
标题翻译：测量仪器和测量方法
公开(公告)号：US20090040522A1
公开(公告)日：2009-02-12
申请号：US12224491
申请日：2007-02-16
申请人： Yukitoshi Otani , Naoki Asato , Toshitaka Wakayama
发明人： Yukitoshi Otani , Naoki Asato , Toshitaka Wakayama
IPC分类号： G01N21/21
CPC分类号： G01N21/21 , G01J4/04 , G01N21/23
摘要： A measuring apparatus that measures the polarization state of analysis target light includes a modulation section 20 that includes a retarder 22 and an analyzer 24, a light intensity information acquisition section 30 that acquires light intensity information about modulated light obtained by modulating the analysis target light at the modulation section, and a calculation section 50 that calculates a polarization characteristic element of the analysis target light based on the light intensity information. The light intensity information acquisition section acquires the light intensity information about first modulated light to Nth modulated light respectively obtained by modulating the analysis target light at the modulation section set under first to Nth principal axis direction conditions which differ in the principal axis direction of at least one of the retarder and the analyzer. The calculation section calculates the polarization characteristic element based on a light intensity theoretical expression for the first modulated light to the Nth modulated light and first light intensity information to Nth light intensity information.
摘要翻译：测量分析对象光的偏振状态的测量装置包括：调制部20，其包括延迟器22和分析器24;光强度信息获取部30，其获取通过调制分析对象光获得的调制光的光强度信息调制部，以及基于光强度信息计算分析对象光的偏振特性元素的计算部50。光强度信息获取部获取通过调制在至少主轴方向上不同的第一至第N主轴方向条件下设定的调制部分的分析目标光，分别获得关于第一调制光至第N调制光的光强度信息减速器和分析仪之一。计算部基于第一调制光对第N调制光和第一光强度信息的光强度理论表达式计算偏振特性元素至第N光强度信息。

5. 发明授权

US08107075B2 Optical characteristic measuring apparatus and optical characteristics measuring method 有权
标题翻译：光学特性测量仪器和光学特性测量方法
公开(公告)号：US08107075B2
公开(公告)日：2012-01-31
申请号：US11887410
申请日：2006-03-17
申请人： Yukitoshi Otani , Toshitaka Wakayama
发明人： Yukitoshi Otani , Toshitaka Wakayama
IPC分类号： G01J4/00
CPC分类号： G01N21/23 , G01N2021/218
摘要： An optical characteristic measuring apparatus includes an optical system 10 including first and second carrier retarders 24 and 32 having the retardations being known and differing from each other. The optical characteristic measuring apparatus performs: a spectrum extraction process of extracting a plurality of spectral peaks from a frequency spectrum obtained by analyzing a light intensity signal detected by light-receiving/spectroscopic means; and an optical characteristic element calculation process of calculating an optical characteristic element representing optical characteristics of a measurement target based on the spectral peaks and the retardations of the first and second carrier retarders.
摘要翻译：光学特性测量装置包括光学系统10，该光学系统10包括第一和第二载体延迟器24和32，其具有已知的并且彼此不同的延迟。光学特性测量装置执行：从通过分析由光接收/分光装置检测的光强度信号获得的频谱中提取多个频谱峰值的频谱提取处理; 以及基于第一和第二载波延迟器的频谱峰值和延迟来计算表示测量对象的光学特性的光学特征元素的光学特征元素计算处理。

6. 发明申请

US20090033936A1 Optical characteristic measuring apparatus and optical characteristic measuring method 审中-公开
标题翻译：光学特性测量装置和光学特性测量方法
公开(公告)号：US20090033936A1
公开(公告)日：2009-02-05
申请号：US11922006
申请日：2006-06-09
申请人： Yukitoshi Otani , Toshitaka Wakayama
发明人： Yukitoshi Otani , Toshitaka Wakayama
IPC分类号： G01N21/21
CPC分类号： G01N21/23
摘要： An optical characteristic measuring apparatus including a carrier retarder of which the retardation is known and a quarter-wave plate without wavelength dependence, wherein light emitted from a light source (light-emitting device) is incident on a measurement target through a first polarizer (polarizer), the carrier retarder, and the quarter-wave plate, and the light which has passed through the measurement target is incident on a photodetector through a second polarizer (analyzer). A spectral peak is extracted from a frequency spectrum obtained by analyzing a light intensity signal detected by the photodetector. The optical characteristic element of the measurement target is calculated based on the extracted spectral peak and the retardation of the carrier retarder.
摘要翻译：一种光学特性测量装置，包括具有已知延迟的载波延迟器和没有波长依赖性的四分之一波片，其中从光源（发光器件）发射的光通过第一偏振器（偏振器）入射到测量目标），载波延迟器和四分之一波片，并且已经通过测量对象的光通过第二偏振器（分析器）入射到光电检测器。从通过分析由光电检测器检测的光强度信号获得的频谱中提取频谱峰值。基于提取的光谱峰值和载波延迟器的延迟来计算测量目标的光学特征元素。

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